公开(公告)号：US20120235339A1

公开(公告)日：2012-09-20

申请号：US13486960

申请日：2012-06-01

申请人： Jacob Newman ,  Dinesh Kanawade ,  Miriam Schwartz ,  Nir Merry ,  Michael Thomas Haag

发明人： Jacob Newman ,  Dinesh Kanawade ,  Miriam Schwartz ,  Nir Merry ,  Michael Thomas Haag

IPC分类号： B23Q3/00

CPC分类号： H01L21/6719

摘要： Embodiments of the present invention relate to improvements to single-substrate, multi-chamber processing platform architecture for minimizing fabrication facility floor space requirements. Prior art systems require significant floor space around all sides to allow for adequate installation and servicing. Embodiments of the present invention provide platforms that allow for servicing the chambers and supporting systems via a front and rear of the platform allowing multiple, side-by-side platform placement within a fabrication facility, while providing improved serviceability of the platform components.

摘要翻译： 本发明的实施例涉及对用于最小化制造设备占地面积要求的单基底多室处理平台架构的改进。 现有技术的系统需要围绕所有侧面的显着的地板空间以允许适当的安装和维修。 本发明的实施例提供了平台，其允许经由平台的前部和后部维护腔室和支撑系统，从而允许在制造设备内多个并排平台放置，同时提供平台组件的改进的可维护性。

公开(公告)号：US08150242B2

公开(公告)日：2012-04-03

申请号：US12263349

申请日：2008-10-31

申请人： Nir Merry ,  Stephen Moffatt ,  Kailash Patalay ,  David Keith Carlson

发明人： Nir Merry ,  Stephen Moffatt ,  Kailash Patalay ,  David Keith Carlson

IPC分类号： F26B3/30 ,  F26B19/00

CPC分类号： F27B17/0025 ,  C23C16/481 ,  C23C16/52 ,  H01L21/67115 ,  H01L21/67248

摘要： Embodiments of the invention generally contemplate an apparatus and method for monitoring and controlling the temperature of a substrate during processing. One embodiment of the apparatus and method takes advantage of an infrared camera to obtain the temperature profile of multiple regions or the entire surface of the substrate and a system controller to calculate and coordinate in real time an optimized strategy for reducing any possible temperature non-uniformity found on the substrate during processing.

摘要翻译： 本发明的实施例通常考虑用于在处理期间监测和控制衬底的温度的装置和方法。 该装置和方法的一个实施例利用红外相机获得多个区域或基板的整个表面的温度分布，以及系统控制器实时计算和协调用于降低任何可能的温度不均匀性的优化策略 在加工过程中在基板上发现。

公开(公告)号：US08104951B2

公开(公告)日：2012-01-31

申请号：US11830845

申请日：2007-07-30

申请人： Wolfgang Aderhold ,  Andreas G. Hegedus ,  Nir Merry

发明人： Wolfgang Aderhold ,  Andreas G. Hegedus ,  Nir Merry

IPC分类号： G01K3/06 ,  G01N25/00 ,  G01J5/00 ,  H01L21/02

CPC分类号： G01J5/0022 ,  G01J2005/0081

摘要： Methods and apparatus for measuring substrate uniformity is provided. The invention includes placing a substrate in a thermal processing chamber, rotating the substrate while the substrate is heated, measuring a temperature of the substrate at a plurality of radial locations as the substrate rotates, correlating each temperature measurement with a location on the substrate, and generating a temperature contour map for the substrate based on the correlated temperature measurements. Numerous other aspects are provided.

摘要翻译： 提供了测量基板均匀性的方法和装置。 本发明包括将衬底放置在热处理室中，在衬底被加热的同时旋转衬底，在衬底旋转时在多个径向位置测量衬底的温度，使每个温度测量与衬底上的位置相关，以及 基于相关的温度测量产生用于衬底的温度轮廓图。 提供了许多其他方面。

公开(公告)号：US20100261040A1

公开(公告)日：2010-10-14

申请号：US12759597

申请日：2010-04-13

申请人： Majeed A. Foad ,  Nir Merry

发明人： Majeed A. Foad ,  Nir Merry

IPC分类号： G11B5/33 ,  C23C14/04 ,  C23C14/48

CPC分类号： G11B5/865 ,  B82Y10/00 ,  C23C14/042 ,  C23C14/48 ,  C23C14/5826 ,  C23C14/5833 ,  C23C14/5853 ,  G11B5/743 ,  G11B5/746 ,  G11B5/855 ,  H01J2237/316 ,  H01J2237/3165 ,  H01J2237/31711

摘要： Methods and apparatus for forming substrates having magnetically patterned surfaces is provided. A magnetic layer comprising one or more materials having magnetic properties is formed on the substrate. The magnetic layer is subjected to a patterning process in which selected portions of the surface of the magnetic layer are altered such that the altered portions have different magnetic properties from the non-altered portions without changing the topography of the substrate. A protective layer and a lubricant layer are deposited over the patterned magnetic layer. The patterning is accomplished through a number of alternative processes that expose substrates to energy of varying forms.

摘要翻译： 提供了用于形成具有磁性图案化表面的基底的方法和设备。 在基板上形成包含一种或多种具有磁性的材料的磁性层。 对磁性层进行图案化处理，其中磁性层的表面的选定部分被改变，使得改变的部分与未改变的部分具有不同的磁性，而不改变衬底的形貌。 在图案化的磁性层上沉积保护层和润滑剂层。 图案化是通过将衬底暴露于不同形式的能量的许多替代工艺完成的。

公开(公告)号：US07748542B2

公开(公告)日：2010-07-06

申请号：US11216969

申请日：2005-08-31

申请人： Joseph Yudovsky ,  Robert C. Cook ,  Nir Merry

发明人： Joseph Yudovsky ,  Robert C. Cook ,  Nir Merry

IPC分类号： A47G19/08

CPC分类号： H01L21/67309 ,  H01L21/67757

摘要： Aspects of the invention include methods and apparatus for processing a batch of substrates. In one embodiment, a compressed substrate boat is configured to reduce pumping volume in a batch processing chamber. The compressed substrate boat comprises a stationary substrate boat and a movable substrate boat, each may be loaded/unloaded independently. The movable substrate boat and the stationary substrate boat may be interleaving with one another such that the distance between the substrates is reduced. In another embodiment, a substrate boat having removable substrate holder is configured to provide susceptors without dramatically increasing pumping volume. The removable substrate holder may be loaded/unloaded away from the substrate boat with susceptors. The removable substrate holder is engaged with the substrate boat such that substrates thereon are interleaving with the susceptors. Embodiments of the present invention reduces pumping volume and increases throughput, hence reduces cost of ownership during batch processing.

摘要翻译： 本发明的方面包括用于处理一批基底的方法和装置。 在一个实施例中，压缩衬底舟被配置成减少间歇处理室中的泵送体积。 压缩的基板舟皿包括固定的基板船和可移动的基板船，每个可以独立地加载/卸载。 可移动衬底舟皿和固定衬底舟皿可以彼此交错，使得衬底之间的距离减小。 在另一个实施例中，具有可移除衬底保持器的衬底舟皿构造成提供感受器而不会显着增加泵送容积。 可移除的基板保持器可以与基座一起装载/卸载离开基板舟皿。 可拆卸衬底保持器与衬底舟皿接合，使得其上的衬底与感受器交错。 本发明的实施例减少了泵送量并增加了生产量，因此在批量处理期间降低了所有权成本。

公开(公告)号：US20100111511A1

公开(公告)日：2010-05-06

申请号：US12263349

申请日：2008-10-31

申请人： Nir Merry ,  Stephen Moffatt ,  Kailash Patalay ,  David Keith Carlson

发明人： Nir Merry ,  Stephen Moffatt ,  Kailash Patalay ,  David Keith Carlson

IPC分类号： F26B3/30 ,  F27D11/00

CPC分类号： F27B17/0025 ,  C23C16/481 ,  C23C16/52 ,  H01L21/67115 ,  H01L21/67248

摘要： Embodiments of the invention generally contemplate an apparatus and method for monitoring and controlling the temperature of a substrate during processing. One embodiment of the apparatus and method takes advantage of an infrared camera to obtain the temperature profile of multiple regions or the entire surface of the substrate and a system controller to calculate and coordinate in real time an optimized strategy for reducing any possible temperature non-uniformity found on the substrate during processing.

摘要翻译： 本发明的实施例通常考虑用于在处理期间监测和控制衬底的温度的装置和方法。 该装置和方法的一个实施例利用红外相机获得多个区域或基板的整个表面的温度分布，以及系统控制器实时计算和协调用于降低任何可能的温度不均匀性的优化策略 在加工过程中在基板上发现。

公开(公告)号：US20100080904A1

公开(公告)日：2010-04-01

申请号：US12240120

申请日：2008-09-29

申请人： Nir Merry ,  Son T. Nguyen

发明人： Nir Merry ,  Son T. Nguyen

IPC分类号： C23C16/455

CPC分类号： C23C16/45544 ,  C23C16/45502 ,  C23C16/45563

摘要： Methods and apparatus for processing substrates are disclosed herein. The process chamber includes a chamber body, a substrate support pedestal, a pump port and a gas injection funnel. The chamber body has an inner volume and the substrate support pedestal is disposed in the inner volume of the chamber body. The pump port is coupled to the inner volume and is disposed off-center from a central axis of the substrate support pedestal. The pump port provides azimuthally non-uniform pumping proximate to a surface of the substrate support pedestal and creates localized regions of high pressure and low pressure within the inner volume during use. The gas injection funnel is disposed in a ceiling of the chamber body and opposite the substrate support pedestal. The gas injection funnel is offset from the central axis of the substrate support pedestal and is disposed in a region of low pressure.

摘要翻译： 本文公开了处理衬底的方法和设备。 处理室包括室主体，基板支撑基座，泵口和气体注入漏斗。 腔体具有内部体积，并且衬底支撑基座设置在腔体的内部体积中。 泵口连接到内部体积并且设置在离基板支撑基座的中心轴线偏心的位置。 泵端口提供靠近基板支撑基座的表面的方位不均匀的泵送，并且在使用期间在内部体积内产生高压和低压的局部区域。 气体注入漏斗设置在室主体的顶部并与衬底支撑基座相对。 气体注入漏斗偏离衬底支撑基座的中心轴线并且设置在低压区域中。

公开(公告)号：US20070059128A1

公开(公告)日：2007-03-15

申请号：US11216969

申请日：2005-08-31

申请人： Joseph Yudovsky ,  Robert Cook ,  Nir Merry

发明人： Joseph Yudovsky ,  Robert Cook ,  Nir Merry

IPC分类号： H01L21/677

CPC分类号： H01L21/67309 ,  H01L21/67757

摘要： Aspects of the invention include methods and apparatus for processing a batch of substrates. In one embodiment, a compressed substrate boat is configured to reduce pumping volume in a batch processing chamber. The compressed substrate boat comprises a stationary substrate boat and a movable substrate boat, each may be loaded/unloaded independently. The movable substrate boat and the stationary substrate boat may be interleaving with one another such that the distance between the substrates is reduced. In another embodiment, a substrate boat having removable substrate holder is configured to provide susceptors without dramatically increasing pumping volume. The removable substrate holder may be loaded/unloaded away from the substrate boat with susceptors. The removable substrate holder is engaged with the substrate boat such that substrates thereon are interleaving with the susceptors. Embodiments of the present invention reduces pumping volume and increases throughput, hence reduces cost of ownership during batch processing.

摘要翻译： 本发明的方面包括用于处理一批基底的方法和装置。 在一个实施例中，压缩衬底舟被配置成减少间歇处理室中的泵送体积。 压缩的基板舟皿包括固定的基板船和可移动的基板船，每个可以独立地加载/卸载。 可移动衬底舟皿和固定衬底舟皿可以彼此交错，使得衬底之间的距离减小。 在另一个实施例中，具有可移除衬底保持器的衬底舟皿构造成提供感受器而不会显着增加泵送容积。 可移除的基板保持器可以与基座一起装载/卸载离开基板舟皿。 可拆卸衬底保持器与衬底舟皿接合，使得其上的衬底与感受器交错。 本发明的实施例减少了泵送量并增加了生产量，因此在批量处理期间降低了所有权成本。

公开(公告)号：US5648722A

公开(公告)日：1997-07-15

申请号：US508599

申请日：1995-07-28

申请人： Nir Merry ,  Jack Francis Hammons

发明人： Nir Merry ,  Jack Francis Hammons

IPC分类号： G01R31/327 ,  G01R31/02

CPC分类号： G01R31/3275

摘要： An apparatus and method for determining the state of a switch for use in an HVAC system. The apparatus and method are advantageously configured for use within a heating, ventilation and air conditioning (HVAC) system, in which the sensing of the state of safety switches external to a controller is desirable. A current sensor coupled in series between a current source, a safety switch, and a current load, detects the flow of current from the current source and through the switch and load. A status signal, indicative of the flow of current through the current sensor, is generated for sampling by a microprocessor. The presence or absence of current flow through the current sensor provides an indication as to whether the remotely-located switch is in an open or closed state.

摘要翻译： 一种用于确定在HVAC系统中使用的开关的状态的装置和方法。 该装置和方法有利地被配置为在加热，通风和空调（HVAC）系统内使用，其中期望感测控制器外部的安全开关状态。 在电流源，安全开关和电流负载之间串联耦合的电流传感器检测来自电流源和通过开关和负载的电流。 产生指示通过电流传感器的电流的状态信号，用于由微处理器进行采样。 通过电流传感器的电流的存在或不存在提供关于远程位置的开关是处于打开还是关闭状态的指示。

公开(公告)号：US5590642A

公开(公告)日：1997-01-07

申请号：US378516

申请日：1995-01-26

申请人： Robert A. Borgeson ,  Robert M. Russ ,  Larry A. Lincoln ,  Thomas L. Webster ,  Nir Merry ,  William W. Bassett

发明人： Robert A. Borgeson ,  Robert M. Russ ,  Larry A. Lincoln ,  Thomas L. Webster ,  Nir Merry ,  William W. Bassett

IPC分类号： F24H9/20 ,  F24H3/00

CPC分类号： F24H9/2085

摘要： A control system for a fluid-fuel burner, such as a furnace for an HVAC system. The furnace has a variable flow of fuel into the burner. In addition, the circulating air blower is also variable. The furnace heat exchanger plenum is maintained at a substantially constant temperature, as a means for providing substantially constant temperature air to the spaces to be heated.

摘要翻译： 用于流体 - 燃料燃烧器的控制系统，例如HVAC系统的炉。 炉具有可变的燃料流入燃烧器。 此外，循环风机也是可变的。 炉热交换器增压室保持在基本恒定的温度，作为向被加热空间提供基本上恒定温度的空气的装置。