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公开(公告)号：US5036192A
公开(公告)日：1991-07-30
申请号：US608629
申请日：1990-11-06
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： This invention discloses a linear/rotary encoder for detecting the state of movement of a grating. The encoder of this invention comprises a system for directing a coherent beam of light onto a predetermined position or positions of a diffraction grating formed on an object to be measured, a converging optical system having a reflection plane at a position on which light is converged, for again making incident on the respective different positions diffracted lights which exit from the position, an interference optical system for forming interference fringes by superposing beam diffracted from the diffraction grating at the predetermined position or positions, and light receiving elements for photoelectrically converting the interference fringes obtained through the interference optical system.
摘要翻译： 本发明公开了一种用于检测光栅移动状态的线性/旋转编码器。 本发明的编码器包括用于将相干光束引导到形成在待测物体上的衍射光栅的预定位置或位置的系统，在光收敛的位置具有反射平面的会聚光学系统， 用于再次使从各个不同位置入射的衍射光从位置离开，用于通过将从衍射光栅衍射的光束叠加在预定位置或位置处形成干涉条纹的干涉光学系统和用于光电转换干涉条纹的光接收元件 通过干涉光学系统获得。
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公开(公告)号：US5017777A
公开(公告)日：1991-05-21
申请号：US437672
申请日：1989-11-17
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： A method for detecting a state of rotation of a rotary scale having a diffraction grating therein in which a radiation beam is directed to a first place on the diffraction grating to generate first and second diffracted beams. The first and second diffracted beams are re-diffracted at the first place to form a first re-diffracted beam and a second re-diffracted beam. The first and second re-diffracted beams are directed to a second place on the diffraction grating substantially opposite the first place with respect to the center of rotation of the rotary scale. The first and second re-diffracted beams are diffracted at the second place to interfere with each other so that an interference beam is formed. The interference beam is converted into a signal to detect the state of rotation of the rotary scale.
摘要翻译： 一种用于检测其中具有衍射光栅的旋转刻度的旋转状态的方法，其中辐射束被引导到衍射光栅上的第一位以产生第一和第二衍射光束。 第一和第二衍射光束在第一位置被再衍射以形成第一重衍射光束和第二重衍射光束。 第一和第二重衍射光束相对于旋转刻度盘的旋转中心基本上相对于第一位置被引导到衍射光栅上的第二位置。 第一和第二重衍射光束在第二位置被衍射以彼此干涉，从而形成干涉光束。 干涉光束被转换为信号以检测旋转刻度盘的旋转状态。
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公开(公告)号：US4998798A
公开(公告)日：1991-03-12
申请号：US346886
申请日：1989-05-03
CPC分类号： G01D5/38
摘要： An encoder having a long length measuring stroke with a simple construction is provided. The encoder comprises a scale formed with a periodic lattice pattern, first and second reading heads arranged along a moving direction of the scale for reading the scale, and an adder for adding output signals from the first and second reading heads. The encoder further has adjusting mechanism for adjusting such that the phase difference between the output signals from the first and second reading head becomes zero. A continuous periodic signal can be always accurately obtained independently of the position of the scale.
摘要翻译： 提供具有简单结构的具有长长度测量行程的编码器。 编码器包括形成有周期性格子图案的刻度，沿着刻度尺的移动方向布置的用于读取刻度的第一和第二读取头以及用于相加来自第一和第二读取头的输出信号的加法器。 编码器还具有用于调节的调整机构，使得来自第一和第二读取头的输出信号之间的相位差成为零。 可以始终准确地获得连续的周期信号，而不依赖于刻度尺的位置。
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34.发明授权Encoder for forming interference fringes by re-diffracted lights from an optical type scale and photoelectrically converting the interference fringes to thereby detect the displacement of the scale 失效用于通过来自光学类型刻度的重衍射光形成干涉条纹的编码器，并对干涉条纹进行光电转换，从而检测刻度尺的位移
公开(公告)号：US4930895A
公开(公告)日：1990-06-05
申请号：US204727
申请日：1988-06-10
CPC分类号： G01D5/38
摘要： An optical type encoder for projecting a light beam onto an optical type scale having a diffraction grating formed thereon, forming interference fringes by the use of the diffracted light from the scale, and photoelectrically converting such interference fringes to thereby detect the displacement of the scale. The first and second light beams are caused to obliquely enter substantially the same position on the scale from different first and second directions, first and second diffracted light beams emerging perpendicularly from the scale by the light beams being diffracted by the scale are received by a common reflecting element, the first and second diffracted light beams are directed to said position by the reflecting element, and interference fringes formed by diffracted light beams emerging from the scale in the first and second directions by the first and second diffracted light beams being diffracted by the scale are photoelectrically converted.
摘要翻译： 一种用于将光束投射到其上形成有衍射光栅的光学刻度上的光学型编码器，通过使用来自刻度的衍射光形成干涉条纹，并且光电转换这种干涉条纹，从而检测刻度尺的位移。 使第一和第二光束从不同的第一和第二方向倾斜地进入标尺上的相同位置，由被标尺衍射的光束垂直于标尺放出的第一和第二衍射光束被共同的 第一和第二衍射光束被反射元件引导到所述位置，并且由第一和第二衍射光束在第一和第二方向上从刻度尺出射的衍射光束形成的干涉条纹被 光电转换。
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35.发明授权Rotary encoder measuring substantially coinciding phases of interference light components 失效旋转编码器测量干涉光分量的基本相同的相位
公开(公告)号：US5661296A
公开(公告)日：1997-08-26
申请号：US724220
申请日：1996-10-02
申请人： Koh Ishizuka , Yasushi Kaneda
发明人： Koh Ishizuka , Yasushi Kaneda
摘要： A rotary encoder has a disk with fine gratings comprising diffraction gratings of small diameters and a high density. Two diffraction lights of predetermined orders which are obtained when a light beam is irradiated to the fine gratings, are interfered properly with each other, thereby enabling rotational information of a rotary object to be detected at a high resolution while realizing a small and thin size of the overall apparatus.
摘要翻译： 旋转编码器具有具有细小光栅的盘，其包括小直径和高密度的衍射光栅。 当将光束照射到细光栅时获得的预定次数的两个衍射光彼此适当地干涉，从而能够以高分辨率检测旋转体的旋转信息，同时实现小而薄的 整体装置。
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36.发明授权Apparatus for measuring relative displacement between the apparatus and a scale which a grating is formed 失效用于测量装置与形成光栅的刻度之间的相对位移的装置
公开(公告)号：US5621527A
公开(公告)日：1997-04-15
申请号：US311854
申请日：1994-09-26
申请人： Yasushi Kaneda , Koh Ishizuka
发明人： Yasushi Kaneda , Koh Ishizuka
CPC分类号： G01D5/38
摘要： An apparatus for measuring the relative displacement information between it and a scale on which a diffraction grating is formed has a light source, a separating device for separating a light beam from the light source into a plurality of light beams, a wave combining device for wave-combining the diffracted lights of the plurality of light beams separated by the separating device which are diffracted by the diffraction grating, a light receiver for receiving the interfering lights by the plurality of light beams wave-combined by the wave combining device, the relative displacement information between the apparatus and the scale being measured by the light reception of the light receiver, and an optical device adapted to collimate the plurality of light beams or to form a spherical wave having so large a radius of curvature that it can be regarded as a plane wave of the plurality of light beams in the direction of light beam separation of the separating device and to condense the plurality of light beams in the optical path from the separating device to the wave combining device in a direction perpendicular to the direction of light beam separation.
摘要翻译： 用于测量其与其上形成有衍射光栅的标尺之间的相对位移信息的装置具有光源，用于将光束从光源分离成多个光束的分离装置，用于波的波合成装置 - 将由分离装置分离的由衍射光栅衍射的多个光束的衍射光组合在一起，用于通过由波合成装置波形组合的多个光束接收干扰光的光接收器，相对位移 通过光接收器的光接收来测量装置和刻度之间的信息，以及适于准直多个光束或形成具有如此大的曲率半径的球面波的光学装置，其可被认为是 在分离装置的光束分离的方向上的多个光束的平面波，并且冷凝平面 在从分离装置到波合成装置的光路中的光束在垂直于光束分离方向的方向上的光束。
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公开(公告)号：US5569913A
公开(公告)日：1996-10-29
申请号：US429236
申请日：1995-04-25
申请人： Koh Ishizuka , Yasushi Kaneda
发明人： Koh Ishizuka , Yasushi Kaneda
CPC分类号： G01D5/38
摘要： An apparatus for detecting a displacement of a diffraction grating set on a measured object, comprises a light-emitting device, a separation optical element for separating a beam from the light-emitting device into a plurality of beams, a multiplexing optical element for multiplexing light beams diffracted by the diffraction grating from two beams out of the plurality of beams, a first detecting unit for detecting interference light generated when the beams of diffracted light are multiplexed by the multiplexing optical element and outputting a signal related to relative displacement information to the diffraction grating, and a second detecting unit for outputting a signal related to different information from the relative displacement information to the diffraction grating, based on a change in a diffracted light quantity of diffracted light by the diffraction grating from another beam out of the plurality of beams and/or another diffracted light by the diffraction grating from the two beams.
摘要翻译： 一种用于检测设在被测物体上的衍射光栅的位移的装置，包括发光装置，用于将光束从发光装置分离为多个光束的分离光学元件，用于复用光的复用光学元件 由衍射光栅衍射的光束从多个光束中的两个光束衍射的光束;第一检测单元，用于检测当衍射光束被多路复用光学元件复用时产生的干涉光，并将与相对位移信息相关的信号输出到衍射 光栅和第二检测单元，用于基于衍射光栅从多个光束中的另一个光束衍射的光的衍射光量的变化，将与不同信息相关的信号从相对位移信息输出到衍射光栅 和/或来自t的衍射光栅的另一衍射光 wo梁。
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38.发明授权Rotation detecting apparatus and scale having a multi helix diffraction grating for the same 失效具有用于其的多螺旋衍射光栅的旋转检测装置和标尺
公开(公告)号：US5537210A
公开(公告)日：1996-07-16
申请号：US258443
申请日：1994-06-09
申请人： Yasushi Kaneda , Koh Ishizuka , Satoshi Ishii , Kenji Hisamoto
发明人： Yasushi Kaneda , Koh Ishizuka , Satoshi Ishii , Kenji Hisamoto
CPC分类号： G01D5/38
摘要： A rotation detecting apparatus includes a grating portion provided on one of two objects for which relative rotation is to be detected, a light-emitting portion provided on the other of the two objects, and a light-receiving portion provided on the other object. The grating portion has at least one multi-helix diffraction grating. The light-receiving portion receives a beam emitted from the light-emitting portion and then traveling by way of the multi-helix diffraction grating. Information of relative rotation of the two objects is detected through light reception of the light-receiving portion.
摘要翻译： 旋转检测装置包括设置在要检测相对旋转的两个物体中的一个上的光栅部分，设置在两个物体中的另一个上的发光部分和设置在另一个物体上的光接收部分。 光栅部分具有至少一个多螺旋衍射光栅。 光接收部分接收从发光部分发射的光束，然后通过多螺旋衍射光栅行进。 通过光接收部分的光接收来检测两个物体的相对旋转的信息。
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公开(公告)号：US5557396A
公开(公告)日：1996-09-17
申请号：US203409
申请日：1994-03-01
申请人： Koh Ishizuka , Satoshi Ishii , Yasushi Kaneda
发明人： Koh Ishizuka , Satoshi Ishii , Yasushi Kaneda
CPC分类号： G01P3/366
摘要： A velocity information detecting apparatus detects velocity information of a moving object. The apparatus is provided with a light source for emitting a coherent beam, a beam splitting member for splitting the beam from the light source into a plurality of beams to irradiate the object thereby, and a photodetector for receiving scattered light from the object. The velocity information of the object is detected, based on a Doppler shift of the scattered light detected by the photodetector. The plurality of beams irradiate the object disposed in a region before the plurality of beams are spatially separated from each other. The beam splitting member may be either a diffraction grating or a prism member. The diffraction grating may be a lamellar phase grating or a blazed diffraction grating. The prism member may be a roof prism.
摘要翻译： 速度信息检测装置检测移动物体的速度信息。 该装置设置有用于发射相干光束的光源，用于将来自光源的光束分成多个光束以照射物体的分束部件，以及用于接收来自物体的散射光的光电检测器。 基于由光检测器检测到的散射光的多普勒频移来检测物体的速度信息。 多个光束照射放置在多个光束彼此空间分离之前的区域中的物体。 分束构件可以是衍射光栅或棱镜构件。 衍射光栅可以是层状相位光栅或闪耀的衍射光栅。 棱镜构件可以是屋脊棱镜。
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40.发明授权
公开(公告)号：US5302821A
公开(公告)日：1994-04-12
申请号：US903522
申请日：1992-06-24
申请人： Masahiko Igaki , Koh Ishizuka , Masaru Nyui
发明人： Masahiko Igaki , Koh Ishizuka , Masaru Nyui
CPC分类号： G01D5/344
摘要： An encoder includes a light illuminating device, an optical scale and a photosensor, and detects information of relative displacement between the scale and the illuminating light. A birefringent element, such as a Savart plate or the like, is disposed in the optical path between the light illuminating device and the photosensor to generate a plurality of images of the scale having different phases. A plurality of output signals having a phase difference are obtained using the images of the scale.
摘要翻译： 编码器包括光照明装置，光学秤和光传感器，并且检测标尺和照明光之间的相对位移的信息。 诸如Savart板等的双折射元件设置在光照射装置和光传感器之间的光路中，以产生具有不同相位的刻度的多个图像。 使用标尺的图像获得具有相位差的多个输出信号。
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