公开(公告)号：US20050244745A1

公开(公告)日：2005-11-03

申请号：US11026181

申请日：2004-12-30

申请人： James Cameron ,  Sheri Ablaza ,  Yusuhiro Suzuki

发明人： James Cameron ,  Sheri Ablaza ,  Yusuhiro Suzuki

IPC分类号： G03F7/004 ,  G03C1/492 ,  G03F7/038 ,  G03F7/039 ,  G03F7/075 ,  H01L21/027

CPC分类号： G03F7/0045 ,  G03F7/0382 ,  G03F7/0392 ,  G03F7/0757

摘要： Photoresist compositions are provided with a silicon-containing component and an added sulfonic acid component. Preferred resists of the invention also contain a non-hydroxylic solvent such as propylene glycol methyl ether acetate as the primary or sole solvent. Preferred resist compositions of the invention can exhibit enhanced stability during storage between manufacture and use.

摘要翻译： 光刻胶组合物具有含硅组分和加入的磺酸组分。 本发明的优选抗蚀剂还含有非羟基溶剂如丙二醇甲基醚乙酸酯作为主要或唯一溶剂。 本发明优选的抗蚀剂组合物可以在制造和使用之间的储存期间表现出增强的稳定性。

公开(公告)号：US6003981A

公开(公告)日：1999-12-21

申请号：US866862

申请日：1997-05-30

申请人： James Cameron ,  Robert L Battey ,  Ngoc-Diep T Nguyen ,  Gary L. Miller ,  Kenneth R. Williams ,  John Sturman

发明人： James Cameron ,  Robert L Battey ,  Ngoc-Diep T Nguyen ,  Gary L. Miller ,  Kenneth R. Williams ,  John Sturman

IPC分类号： B41J2/175

CPC分类号： B41J2/1752 ,  B41J19/005 ,  B41J2/175 ,  B41J2/17509

摘要： A module for a printing composition delivery system of a printing device that is a separable unit from the printing composition delivery system is disclosed. An embodiment of the module includes a printing composition supply station connector, a printing member connector, and a flexible conduit. The printing composition supply station connector is releasably attached to a printing composition supply station of the printing composition delivery system and has a coupler fluidly connectable to a printing composition supply of the printing composition supply station. The printing member connector is releasably attached to the printing device and has a coupler fluidly connectable to the printing member. The flexible conduit includes a first end fluidly connected to the coupler of the printing composition supply station connector and a second end fluidly connected to the coupler of the printing member connector to supply printing composition from the printing composition supply to the printing member. The module may additionally include a housing covering a portion of the coupler of the printing member connector and enclosing a portion of the flexible conduit adjacent the printing member connector. The printing composition supply station connector, the printing member connector, the flexible conduit, and the housing, if present, are a separable unit from the printing composition delivery system. A method of installing and removing the module is also disclosed.

摘要翻译： 公开了一种用于与作为打印组合物传送系统的可分离单元的打印装置的打印组合物传送系统的模块。 模块的一个实施例包括印刷组合物供应站连接器，印刷部件连接器和柔性导管。 印刷组合物供应站连接器可释放地附接到印刷组合物输送系统的印刷组合物供应站，并具有可流体连接到印刷组合物供应站的印刷组合物供应的耦合器。 打印构件连接器可释放地附接到打印装置，并且具有可与打印构件流体连接的耦合器。 柔性导管包括流体连接到印刷组合物供应站连接器的耦合器的第一端和流体连接到印刷构件连接器的耦合器的第二端，以将印刷组合物从印刷组合物供应提供给印刷构件。 模块还可以包括覆盖印刷构件连接器的耦合器的一部分并且围绕邻近印刷构件连接器的柔性导管的一部分的壳体。 印刷组合物供应站连接器，印刷构件连接器，柔性导管和壳体（如果存在）是与印刷组合物输送系统相分离的单元。 还公开了一种安装和拆卸模块的方法。