Silicon Nanoparticle Precursor
    33.
    发明申请
    Silicon Nanoparticle Precursor 审中-公开
    硅纳米粒子前体

    公开(公告)号:US20100047476A1

    公开(公告)日:2010-02-25

    申请号:US12195673

    申请日:2008-08-21

    IPC分类号: B05D5/12 H01B1/04

    CPC分类号: C01B33/021

    摘要: A Si nanoparticle precursor, precursor fabrication process, and precursor deposition process are presented. The method for forming a silicon (Si) nanoparticle precursor provides a plurality of nanoparticle classes, including at least one Si nanoparticle class. The nanoparticles in each nanoparticle class are defined as having a predetermined diameter. A predetermined amount of each nanoparticle class is measured and combined. For example, a first Si nanoparticle class may be provided having a largest diameter and a second Si nanoparticle class having a second-largest diameter equal to about (0.43)×(the largest diameter). As another example, Si nanoparticle classes may foe provided having a diameter ratio of about 77:32:17.

    摘要翻译: 提出了Si纳米颗粒前体,前体制备工艺和前体沉积工艺。 形成硅(Si)纳米颗粒前体的方法提供多个纳米颗粒类别,包括至少一种Si纳米颗粒类。 每个纳米颗粒级中的纳米颗粒被定义为具有预定直径。 测量并组合每个纳米粒子类的预定量。 例如,可以提供具有最大直径的第一Si纳米颗粒类别和具有等于约(0.43)×(最大直径)的第二大直径的第二Si纳米颗粒类。 作为另一个实例,可以提供具有约77:32:17的直径比的Si纳米颗粒类。