公开(公告)号：USD890822S1

公开(公告)日：2020-07-21

申请号：US29676931

申请日：2019-01-16

Applicant: EBARA CORPORATION

Designer： Kenichi Kobayashi ,  Asagi Matsugu ,  Makoto Kashiwagi ,  Manao Hoshina

公开(公告)号：US20200023486A1

公开(公告)日：2020-01-23

申请号：US16513251

申请日：2019-07-16

Applicant: EBARA CORPORATION

Inventor： Masaya Seki ,  Masayuki Nakanishi ,  Makoto Kashiwagi

IPC: B24B21/00 ,  B24B9/06

Abstract: A polishing apparatus capable of forming a step-shaped recess having a right-angled cross section in an edge portion of a substrate, such as a wafer, is disclosed. The polishing apparatus includes: a substrate rotating device configured to rotate the substrate about a rotation axis; a first roller having a first circumferential surface configured to press a polishing tape against the edge portion of the substrate; and a second roller having a second circumferential surface in contact with the first circumferential surface. The second roller has a tape stopper surface that restricts movement of the polishing tape in a direction away from the rotation axis. The tape stopper surface is located radially outward of the first circumferential surface.

公开(公告)号：US10227926B2

公开(公告)日：2019-03-12

申请号：US14312265

申请日：2014-06-23

Applicant: Ebara Corporation

Inventor： Kazumasa Hosotani ,  Makoto Kashiwagi ,  Toyoji Shinohara ,  Kohtaro Kawamura

IPC: F23J15/06 ,  F02C7/08 ,  B01D53/00 ,  F23J15/04 ,  F28D1/02 ,  B01D53/18 ,  B01D53/70 ,  B01D53/78 ,  F23G7/06 ,  F28C3/06 ,  F28D1/053 ,  F28D7/08 ,  F28D7/16

Abstract: An exhaust gas abatement system includes an exhaust gas abatement section configured to abate exhaust gases by utilizing thermal energy and to cool the abated gases by using a liquid, a circulating section configured to circulate the liquid within a circulation path as a circulating liquid, a heat exchange tube configured to cool the circulating liquid and to executes a heat exchange between a cooling liquid which flows in an interior of the heat exchange tube and the circulating liquid which flows outside the heat exchange tube, and a circulating liquid storage portion configured to store the circulating liquid. The heat exchange tube is disposed in a heat exchange tube installation space which is in at least part of an interior of the circulating liquid storage portion.

公开(公告)号：USD799690S1

公开(公告)日：2017-10-10

申请号：US29530928

申请日：2015-06-22

Applicant: EBARA CORPORATION

Designer： Khotaro Kawamura ,  Makoto Kashiwagi ,  Hiroshi Ikeda