公开(公告)号：US12013047B1

公开(公告)日：2024-06-18

申请号：US18343602

申请日：2023-06-28

Applicant: Colt Irrigation, LLC

Inventor： William E. Hurst ,  James Walter Hurst

IPC: F16K3/04 ,  F16K3/02 ,  F16K3/18 ,  F16K27/02 ,  F16K31/04 ,  F16K31/54

CPC classification number: F16K3/04 ,  F16K3/0218 ,  F16K3/188 ,  F16K27/029 ,  F16K31/047 ,  F16K31/54

Abstract: A valve comprises: a housing defining a chamber; a fluid outlet defined by a fluid outlet wall; and a first fluid outlet orifice and a second fluid outlet orifice comprising a rigid seat. The valve comprises a movable gate, that is flexible and/or compressible and impermeable. The moveable gate is more flexible than the rigid seat, has a planar surface, and is configured to slidably move in a first axis. The movable gate is configured to be positioned so that it is located between a fluid inlet orifice and the second fluid outlet orifice when the valve is in a closed position, wherein fluid pressure within the chamber causes the movable gate to seal the second fluid outlet orifice via the rigid seat, and not the fluid inlet orifice. The valve may employ gate shapes that generate and/or exploit Bernoulli effect forces when fluid passes though the valve.

公开(公告)号：US11927274B2

公开(公告)日：2024-03-12

申请号：US17621693

申请日：2020-10-28

Applicant: M-SYSTEM CO., LTD.

Inventor： Hiroyuki Fujiwara ,  Takanobu Wahira

IPC: F16K31/04 ,  F16K3/18 ,  F16K3/20 ,  F16K37/00 ,  G05D3/12

CPC classification number: F16K31/04 ,  F16K3/188 ,  F16K3/207 ,  F16K37/0008 ,  F16K37/0033 ,  G05D3/12

Abstract: The actuator includes a control unit configured to allow a first control capable of driving a drive part with a first driving force and a second control capable of driving the drive part with a second driving force which is stronger than the first driving force, a moving part configured to move in a predetermined direction, an elastic member configured to receive at least one of the first driving force and the second driving force from the drive part and to supply a force for the moving part to move to the moving part, and a detection unit configured to supply a detection signal for detecting a stop of the drive part to the control unit, in which the control unit performs the second control when a stop of the drive part is detected after performing the first control.

公开(公告)号：US20180051813A1

公开(公告)日：2018-02-22

申请号：US15557959

申请日：2016-03-10

Applicant: VAT Holding AG

Inventor： Klaus Albrecht

IPC: F16K3/02 ,  F16K3/18 ,  F16K3/04 ,  F16K1/12 ,  F16K51/02

CPC classification number: F16K3/0236 ,  F16K1/12 ,  F16K3/0263 ,  F16K3/029 ,  F16K3/04 ,  F16K3/06 ,  F16K3/12 ,  F16K3/18 ,  F16K3/188 ,  F16K25/005 ,  F16K51/02

Abstract: A valve (1), in particular a vacuum valve, having at least one valve housing (2), at least one closure element (3), and at least one valve seat (4). The valve seat (4) surrounds at least one valve opening (5) of the valve (1), and the closure element (3) can be moved back and forth between at least one open position, in which the closure element (3) at least partly releases the valve opening (5), and a closed position, in which a sealing surface (8) of the closure element (3) is pressed against the valve seat (4) in order to close the valve opening (5), by at least one closure element drive (6, 7). At least one surface (9) of the valve (1) has an average surface roughness RZ less than or equal to 0.4 um, preferably less than or equal to 0.25 um.

公开(公告)号：US20170309457A1

公开(公告)日：2017-10-26

申请号：US15139174

申请日：2016-04-26

Applicant: ASM IP Holding B.V.

Inventor： Kazunori FURUKAWAHARA

IPC: H01J37/32 ,  F16K43/00 ,  H01L21/67

CPC classification number: H01J37/32513 ,  F16K3/029 ,  F16K3/182 ,  F16K3/188 ,  F16K43/001 ,  F16K51/02 ,  H01J37/32082 ,  H01J37/32743 ,  H01J37/32788 ,  H01J37/32807 ,  H01J37/3288 ,  H01J37/32899 ,  H01J2237/332 ,  H01J2237/334 ,  H01L21/67069 ,  H01L21/67126

Abstract: A substrate processing apparatus includes a chamber in which a first processing space, a second processing space, a connecting space connecting the first processing space and the second processing space, a first hole connecting with the connecting space and a second hole connecting with the connecting space are formed, a first gate valve having a first valve element and closing the first hole, the first valve element sliding in the first hole, opening and closing the connecting space, and a second gate valve having a second valve element and closing the second hole, the second valve element sliding in the second hole, opening and closing the connecting space, wherein a region in which the first hole and the connecting space connect with each other and a region in which the second hole and the connecting space connect with each other are one common region.

公开(公告)号：US09273800B2

公开(公告)日：2016-03-01

申请号：US13969647

申请日：2013-08-19

Applicant: VAT Holding AG

Inventor： Christoph Angst ,  Rico Rohner

IPC: F16K51/02 ,  F16K3/18

CPC classification number: F16K51/02 ,  F16K3/188

Abstract: A valve (1), in particular a vacuum valve, comprising a valve plate (2) for closing an opening (3), in particular of the valve (1), and comprising at least two piston cylinder units (4, 5) for pressing the valve plate (2) against a valve seat (6), in particular of the valve (1), said valve seat surrounding the opening (3), at least one of the piston cylinder units (5) having at least one cylinder (7) as a component and at least one piston (8) arranged displaceably in the cylinder (7) as a further component, one of the components of the piston cylinder unit (5) being fixed on the valve plate (2), in particular in a manner stationary relative to the valve plate (2), wherein at least one of the components, preferably the other component, of this piston cylinder unit (5) is mounted on at least one support (10, 11) of the valve (1) so as to be movable, preferably displaceable, at least in a direction (9) parallel to the spacing between two adjacent piston cylinders units (4, 5). (FIG 7)

Abstract translation: 阀（1），特别是真空阀，包括用于封闭特别是阀（1）的开口（3）的阀板（2），并且包括至少两个活塞缸单元（4,5），用于 将阀板（2）压在阀座（6）上，特别是阀（1）的阀座（4）上，所述阀座围绕开口（3），至少一个活塞气缸单元（5）具有至少一个气缸 （7）作为部件，并且至少一个活塞（8）作为另一部件在所述气缸（7）中可移动地布置，所述活塞气缸单元（5）的一个部件固定在所述阀板（2）上， 特别是以相对于阀板（2）固定的方式，其中该活塞缸单元（5）的至少一个部件（优选地是另一部件）安装在阀的至少一个支撑件（10,11）上 （1），以便至少在与两个相邻的活塞缸单元（4,5）之间的间隔平行的方向（9）上可移动，优选地可移动。 （图7）

公开(公告)号：US08453677B2

公开(公告)日：2013-06-04

申请号：US12747475

申请日：2008-12-11

Applicant: Jonathan Sebastian Howes ,  James Macnaghten

Inventor： Jonathan Sebastian Howes ,  James Macnaghten

IPC: F16K47/08 ,  F16K3/32 ,  F16K25/00

CPC classification number: F16K15/14 ,  F16K3/0254 ,  F16K3/029 ,  F16K3/188 ,  Y10T137/7837 ,  Y10T137/86734 ,  Y10T137/86759

Abstract: A valve (50) comprising a first part (401) defining a first array of apertures and a second part (2) defining a second array of apertures, the first part (401) being moveable laterally relative to the second part (2) between a closed configuration in which the first and second arrays of apertures are not registered to substantially prevent passage of a fluid through the valve and an open configuration in which the first and second arrays of apertures are registered to allow passage of fluid, wherein the first and second parts (401, 2) are configured to lock in the closed configuration in response to a pressure differential across the valve (50). In one embodiment, the first part (401) is configured to be sealed against the second part (2) by a pressure differential across the valve when the first and second parts (401,2) are locked in the closed configuration.

Abstract translation: 一种阀（50），包括限定第一阵列孔的第一部分（401）和限定孔的第二阵列的第二部分（2），所述第一部分（401）可相对于所述第二部分（2） 闭合构造，其中第一和第二孔阵列未被注册以基本上防止流体通过阀门的通道以及其中第一和第二孔阵列被配准以允许流体通过的打开构造，其中第一和第 第二部分（401,2）被配置为响应于阀（50）两端的压力差而锁定在闭合构型。 在一个实施例中，当第一和第二部分（401,2）被锁定在关闭构造中时，第一部分（401）构造成通过跨越阀的压力差而与第二部分（2）密封。

公开(公告)号：US20100175771A1

公开(公告)日：2010-07-15

申请号：US12351479

申请日：2009-01-09

Applicant: Tony R. Garrison ,  Gregory L. Puckett

Inventor： Tony R. Garrison ,  Gregory L. Puckett

IPC: F16L55/10

CPC classification number: F16K1/00 ,  F16K3/188 ,  F16L55/105 ,  F16L55/124 ,  F16L55/1608 ,  Y10T29/49826

Abstract: A plugging device for double blocking a section of pipeline or piping and method for its use includes a first and second sealing element and at least one cylinder that is extendable along an axial direction of the pipe between a retracted first position and an extended second position. A means for actuating the cylinder, such as a fluid power source, is provided. When the cylinder is in the extended second position, the sealing element sealably engages an opposing cut end of the pipe. The sealing element is an elastomeric sealing element and may be cup-shaped, convex-shaped, or cork-shaped.

Abstract translation: 用于双重堵塞管道或管道的一部分的堵塞装置及其使用方法包括第一和第二密封元件和至少一个缸体，所述至少一个缸体在缩回的第一位置和延伸的第二位置之间沿着管道的轴向方向可延伸。 提供了用于致动气缸的装置，例如流体动力源。 当气缸处于延伸的第二位置时，密封元件与管的相对的切割端密封地接合。 密封元件是弹性体密封元件，并且可以是杯形，凸形或软木形。

公开(公告)号：US20100051111A1

公开(公告)日：2010-03-04

申请号：US12538237

申请日：2009-08-10

Applicant: Takayuki Matsumoto ,  Shinichi Kurita

Inventor： Takayuki Matsumoto ,  Shinichi Kurita

IPC: F15D1/00 ,  F16K3/00

CPC classification number: F16K3/188 ,  F16K51/02 ,  H01L21/67772 ,  Y10T137/0391

Abstract: Embodiments disclosed herein generally relate to methods for sealing a processing chamber with a slit valve door. The door initially raises from a position below the opening for the processing chamber to a raised position. The door then expands until an O-ring that is on the door just touches the sealing surface. Then, the door expands again to compress the O-ring against the sealing surface. The door expands by flowing a gas into the interior volume of the door. By controlling the pressure buildup within the door, the speed with which the door expands is controlled to ensure that the door gently contacts the sealing surface and then compresses against the sealing surface. Thus, the door may be prevented from contacting the sealing surface with too great a force that may jolt or shake the processing chamber and produce undesired particles that may contaminate the process.

Abstract translation: 本文公开的实施例通常涉及用狭缝阀门密封处理室的方法。 门最初从处理室的开口下方的位置升高到升高位置。 门然后膨胀，直到门上的O形圈刚好碰到密封面。 然后，门再次膨胀以将O形环压靠在密封表面上。 通过将气体流入门的内部空间来扩大门。 通过控制门内的压力积分，控制门膨胀的速度，以确保门轻轻地接触密封表面，然后压靠密封表面。 因此，可以防止门用太大的力使密封表面接触，该力可能使处理室震动或摇晃并产生可能污染该过程的不期望的颗粒。

公开(公告)号：US20090302260A1

公开(公告)日：2009-12-10

申请号：US12281500

申请日：2007-03-05

Applicant: Peter Savtchenko

Inventor： Peter Savtchenko

IPC: F16K3/02

CPC classification number: F16K3/0254 ,  F16K3/188 ,  F16K31/1225

Abstract: A valve assembly (10) to regulate the flow of a refrigerant. The valve assembly (10) includes a movable valve member (25) to which there are attached two pistons (29 and 30). A refrigerant under pressure is applied to the pistons (29 and 30) to cause movement of the movable valve member (25) to connect or disconnect pipes (17 and 18) through which the refrigerant is to flow.

Abstract translation: 一种用于调节制冷剂流量的阀组件（10）。 阀组件（10）包括可移动的阀构件（25），其上附接有两个活塞（29和30）。 向活塞（29,30）施加压力下的制冷剂使可动阀部件（25）移动，连接或断开制冷剂流过的管道（17,18）。

公开(公告)号：US20060249208A1

公开(公告)日：2006-11-09

申请号：US11119898

申请日：2005-05-03

Applicant: Albert Patterson

Inventor： Albert Patterson

IPC: F16K3/00

CPC classification number: F16K3/0209 ,  F16K3/14 ,  F16K3/188 ,  F16K47/023 ,  Y10T137/86759 ,  Y10T137/87418

Abstract: A balanced valve for controlling the flow of fluids in conduits, the valve comprising: (a) a casing formed of sidewalls and a casing top and bottom, defining an interior; (b) a fluid inlet in a sidewall of the casing and a fluid outlet in an opposite sidewall of said casing; (c) four similar inner walls positioned in square configuration within the interior and configured to define together with a chamber top and bottom, an enclosed central chamber, each wall having a fluid port of similar size; (d) a fluid channel within the interior of the casing, commencing at the fluid inlet and branching to provide equal flows of fluid to fluid ports in opposite inner walls and a fluid channel extending from the fluid outlet and extending within the interior, branching to provide equal flows of fluid to the fluid ports of a different pair of opposite inner walls; (e) a frame linearly movable within said central chamber between an open and a closed position; and (f) four gates supported in square configuration on said frame, one gate corresponding to each of the fluid ports, the gates constructed and positioned on the frame so that when the frame is in closed position, the gates seal off their corresponding fluid ports to prevent flow of fluid through the fluid channels within the housing, and when it is in open position, the gates are clear of their corresponding fluid ports so as to permit full flow of fluid through the fluid channels.

Abstract translation: 一种用于控制管道中的流体流动的平衡阀，所述阀包括：（a）由侧壁形成的壳体和限定内部的壳体顶部和底部; （b）壳体的侧壁中的流体入口和在所述壳体的相对侧壁中的流体出口; （c）四个类似的内壁，其定位在内部的正方形构型中，并被构造成与室顶部和底部一起限定封闭的中心室，每个壁具有类似尺寸的流体端口; （d）在壳体内部的流体通道，从流体入口开始并且分支以提供相同流体流体到相对的内壁中的流体端口以及从流体出口延伸并在内部延伸的流体通道，分支到 向不同的一对相对的内壁的流体端口提供相等的流体流; （e）在打开位置和关闭位置之间可在所述中央室内线性移动的框架; 和（f）在所述框架上以四方形构造支撑的四个门，一个对应于每个流体端口的门，门构造并定位在框架上，使得当框架处于关闭位置时，门密封其相应的流体端口 以防止流体流过壳体内的流体通道，并且当其处于打开位置时，闸门从其相应的流体端口中清除，以允许流体完全流过流体通道。