公开(公告)号：US20080073574A1

公开(公告)日：2008-03-27

申请号：US11682494

申请日：2007-03-06

申请人： Takashi Kamikubo

发明人： Takashi Kamikubo

IPC分类号： A61N5/00

CPC分类号： H01J37/3026 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3174

摘要： A charged particle beam writing method includes inputting design pattern data, virtually dividing a writing area to be written with the design pattern data into a plurality of small areas in a mesh-like manner, calculating a pattern density in each of the plurality of small areas based on the design pattern data, calculating a resizing amount for each pattern density in a case of irradiating a charged particle beam at an isofocal dose, resizing a dimension of the design pattern data in each of the plurality of small areas, based on the resizing amount in each of the plurality of small areas, and writing a resized design pattern on a target workpiece with the isofocal dose corresponding to the pattern density which was calculated before the resizing in each of the plurality of small areas.

摘要翻译： 带电粒子束写入方法包括输入设计图案数据，将以设计图案数据写入的写入区域虚拟地分成多个小区域，以网格状方式计算多个小区域中的图案密度 基于设计图案数据，在以异焦点剂量照射带电粒子束的情况下，计算每个图案密度的调整量，基于调整尺寸来调整多个小区域中的每一个中的设计图案数据的尺寸 在多个小区域的每一个区域中的量，并且将具有对应于在多个小区域中的每个小区域中调整大小之前计算的图案密度的等效剂量的目标工件上的调整尺寸的设计图案写入。

公开(公告)号：US07077899B2

公开(公告)日：2006-07-18

申请号：US10756350

申请日：2004-01-14

申请人： Takashi Kamikubo ,  Daisuke Tanabe ,  Tetsuya Sai

发明人： Takashi Kamikubo ,  Daisuke Tanabe ,  Tetsuya Sai

IPC分类号： C09D11/02 ,  C09D11/10 ,  C08K5/3492

CPC分类号： C09D11/326 ,  C09D11/03

摘要： A pigment dispersing agent of the formula (1) capable of providing a printing ink or a coating composition excellent in fluidity and dispersion stability and a dry coating excellent in gloss, a pigment composition containing the same and a pigment dispersion containing the same, wherein X1 is —NH—, —O—, —CONH—, —SO2NH—, —CH2NH—, —CH2NHCOCH2NH— or —X3—Y—X4—, X2 and X4 are —NH— or —O—, X3 is —CONH—, —SO2NH—, —CH2NH—, —NHCO— or —NHSO2—, Y is an alkylene group, an alkenylene group or an arylene group, Z is —SO3M or —COOM, R1 is a heterocyclic ring residue or an aromatic ring residue, Q is —O—R2, —NH—R2, a halogen group, —X1—R1 or —X2—Y-Z, R2 is a hydrogen atom, an alkyl group or an alkenyl group, and M is one equivalent of a monovalent to trivalent cation.

摘要翻译： 一种能够提供流动性和分散稳定性优异的印刷油墨或涂料组合物的光泽性优异的颜料分散剂，含有它们的颜料组合物和含有它们的颜料分散体，其中X N 1是-NH-， - O - ， - CONH - ， - SO 2 NH-，-CH 2 NH-， - CH- 2→2 NHCOCH 2 NH-或-X 3 -YX 4 - ，X 2 - 和X 4是-NH-或-O-，X 3是-CONH - ， - SO 2 NH-， - CH＆lt; SUB > 2个NH-，-NHCO-或-NHSO 2 - ，Y是亚烷基，亚烯基或亚芳基，Z是-SO 3 卤素基团，-X 1 -R 1或-X 2 -YZ，R 2是 氢原子，烷基或烯基，M为一价至三价阳离子的1当量。

公开(公告)号：US06346354B1

公开(公告)日：2002-02-12

申请号：US09533265

申请日：2000-03-20

申请人： Takayuki Abe ,  Hirohito Anze ,  Susumu Oogi ,  Mitsuko Shimizu ,  Hideo Inoue ,  Takashi Saito ,  Toru Tojo ,  Takashi Kamikubo ,  Yoshiaki Hattori ,  Tomohiro Iijima ,  Noriaki Nakayamada

发明人： Takayuki Abe ,  Hirohito Anze ,  Susumu Oogi ,  Mitsuko Shimizu ,  Hideo Inoue ,  Takashi Saito ,  Toru Tojo ,  Takashi Kamikubo ,  Yoshiaki Hattori ,  Tomohiro Iijima ,  Noriaki Nakayamada

IPC分类号： G03F900

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/3174 ,  H01J2237/31764 ,  H01J2237/31796 ,  Y10S430/143

摘要： A pattern writing method acquires the area of a pattern segment located in each of a plurality of small regions obtained by dividing a region on which a pattern is to be written, small region by small region, and writes a pattern based on an optimum dose calculated based on this area. This method employs a scheme of shifting pattern segments and averaging the accumulated area, so that even when the pitch of repetitive patterns slightly differs from the side length of each small region in the pitch direction, a peculiar error does not occur, thereby ensuring highly-precise proximity effect correction and contributing to improving the precision of writing an LSI pattern.

摘要翻译： 图案写入方法获取位于通过将要写入图案的区域划分为小区域而获得的多个小区域中的每一个中的图案区域的区域，并且基于计算出的最佳剂量来写入图案 基于这一领域。 该方法采用移动图案段并平均累积面积的方案，使得即使当重复图案的间距与俯仰方向上的每个小区域的侧边长度稍微不同时，也不会发生特殊的错误， 精确的邻近效应校正，有助于提高写入LSI图案的精度。