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    Optical device
    32.
    发明授权
    Optical device 有权

    公开(公告)号：US11187579B2

    公开(公告)日：2021-11-30

    申请号：US16619630

    申请日：2018-07-06

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Tomofumi Suzuki ,  Kyosuke Kotani ,  Tatsuya Sugimoto

    IPC: G02B26/08 ,  G01J3/14 ,  B81B3/00 ,  G01J3/02 ,  G01J3/10 ,  G01J3/45 ,  G01B9/02 ,  G02B7/182 ,  G02B27/14 ,  G01J3/453

    Abstract: In an optical device, an elastic support unit includes a pair of levers which face in a second direction perpendicular to a first direction, a pair of first torsion support portions which are connected between the levers and the base, a pair of second torsion support portions which are connected between the pair of levers and the movable unit, and a first link member that bridges the levers. The levers and the first link member define a light passage opening. Each of connection positions between the levers and the first torsion support portions is located on a side opposite to the movable unit with respect to the center of the light passage opening in a third direction perpendicular to the first direction and the second direction. A maximum width of the light passage opening in the second direction is defined by a gap between the levers in the second direction.

    Optical device
    37.
    发明授权
    Optical device 有权

    公开(公告)号：US12298132B2

    公开(公告)日：2025-05-13

    申请号：US18121164

    申请日：2023-03-14

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Tomofumi Suzuki ,  Kyosuke Kotani ,  Tatsuya Sugimoto ,  Yutaka Kuramoto ,  Katsumi Shibayama ,  Noburo Hosokawa

    IPC: G01B9/02 ,  B81B3/00 ,  G01J3/02 ,  G01J3/10 ,  G01J3/14 ,  G01J3/45 ,  G01J3/453 ,  G02B7/182 ,  G02B26/08 ,  G02B27/14

    Abstract: In an optical device, a base and a movable unit are constituted by a semiconductor substrate including a first semiconductor layer, an insulating layer, and a second semiconductor layer in this order from one side in a predetermined direction. The base is constituted by the first semiconductor layer, the insulating layer, and the second semiconductor layer. The movable unit includes an arrangement portion that is constituted by the second semiconductor layer. The optical function unit is disposed on a surface of the arrangement portion on the one side. The first semiconductor layer that constitutes the base is thicker than the second semiconductor layer that constitutes the base. A surface of the base on the one side is located more to the one side than the optical function unit.

    Optical device production method
    38.
    发明授权
    Optical device production method 有权

    公开(公告)号：US12189114B2

    公开(公告)日：2025-01-07

    申请号：US18584740

    申请日：2024-02-22

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Tatsuya Sugimoto ,  Tomofumi Suzuki ,  Kyosuke Kotani ,  Yutaka Kuramoto ,  Daiki Suzuki

    IPC: B81B3/00 ,  B81C1/00 ,  G02B7/182 ,  G02B26/08 ,  G02B26/10 ,  H02N1/00

    Abstract: An optical device includes a support portion, a movable portion; and a pair of torsion bars. An optical function portion is provided on one surface of the movable portion and a rib portion is provided on the other surface of the movable portion. The rib portion includes eight extending portions of first to eighth extending portions. When setting directions in which the first to eighth extending portions extend as first to eighth extending directions respectively, and setting an angle between the first and second extending directions as a first angle, an angle between the third and fourth extending directions as a second angle, an angle between the fifth and sixth extending directions as a third angle, and an angle between the seventh and eighth extending directions as a fourth angle, each of the first and second angle is larger than each of the third and fourth angle.

    Optical device and method for manufacturing same
    39.
    发明授权
    Optical device and method for manufacturing same 有权

    公开(公告)号：US12180063B2

    公开(公告)日：2024-12-31

    申请号：US16625701

    申请日：2018-07-06

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Tatsuya Sugimoto ,  Tomofumi Suzuki ,  Kyosuke Kotani

    IPC: B81B3/00 ,  G01B9/02 ,  G02B26/08 ,  H02N1/00

    Abstract: An optical device includes: a base; a movable portion including an optical function portion; an elastic support portion supporting the movable portion so that the movable portion is movable along a first direction; a first comb electrode provided to the base and including a plurality of first comb fingers; and a second comb electrode including a plurality of second comb fingers. The elastic support portion includes a torsion bar extending along a second direction perpendicular to the first direction and a lever. The second comb electrode is provided to a portion of at least one of the movable portion and the elastic support portion, the portion being located on the optical function portion side with respect to the torsion bar. The first comb finger and the second comb finger adjacent to each other face each other in a direction in which the movable portion has higher external force resistance, of the second direction and a third direction perpendicular to the first direction and the second direction.

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