公开(公告)号：US5810930A

公开(公告)日：1998-09-22

申请号：US613617

申请日：1996-03-11

申请人： Young Chang Eom ,  In Ho Hwang ,  Koeng Su Lim ,  Chang Hyun Lee

发明人： Young Chang Eom ,  In Ho Hwang ,  Koeng Su Lim ,  Chang Hyun Lee

IPC分类号： C30B35/00 ,  C23C16/48 ,  C30B25/00 ,  H01L21/205 ,  H01L21/31 ,  C23C16/00

CPC分类号： C23C16/48

摘要： A photo-chemical vapor deposition ("photo-CVD") apparatus has exchange apparatus of optical window and method of exchanging optical window therewith. There photo-CVD apparatus has exchange apparatus of optical window which can replace an optical window blurred by attachment of materials produced by dissociation of reaction gas or materials used for disposition in a reaction chamber of a photo-CVD apparatus during photo-CVD reaction with a clean optical window without exposing the inside of the reaction chamber to the air and to the method of exchanging optical window of the photo-CVD apparatus using the exchange apparatus of optical window.

摘要翻译： 光化学气相沉积（“photo-CVD”）装置具有光学窗口的交换装置和与其交换光学窗口的方法。 光刻CVD装置具有光学窗口的交换装置，该光学窗口可以通过将光反应室中的反应气体或用于配置的材料通过解离而产生的材料与光CVD反应中的光CVD 清洁光学窗口，而不会将反应室内部暴露在空气中，以及使用光学窗口的交换装置更换光CVD装置的光学窗口的方法。