公开(公告)号：US20160161869A1

公开(公告)日：2016-06-09

申请号：US15040908

申请日：2016-02-10

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Israel Avneri ,  Igor Krivts (Krayvitz) ,  Yoram Uziel ,  Nir Ben-David Dodzin ,  Ido Holcman

IPC: G03F9/00

CPC classification number: G03F9/7096 ,  G03F7/0002 ,  H01L21/67359 ,  H01L21/67775 ,  H01L21/67778

Abstract: A system for coupling a mask to a mask holder. The system includes a base, an aperture; mask holder cover supporting elements arranged to move between a first position and a third position while supporting the mask holder cover; mask supporting elements arranged to move between a fourth position and a sixth position while supporting the mask; mask holder base supporting elements arranged to support the mask holder base. When the mask holder cover supporting elements are at the first position and the mask supporting elements are at the third position the mask holder cover, the mask and the base are spaced apart from each other. When the mask holder cover supporting elements are at the third position and the mask supporting elements are at the sixth position the mask holder cover, the mask and the base are connected to each other.

Abstract translation: 一种用于将掩模与掩模支架结合的系统。 该系统包括基座，孔径; 掩模保持器盖支撑元件，布置成在支撑掩模保持器盖的同时在第一位置和第三位置之间移动; 掩模支撑元件，布置成在支撑所述掩模的同时在第四位置和第六位置之间移动; 布置用于支撑掩模支架基座的掩模支架基座支撑元件。 当掩模支架覆盖支撑元件处于第一位置并且掩模支撑元件处于第三位置时，掩模保持器盖，掩模和基座彼此间隔开。 当掩模保持器覆盖支撑元件处于第三位置并且掩模支撑元件处于第六位置时，掩模保持器盖，掩模和基座彼此连接。

公开(公告)号：US20150075659A1

公开(公告)日：2015-03-19

申请号：US14456258

申请日：2014-08-11

Applicant: Applied Materials Israel, Ltd.

Inventor： Michael R. Rice ,  Natan Schlimoff ,  Igor Krivts (Krayvitz) ,  Israel Avneri ,  Yoram Uziel ,  Erez Admoni ,  Paul Reuter ,  William (Ty) Weaver

IPC: F16K3/16 ,  F16K31/124 ,  F16K3/02

CPC classification number: F16K3/0236 ,  F16K3/0227 ,  F16K3/188 ,  F16K25/02 ,  F16K39/04 ,  F16K51/02 ,  Y10T137/877

Abstract: According to an embodiment of the invention, there is provided a slit valve, comprising: a first slit valve portion having a first window therethrough, the first window is sized to permit passage of an object through the first window; wherein the first window is surrounded by a first area of the first slit valve portion; a second slit valve portion that comprises a first sealing element and a first positioning module; wherein the first positioning module is arranged to move the first sealing element in relation to the first window; wherein at least one slit valve portion of the first and second slit valve portions comprises at least one first gas opening for emitting pressurized gas so as to assist in a creation of a first gas cushion between the first area and the first sealing element when the first sealing element is placed adjacent to the first window thus creating a seal between the first and second slit valve portions.

Abstract translation: 根据本发明的实施例，提供了一种狭缝阀，包括：第一狭缝阀部分，其具有穿过其中的第一窗口，第一窗口的尺寸设定成允许物体通过第一窗口; 其中所述第一窗口被所述第一狭缝阀部分的第一区域包围; 第二狭缝阀部分，其包括第一密封元件和第一定位模块; 其中所述第一定位模块被布置成相对于所述第一窗口移动所述第一密封元件; 其中所述第一和第二狭缝阀部分的至少一个狭缝阀部分包括用于发射加压气体的至少一个第一气体开口，以便当所述第一和第二狭缝阀部分在所述第一和第二狭缝阀部分的所述第一和第二密封元件之间产生第一气垫时， 密封元件被放置成与第一窗口相邻，从而在第一和第二狭缝阀部分之间形成密封。

公开(公告)号：US20140027968A1

公开(公告)日：2014-01-30

申请号：US13944815

申请日：2013-07-17

Applicant: APPLIED MATERIALS ISRAEL, LTD.

Inventor： Igor Krayvitz (Krivts) ,  Israel Avneri ,  Yoram Uziel ,  Natan Schlimoff ,  Gilad Schwartz ,  Yochanan Madmon

IPC: B23Q3/00

CPC classification number: B23Q3/00 ,  B08B3/04 ,  C23C16/4409 ,  H01L21/6715 ,  H01L21/6719 ,  H01L21/67201

Abstract: Chamber elements defining a chamber include a first element having a first surface, a second element, a first dynamic seal and load mechanism. The second element includes an outer floating element that includes a second surface about the periphery of the chamber, and an inner floating element. The second surface and the first surface are maintained proximate to each other when the chamber is in a load position and when the chamber is closed. The load mechanism may move the inner floating element from the outer floating element until a gap between the inner floating element and the second element to facilitate loading of the device to the chamber. A movement system may generate relative movement between the first element and the second element.

Abstract translation: 限定腔室的室元件包括具有第一表面的第一元件，第二元件，第一动态密封件和负载机构。 第二元件包括外部浮动元件，其包括围绕室的周边的第二表面和内部浮动元件。 当腔室处于加载位置和腔室关闭时，第二表面和第一表面保持彼此靠近。 负载机构可以将内部浮动元件从外部浮动元件移动到内部浮动元件和第二元件之间的间隙，以便于将装置加载到腔室。 移动系统可以在第一元件和第二元件之间产生相对移动。