公开(公告)号：US20100126364A1

公开(公告)日：2010-05-27

申请号：US12696320

申请日：2010-01-29

申请人： Kyo-yeol LEE ,  Tae-kyung Lee ,  Jae-woo Chung ,  Hwa-sun Lee ,  Seung-mo Lim

发明人： Kyo-yeol LEE ,  Tae-kyung Lee ,  Jae-woo Chung ,  Hwa-sun Lee ,  Seung-mo Lim

IPC分类号： B41M1/12

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1646 ,  B41J2002/14491 ,  H05K3/107 ,  H05K3/1216 ,  Y10T29/42

摘要： A method to form a thick layer by screen printing and a method to form a piezoelectric actuator of an inkjet head. The method to form the thick layer including forming a guide groove in a surface to a predetermined depth, and forming the thick layer by applying a material to the surface inside the guide groove through screen printing. The method to form the piezoelectric actuator including forming an insulating layer on a top surface of a vibration plate and forming a guide groove in the top surface of the vibration plate or an insulating layer to a predetermined depth at a position corresponding to each of a plurality of pressure chambers, forming a lower electrode on the top surface of the insulating layer; forming a piezoelectric layer inside the guide groove by screen printing, and forming an upper electrode on a top surface of the piezoelectric layer.

公开(公告)号：US07699442B2

公开(公告)日：2010-04-20

申请号：US11491929

申请日：2006-07-25

申请人： Seung-mo Lim ,  Tae-kyung Lee ,  Chang-youl Moon ,  Jae-woo Chung ,  Hwa-sun Lee

发明人： Seung-mo Lim ,  Tae-kyung Lee ,  Chang-youl Moon ,  Jae-woo Chung ,  Hwa-sun Lee

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2/055

摘要： A piezoelectric inkjet printhead includes a manifold, a chamber array including a plurality of chambers in connection with the manifold and arranged along at least one side of the manifold, a vibrating plate to cover the plurality of chambers, and a plurality of piezoelectric actuators formed on the vibrating plate to change pressures of corresponding ones of the plurality of chambers by vibrating the vibrating plate. The plurality of chambers includes a plurality of pressure chambers disposed in a center portion of the chamber array and having corresponding ink ejecting nozzles, and at least two dummy chambers, one disposed on each side of the chamber array and having corresponding dummy nozzles that do not eject ink. A plurality of trenches may be formed in the vibrating plate between each of the piezoelectric actuators.

摘要翻译： 压电喷墨打印头包括歧管，腔室阵列，其包括与歧管连接的多个腔室，并且沿着歧管的至少一侧布置，覆盖多个腔室的振动板，以及形成在 所述振动板通过振动所述振动板来改变所述多个室中相应的室的压力。 多个室包括设置在室阵列的中心部分并具有对应的喷墨喷嘴的多个压力室，以及至少两个虚设室，一个设置在室阵列的每一侧上，并且具有不对应的虚拟喷嘴 弹出墨水。 可以在每个压电致动器之间的振动板中形成多个沟槽。

公开(公告)号：US07681989B2

公开(公告)日：2010-03-23

申请号：US11064826

申请日：2005-02-25

申请人： Hwa-sun Lee ,  Jae-woo Chung ,  Seung-mo Lim ,  Sung-gyu Kang

发明人： Hwa-sun Lee ,  Jae-woo Chung ,  Seung-mo Lim ,  Sung-gyu Kang

IPC分类号： B41J2/16 ,  H01L41/24 ,  B41J2/45

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2002/14491 ,  Y10T29/42

摘要： In a piezoelectric actuator for an ink-jet printhead, and a method of forming the same, formed on a flow path plate having a pressurizing chamber, the piezoelectric actuator for applying a driving force for ink ejection to the pressurizing chamber, the piezoelectric actuator includes a lower electrode formed on the flow path plate, a bonding pad formed on the flow path plate to be insulated from the lower electrode, wherein a driving circuit for voltage application is bonded to an upper surface of the bonding pad, a piezoelectric layer formed on the lower electrode at a position corresponding to the pressurizing chamber, wherein an end of the piezoelectric layer extends onto the bonding pad, and an upper electrode formed on the piezoelectric layer, wherein an end of the upper electrode extends beyond the end of the piezoelectric layer and contacts the upper surface of the bonding pad.

摘要翻译： 在具有加压室的流路板上形成的用于喷墨打印头的压电致动器及其形成方法中，压电致动器用于向加压室施加用于喷墨的驱动力，压电致动器包括 形成在所述流路板上的下电极，形成在所述流路板上以与所述下电极绝缘的接合焊盘，其中施加电压的驱动电路接合到所述接合焊盘的上表面，形成在所述接合焊盘的上表面上的压电层 所述下部电极在与所述加压室对应的位置处，其中所述压电层的端部延伸到所述接合焊盘上，以及形成在所述压电层上的上部电极，其中所述上部电极的端部延伸超出所述压电层的端部 并接触焊盘的上表面。

公开(公告)号：US07571975B2

公开(公告)日：2009-08-11

申请号：US11302400

申请日：2005-12-14

申请人： Hwa-sun Lee ,  Jae-woo Chung ,  Seung-mo Lim

发明人： Hwa-sun Lee ,  Jae-woo Chung ,  Seung-mo Lim

IPC分类号： B41J29/393

CPC分类号： B41J2/16579 ,  B41J2/0451 ,  B41J2/04581 ,  B41J2002/14354

摘要： A defect detection device of a printer head, and a method of detecting defects, including first to Nth actuators providing a driving force for ejecting ink to ink chambers; a vibration signal generator generating vibration signals for vibrating the first to Nth actuators; a first switch receiving the generated vibration signals and outputting the vibration signals to a Kth actuator among the first to Nth actuators; a second switch receiving vibration signals of one or more among the first to Nth actuators and outputting an Lth vibration signal that corresponds to a vibration signal of the Lth actuator adjacent to the Kth actuator among the received vibration signals; and a defect detector comparing the Lth vibration signal output from the second switch with the specific vibration signal of the Lth actuator when there is no defect in a printer head and detecting defects in the printer head.

摘要翻译： 打印机头的缺陷检测装置以及检测缺陷的方法，包括第一至第N致动器，其提供用于将墨喷射到墨室的驱动力; 振动信号发生器，产生振动第一至第N致动器的振动信号; 接收所生成的振动信号的第一开关，并将振动信号输出到第一至第N致动器中的第K个致动器; 接收第一至第N致动器中的一个或多个的振动信号的第二开关，并输出与所接收的振动信号中与第K个致动器相邻的第L致动器的振动信号相对应的第L振动信号; 以及当打印机头中没有缺陷并且检测打印头中的缺陷时，比较从第二开关输出的Lth振动信号与第L个致动器的特定振动信号的缺陷检测器。

公开(公告)号：US20070176980A1

公开(公告)日：2007-08-02

申请号：US11491929

申请日：2006-07-25

申请人： Seung-mo Lim ,  Tae-kyung Lee ,  Chang-youl Moon ,  Jae-woo Chung ,  Hwa-sun Lee

发明人： Seung-mo Lim ,  Tae-kyung Lee ,  Chang-youl Moon ,  Jae-woo Chung ,  Hwa-sun Lee

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2/055

摘要： A piezoelectric inkjet printhead includes a manifold, a chamber array including a plurality of chambers in connection with the manifold and arranged along at least one side of the manifold, a vibrating plate to cover the plurality of chambers, and a plurality of piezoelectric actuators formed on the vibrating plate to change pressures of corresponding ones of the plurality of chambers by vibrating the vibrating plate. The plurality of chambers includes a plurality of pressure chambers disposed in a center portion of the chamber array and having corresponding ink ejecting nozzles, and at least two dummy chambers, one disposed on each side of the chamber array and having corresponding dummy nozzles that do not eject ink. A plurality of trenches may be formed in the vibrating plate between each of the piezoelectric actuators.

摘要翻译： 压电喷墨打印头包括歧管，腔室阵列，其包括与歧管连接的多个腔室，并且沿着歧管的至少一侧布置，覆盖多个腔室的振动板，以及形成在 所述振动板通过振动所述振动板来改变所述多个室中相应的室的压力。 多个室包括设置在室阵列的中心部分并具有对应的喷墨喷嘴的多个压力室，以及至少两个虚设室，一个设置在室阵列的每一侧上，并且具有不对应的虚拟喷嘴 弹出墨水。 可以在每个压电致动器之间的振动板中形成多个沟槽。

公开(公告)号：US20060125870A1

公开(公告)日：2006-06-15

申请号：US11302400

申请日：2005-12-14

申请人： Hwa-sun Lee ,  Jae-woo Chung ,  Seung-mo Lim

发明人： Hwa-sun Lee ,  Jae-woo Chung ,  Seung-mo Lim

IPC分类号： B41J29/393

CPC分类号： B41J2/16579 ,  B41J2/0451 ,  B41J2/04581 ,  B41J2002/14354

摘要： A defect detection device of a printer head, and a method of detecting defects, including first to Nth actuators providing a driving force for ejecting ink to ink chambers; a vibration signal generator generating vibration signals for vibrating the first to Nth actuators; a first switch receiving the generated vibration signals and outputting the vibration signals to a Kth actuator among the first to Nth actuators; a second switch receiving vibration signals of one or more among the first to Nth actuators and outputting an Lth vibration signal that corresponds to a vibration signal of the Lth actuator adjacent to the Kth actuator among the received vibration signals; and a defect detector comparing the Lth vibration signal output from the second switch with the specific vibration signal of the Lth actuator when there is no defect in a printer head and detecting defects in the printer head.

公开(公告)号：US20070155056A1

公开(公告)日：2007-07-05

申请号：US11505420

申请日：2006-08-17

申请人： Sung-gyu Kang ,  Seung-mo Lim ,  Jae-chang Lee ,  Woon-bae Kim

发明人： Sung-gyu Kang ,  Seung-mo Lim ,  Jae-chang Lee ,  Woon-bae Kim

IPC分类号： H01L21/00

CPC分类号： H01L21/187 ,  H01L21/2007

摘要： A silicon direct bonding (SDB) method by which void formation caused by gases is suppressed. The SDB method includes: preparing two silicon substrates having corresponding bonding surfaces; forming trenches having a predetermined depth in at least one bonding surface of the two silicon substrates; forming gas discharge outlets connected to the trenches on at least one of the two silicon substrates to vertically penetrate the bonding surface; cleaning the two silicon substrates; closely contacting the two silicon substrates to each other; and thermally treating the two substrates to bond them to each other. The trenches are formed along at least a part of a plurality of dicing lines, and both ends of the trenches are clogged. Gases generated during a thermal treatment process can be smoothly and easily discharged through the trenches and the gas discharge outlet such that a void is prevented from being formed in the junctions of the two silicon substrates due to the gases.

摘要翻译： 抑制由气体引起的空隙形成的硅直接接合（SDB）方法。 SDB方法包括：制备具有相应粘合表面的两个硅衬底; 在所述两个硅衬底的至少一个接合表面中形成具有预定深度的沟槽; 形成连接到所述两个硅衬底中的至少一个上的沟槽的气体放电出口，以垂直地穿透所述接合表面; 清洁两个硅衬底; 使两个硅衬底彼此紧密接触; 并对两个基板进行热处理以将它们彼此粘合。 沟槽沿着多个切割线的至少一部分形成，并且沟槽的两端被堵塞。 在热处理过程中产生的气体可以通过沟槽和气体排出口平滑且容易地排出，从而防止由于气体而在两个硅衬底的接合处形成空隙。

公开(公告)号：US07442622B2

公开(公告)日：2008-10-28

申请号：US11505420

申请日：2006-08-17

申请人： Sung-gyu Kang ,  Seung-mo Lim ,  Jae-chang Lee ,  Woon-bae Kim

发明人： Sung-gyu Kang ,  Seung-mo Lim ,  Jae-chang Lee ,  Woon-bae Kim

IPC分类号： H01L21/30

CPC分类号： H01L21/187 ,  H01L21/2007

摘要： A silicon direct bonding (SDB) method by which void formation caused by gases is suppressed. The SDB method includes: preparing two silicon substrates having corresponding bonding surfaces; forming trenches having a predetermined depth in at least one bonding surface of the two silicon substrates; forming gas discharge outlets connected to the trenches on at least one of the two silicon substrates to vertically penetrate the bonding surface; cleaning the two silicon substrates; closely contacting the two silicon substrates to each other; and thermally treating the two substrates to bond them to each other. The trenches are formed along at least a part of a plurality of dicing lines, and both ends of the trenches are clogged. Gases generated during a thermal treatment process can be smoothly and easily discharged through the trenches and the gas discharge outlet such that a void is prevented from being formed in the junctions of the two silicon substrates due to the gases.

摘要翻译： 抑制由气体引起的空隙形成的硅直接接合（SDB）方法。 SDB方法包括：制备具有相应粘合表面的两个硅衬底; 在所述两个硅衬底的至少一个接合表面中形成具有预定深度的沟槽; 形成连接到所述两个硅衬底中的至少一个上的沟槽的气体放电出口，以垂直地穿透所述接合表面; 清洁两个硅衬底; 使两个硅衬底彼此紧密接触; 并对两个基板进行热处理以将它们彼此粘合。 沟槽沿着多个切割线的至少一部分形成，并且沟槽的两端被堵塞。 在热处理过程中产生的气体可以通过沟槽和气体排出口平滑且容易地排出，从而防止由于气体而在两个硅衬底的接合处形成空隙。

公开(公告)号：US20060181581A1

公开(公告)日：2006-08-17

申请号：US11356063

申请日：2006-02-17

申请人： Chang-hoon Jung ,  Seung-mo Lim ,  Su-ho Shin

发明人： Chang-hoon Jung ,  Seung-mo Lim ,  Su-ho Shin

IPC分类号： B41J2/045

CPC分类号： B41J2/1629 ,  B41J2/055 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1646 ,  B41J2002/14419

摘要： A piezoelectric inkjet printhead, and a method of manufacturing the same, includes an ink inlet for allowing inflow of ink, a plurality of pressure chambers to contain ink to be ejected, the plurality of pressure chambers being in communication with the ink inlet, a manifold formed in communication with the ink inlet, a plurality of restrictors connecting the manifold to respective first ends of the pressure chambers, a plurality of dampers at positions corresponding to respective second ends of the pressure chambers, the second ends being opposite the first ends, a plurality of nozzles in communication with the plurality of dampers for ejecting the ink, a plurality of actuators for applying a driving force to each of the pressure chambers for ejecting the ink, a damping membrane under the manifold for dampening a pressure change inside the manifold and a cavity under the damping membrane.

公开(公告)号：US07537319B2

公开(公告)日：2009-05-26

申请号：US11356063

申请日：2006-02-17

申请人： Chang-hoon Jung ,  Seung-mo Lim ,  Su-ho Shin

发明人： Chang-hoon Jung ,  Seung-mo Lim ,  Su-ho Shin

IPC分类号： B41J2/045 ,  B41J2/17

CPC分类号： B41J2/1629 ,  B41J2/055 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1646 ,  B41J2002/14419

摘要： A piezoelectric inkjet printhead, and a method of manufacturing the same, includes an ink inlet for allowing inflow of ink, a plurality of pressure chambers to contain ink to be ejected, the plurality of pressure chambers being in communication with the ink inlet, a manifold formed in communication with the ink inlet, a plurality of restrictors connecting the manifold to respective first ends of the pressure chambers, a plurality of dampers at positions corresponding to respective second ends of the pressure chambers, the second ends being opposite the first ends, a plurality of nozzles in communication with the plurality of dampers for ejecting the ink, a plurality of actuators for applying a driving force to each of the pressure chambers for ejecting the ink, a damping membrane under the manifold for dampening a pressure change inside the manifold and a cavity under the damping membrane.

摘要翻译： 压电喷墨打印头及其制造方法包括：墨水入口，用于允许墨水流入，多个压力室容纳要喷射的墨水;多个压力室与墨水入口连通;歧管 形成为与所述墨入口连通，多个限制器将所述歧管连接到所述压力室的相应的第一端;多个阻尼器，位于对应于所述压力室的相应第二端的位置处，所述第二端与所述第一端相对， 与用于喷射油墨的多个阻尼器连通的多个喷嘴，用于向每个用于喷射油墨的压力室施加驱动力的多个致动器，用于抑制歧管内的压力变化的歧管下方的阻尼膜， 阻尼膜下面的一个空腔。