公开(公告)号：US10113931B2

公开(公告)日：2018-10-30

申请号：US15092065

申请日：2016-04-06

Applicant: MITUTOYO CORPORATION

Inventor： Hideyuki Arai ,  Kazuhiko Hidaka ,  Minoru Tanaka ,  Tomoyuki Miyazaki ,  Takeshi Yamamoto

IPC: G01B7/008 ,  G01L25/00

Abstract: A stylus support portion moveable in an X direction is arranged separate from a fixed portion. A plate spring has a first end fixated to an end portion of the stylus support portion in an X (+) direction, a second end fixated to the fixed portion, and a principal surface facing the X direction. A plate spring has a first end fixated to an end portion of the stylus support portion in an X (−) direction, a second end fixated to the fixed portion, and a principal surface facing the X direction. A first permanent magnet is provided on the end portion of the stylus support portion in the X (+) direction. A second permanent magnet is provided on the end portion of the stylus support portion in the X (−) direction. A third permanent magnet is provided to the fixed portion so that a magnetic force in the X direction acts on an area between the first permanent magnet and the third permanent magnet. A fourth permanent magnet is provided to the fixed portion so that the magnetic force in the X direction acts on an area between the second permanent magnet and the fourth permanent magnet.

公开(公告)号：US11530914B2

公开(公告)日：2022-12-20

申请号：US17386199

申请日：2021-07-27

Applicant: MITUTOYO CORPORATION

Inventor： Lukasz Redlarski ,  Hideyuki Arai

IPC: G01B11/25 ,  G01B11/06 ,  G02B13/00

Abstract: A shape measuring apparatus applies, to a light beam, a periodic pattern having periodicity in a direction perpendicular to an optical axis and displaceable in the direction perpendicular to the optical axis, relatively displaces a focal point of an objective lens in a direction parallel to the optical axis, and calculates, based on amplitude of intensity of the light beam detected by a photodetector, face shape data on the object to be measured. Then, a top surface measuring step of acquiring face shape data on a top surface of the object to be measured, and a bottom surface measuring step of acquiring face shape data on a bottom surface of the object to be measured by transmitting through the top surface of the object to be measured and aligning the focal point of the objective lens on the bottom surface of the object to be measured are performed.

公开(公告)号：US10551184B2

公开(公告)日：2020-02-04

申请号：US15933840

申请日：2018-03-23

Applicant: MITUTOYO CORPORATION

Inventor： Sadayuki Matsumiya ,  Tomoyuki Miyazaki ,  Shuichi Kamiyama ,  Hideyuki Arai

IPC: G01B21/06 ,  G01B5/008 ,  G01B13/03 ,  G01B21/04 ,  G05D16/00 ,  G01B9/02

Abstract: A measuring head includes a first slide mechanism for a first measurement axis provided to be detachable to external moving devices; a second slide mechanism for a second measurement axis held to be movable by the first slide mechanism; a third slide mechanism for a third measurement axis held to be movable by the second slide mechanism; a probe held to be movable by the third slide mechanism; pneumatic cylinders for connecting slider parts and guide parts included in each slide mechanism; and automatic pressure regulators for respectively changing air pressures supplied to each pneumatic cylinder in accordance with measurement postures of the measuring head.

公开(公告)号：US10415947B2

公开(公告)日：2019-09-17

申请号：US15647446

申请日：2017-07-12

Applicant: MITUTOYO CORPORATION

Inventor： Hideyuki Arai ,  Kazuya Iwasaki ,  Minoru Tanaka ,  Shuichi Kamiyama ,  Kazuhiko Hidaka

IPC: G01B5/016 ,  G01B5/00 ,  G01B5/02 ,  G01B5/12 ,  G01B5/14

Abstract: A probe includes a movable plate to which a stylus capable of contacting a measurable object is mounted, the movable plate displaceable in an X direction; a static plate arranged to overlap with the movable plate; a counter plate facing the movable plate and the static plate; an elastic movable side connection plate, the movable side connection plate connecting the counter plate at at least three places with each of a first end connector positioned toward a first end of the movable plate in the X direction and second end connectors positioned toward a second end in the X direction; and a static side connection plate which connects the static plate and the counter plate. An entire length of the first end connector in a Y direction orthogonal to the X direction is the same size as the entire length of the second end connectors in the Y direction.