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    Measuring head
    33.
    发明授权
    Measuring head 有权

    公开(公告)号：US10551184B2

    公开(公告)日：2020-02-04

    申请号：US15933840

    申请日：2018-03-23

    Applicant: MITUTOYO CORPORATION

    Inventor： Sadayuki Matsumiya ,  Tomoyuki Miyazaki ,  Shuichi Kamiyama ,  Hideyuki Arai

    IPC: G01B21/06 ,  G01B5/008 ,  G01B13/03 ,  G01B21/04 ,  G05D16/00 ,  G01B9/02

    Abstract: A measuring head includes a first slide mechanism for a first measurement axis provided to be detachable to external moving devices; a second slide mechanism for a second measurement axis held to be movable by the first slide mechanism; a third slide mechanism for a third measurement axis held to be movable by the second slide mechanism; a probe held to be movable by the third slide mechanism; pneumatic cylinders for connecting slider parts and guide parts included in each slide mechanism; and automatic pressure regulators for respectively changing air pressures supplied to each pneumatic cylinder in accordance with measurement postures of the measuring head.

    Method and device for controlling rotary table
    37.
    发明授权
    Method and device for controlling rotary table 有权

    公开(公告)号：US10190996B2

    公开(公告)日：2019-01-29

    申请号：US15093134

    申请日：2016-04-07

    Applicant: MITUTOYO CORPORATION

    Inventor： Sadayuki Matsumiya ,  Hidemitsu Asano ,  Masato Kon

    IPC: B65G47/244 ,  G01N23/046

    Abstract: An XY shift mechanism can shift a rotary table in a two-dimensional direction (XY direction) orthogonal to a rotation axis of the rotary table. By collaborative control of the shift position of the rotary table in the two-dimensional direction in synchronization with the rotation of the rotary table, rotation is made possible about a virtual rotation center that is set at an arbitrary position on the rotary table. The collaborative control of the shift position of the rotary table in the two-dimensional direction also corrects rotation eccentricity owing to the eccentricity of the rotary table. Thus, the virtual rotation center can be set at an arbitrary position on the rotary table, thus enabling obtainment of high resolution tomographic images of a plurality of regions of interest of an object, without the need for repositioning of the object.

    Probe head rotating mechanism
    38.
    发明授权
    Probe head rotating mechanism 有权

    公开(公告)号：US10113851B2

    公开(公告)日：2018-10-30

    申请号：US15241627

    申请日：2016-08-19

    Applicant: MITUTOYO CORPORATION

    Inventor： Yoshikazu Ooyama ,  Hayato Kusama ,  Sadayuki Matsumiya ,  Hitoshi Ohta

    IPC: G01B5/012 ,  G01B5/00 ,  G01B7/00

    Abstract: A probe head rotation mechanism, situated between a spindle and a probe of a coordinate measurement device, includes: a main body frame supported by the spindle; a rotor supported by the main body frame so as to be capable of tilting with respect to an axial center of the spindle; the main body frame; and a motor supported by the main body frame and driving the rotor. A motor main body is arranged away from lying on the axial center of the spindle, and an axial center of the motor is oriented outward in a diameter direction of the spindle.

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