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32 条记录 (耗时 0.014 秒)

    Image input apparatus and inspection apparatus
    31.
    发明申请
    Image input apparatus and inspection apparatus 审中-公开
    图像输入装置和检查装置

    公开(公告)号：US20050196059A1

    公开(公告)日：2005-09-08

    申请号：US11064014

    申请日：2005-02-24

    申请人： Hiromu Inoue ,  Tsuneo Terasawa ,  Shinichi Imai ,  Takehiko Nomura

    发明人： Hiromu Inoue ,  Tsuneo Terasawa ,  Shinichi Imai ,  Takehiko Nomura

    IPC分类号： G01B11/24 ,  G01N21/956 ,  G06K9/36 ,  G06T1/00 ,  H01L21/66

    CPC分类号： G03F7/70616 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/95676

    摘要： An image input apparatus for inputting an image of an object and outputting the image as an electric signal, the image input apparatus comprises a stage which supports the object, a laser interferometer which measures a position of the stage, a light source which emits a pulse light, an illumination optical system which irradiates the object with an illuminating light, a sensor which converts an image-formed optical image into an electric image signal, an imaging optical system which forms an image of the object on the sensor, a synchronization control circuit which controls a light-emission interval of the light source and synchronization of the sensor on the basis of position information of the laser interferometer, a light quantity monitor which measures a quantity of light, and a light quantity correction circuit which corrects the electric image signal on the basis of an output of the light quantity monitor.

    摘要翻译： 一种用于输入对象的图像并输出图像作为电信号的图像输入装置，所述图像输入装置包括支撑所述对象的平台，测量所述平台位置的激光干涉仪，发出脉冲的光源 光，将照明光照射到物体上的照明光学系统，将图像形成的光学图像转换为电子图像信号的传感器，在传感器上形成物体的图像的成像光学系统，同步控制电路 其基于激光干涉仪的位置信息，测量光量的光量监视器和校正电图像信号的光量校正电路来控制光源的发光间隔和传感器的同步 基于光量监视器的输出。