公开(公告)号：US08238011B1

公开(公告)日：2012-08-07

申请号：US13224525

申请日：2011-09-02

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: G02B26/08

CPC classification number: G02B26/0841 ,  Y10S359/90

Abstract: A micro-electro-mechanical system (MEMS) mirror device has a mirror, a frame rotatively coupled to the mirror, and a biaxial actuator rotatively coupled to the frame where the actuator is able to rotate about the rotational axes of the mirror and the frame with the mirror.

Abstract translation: 微机电系统（MEMS）反射镜装置具有反射镜，可旋转地耦合到反射镜的框架和可旋转地联接到框架的双轴致动器，致动器能够围绕反射镜和框架的旋转轴线旋转 与镜子。

公开(公告)号：US08035874B1

公开(公告)日：2011-10-11

申请号：US12392607

申请日：2009-02-25

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: G02B26/08

CPC classification number: G02B26/0841 ,  Y10S359/90

Abstract: A micro-electro-mechanical system (MEMS) mirror device has a mirror, a frame rotatively coupled to the mirror, and a uniaxial actuator rotatively coupled to the frame where the rotational axis of the actuator is offset from the rotational axes of the mirror and the frame. Another MEMS mirror device has a mirror, a frame rotatively coupled to the mirror, and a biaxial actuator rotatively coupled to the frame where the actuator is able to rotate about the rotational axes of the mirror and the frame with the mirror.

Abstract translation: 微机电系统（MEMS）反射镜装置具有反射镜，可旋转地耦合到反射镜的框架和旋转地联接到框架的单轴致动器，其中致动器的旋转轴线偏离反射镜的旋转轴线， 框架。 另一MEMS反射镜装置具有反射镜，可旋转地耦合到反射镜的框架以及可旋转地联接到框架的双轴致动器，致动器能够绕镜子和框架的旋转轴线与镜子一起旋转。

公开(公告)号：US07796315B1

公开(公告)日：2010-09-14

申请号：US12262562

申请日：2008-10-31

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: G02B26/08

CPC classification number: G02B26/0841

Abstract: A process for constructing a micro-electro-mechanical system (MEMS) device includes etching the topside of a silicon wafer to form a first support layer having asymmetric pads. The backside of the silicon wafer is etched to form a top layer with a mirror, beam structures extending from the mirror, and rotating comb teeth extending from the beam structures. Before or after the backside of the silicon wafer is etched, the topside of the silicon wafer is bonded to a glass wafer that forms a second support layer. Prior to bonding the silicon wafer to the glass wafer, the glass wafer may be etched to form a recess and/or a cavity that accommodates mobile elements in the silicon wafer. Due to the asymmetry of the pads in the first support layer below the rotating comb teeth in the top layer, oscillation can be initiated.

Abstract translation: 构造微电子机械系统（MEMS）装置的方法包括蚀刻硅晶片的顶面以形成具有不对称垫的第一支撑层。 蚀刻硅晶片的背面以形成具有反射镜的顶层，从反射镜延伸的束结构以及从梁结构延伸的旋转梳齿。 在蚀刻硅晶片的背面之前或之后，硅晶片的顶侧结合到形成第二支撑层的玻璃晶片上。 在将硅晶片接合到玻璃晶片之前，玻璃晶片可以被蚀刻以形成容纳硅晶片中的移动元件的凹部和/或空腔。 由于顶层中的旋转梳齿下方的第一支撑层中的焊盘的不对称性，可以启动振荡。

公开(公告)号：US07737514B1

公开(公告)日：2010-06-15

申请号：US12034667

申请日：2008-02-21

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: H01L29/84

CPC classification number: G01L9/0073

Abstract: A micro-electro-mechanical system (MEMS) pressure sensor includes a silicon spacer defining an opening, a silicon membrane layer mounted above the spacer, and a silicon sensor layer mounted above the silicon membrane layer. The silicon membrane layer forms a diaphragm opposite of the spacer opening, and a stationary perimeter around the diaphragm and opposite the spacer. The silicon sensor layer includes a movable electrode and a stationary electrode separated by a substantially constant gap and respectively located above the diaphragm and the stationary perimeter of the silicon membrane layer. The movable electrode and the diaphragm move in response to a pressure applied to the diaphragm where an overlap area between sidewall surfaces of the movable and the stationary electrodes create a capacitance proportion to the pressure.

Abstract translation: 微电子机械系统（MEMS）压力传感器包括限定开口的硅间隔物，安装在间隔物上方的硅膜层和安装在硅膜层上方的硅传感器层。 硅膜层形成与间隔开口相对的隔膜，以及围绕隔膜并与间隔件相对的固定周界。 硅传感器层包括可移动电极和由​​基本上恒定的间隙隔开并分别位于隔膜和硅膜层的固定周边之上的固定电极。 可移动电极和隔膜响应于施加到隔膜的压力而移动，其中可移动和固定电极的侧壁表面之间的重叠区域产生与压力的电容比例。

公开(公告)号：US07538928B1

公开(公告)日：2009-05-26

申请号：US11695595

申请日：2007-04-02

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: G02B26/08 ,  G02B26/00

CPC classification number: G02B26/0841

Abstract: A micro-electro-mechanical system (MEMS) mirror device includes (1) a mirror, (2) spring elements coupled to the mirror, (3) a beam coupled to the group of spring elements, (4) a spring coupled to the beam, and (5) a stationary pad coupled to the spring. The spring elements includes (1) a straight section having a first end coupled to the beam structure, and (2) spring sections having (a) first ends coupled to a second end of the straight section and (b) second ends coupled to the mirror.

Abstract translation: 微电子机械系统（MEMS）镜装置包括（1）反射镜，（2）耦合到反射镜的弹簧元件，（3）耦合到该组弹簧元件的梁，（4） 梁和（5）固定垫，其联接到弹簧。 弹簧元件包括（1）具有联接到梁结构的第一端的直线部分，以及（2）弹簧部分，其具有连接到直线部分的第二端的（a）第一端和（b） 镜子。

公开(公告)号：US07538927B1

公开(公告)日：2009-05-26

申请号：US11549505

申请日：2006-10-13

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: G02B26/08 ,  C23F1/00

CPC classification number: G02B26/0841

Abstract: A process for constructing a micro-electro-mechanical system (MEMS) device includes etching the topside of a wafer to form a first support layer having short stationary comb teeth extending from one or more support pads. The backside of the wafer is etched to form a top layer with a mirror, beam structures extending from the mirror, long rotating comb teeth extending from the beam structures, and long stationary comb teeth extending from stationary pads. The long rotating comb teeth are interdigitated in-plane with the long stationary comb teeth, and the long rotating comb teeth are interdigitated out-of-plane at their tips with the short stationary comb teeth. Asymmetry in the overlap between the long rotating comb teeth and the short stationary comb teeth allows the rotational direction of the mirror to be determined from capacitance measurements. Furthermore, the short stationary comb teeth can be used to initiate oscillation of the mirror.

Abstract translation: 构造微机电系统（MEMS）装置的方法包括蚀刻晶片的顶面以形成具有从一个或多个支撑垫延伸的短的固定梳齿的第一支撑层。 蚀刻晶片的背面以形成具有反射镜的顶层，从镜子延伸的束结构，从梁结构延伸的长旋转梳齿以及从固定垫延伸的长固定梳齿。 长的旋转梳齿与长的固定梳齿在平面内相互交错，并且长的旋转梳齿在它们的尖端处与短的固定梳齿交错在平面外。 在长旋转梳齿与短静止梳齿之间的重叠中的不对称允许通过电容测量来确定反射镜的旋转方向。 此外，短的固定梳齿可用于启动反射镜的振荡。

公开(公告)号：US20060144948A1

公开(公告)日：2006-07-06

申请号：US11298932

申请日：2005-12-08

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: G06K7/10 ,  G02B26/08

CPC classification number: G02B26/0841

Abstract: A MEMS scanning mirror device includes a scanning mirror, rotational comb teeth, stationary comb teeth, distributed serpentine springs, and anchors. The scanning mirror and the rotational comb teeth are driven by electrostatic force from stationary in-plane and/or out-of-plane teeth. The mirror is attached to the rotational comb structure by multiple support attachments. Multiple serpentine springs serve as the flexible hinges that link the movable structure to the stationary support structure.

公开(公告)号：US20060061850A1

公开(公告)日：2006-03-23

申请号：US11273772

申请日：2005-11-14

Applicant: Yee-Chung Fu ,  Ting-Tung Kuo

Inventor： Yee-Chung Fu ,  Ting-Tung Kuo

IPC: G02B26/08

CPC classification number: G02B26/0841

Abstract: In one embodiment of the invention, a MEMS structure includes a first electrode, a second electrode, and a mobile element. The first electrode is coupled to a first voltage source. The second electrode is coupled to a second voltage source. The mobile element includes a third electrode coupled to a third voltage source. A steady voltage difference between the first electrode and the third electrode is used to tune the natural frequency of the structure to a scanning frequency of an application. An oscillating voltage difference between the second electrode and the third electrode at the scanning frequency of the application is used to oscillate the mobile element. In one embodiment, the mobile unit is a mirror.

Abstract translation: 在本发明的一个实施例中，MEMS结构包括第一电极，第二电极和移动元件。 第一电极耦合到第一电压源。 第二电极耦合到第二电压源。 移动元件包括耦合到第三电压源的第三电极。 使用第一电极和第三电极之间的稳定的电压差来将结构的固有频率调谐到应用的扫描频率。 使用在应用的扫描频率下的第二电极和第三电极之间的振荡电压差来振荡移动元件。 在一个实施例中，移动单元是镜子。

公开(公告)号：US07014115B2

公开(公告)日：2006-03-21

申请号：US10683962

申请日：2003-10-10

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: G06K7/10

CPC classification number: G06K7/10653 ,  G02B26/0841

Abstract: A MEMS scanning mirror device includes a scanning mirror, rotational comb teeth, stationary comb teeth, distributed serpentine springs, and anchors. The scanning mirror and the rotational comb teeth are driven by electrostatic force from stationary in-plane and/or out-of-plane teeth. The mirror is attached to the rotational comb structure by multiple support attachments. Multiple serpentine springs serve as the flexible hinges that link the movable structure to the stationary support structure.

Abstract translation: MEMS扫描镜装置包括扫描镜，旋转梳齿，固定梳齿，分布蛇形弹簧和锚。 扫描镜和旋转梳齿由固定的平面内和/或平面外的齿的静电力驱动。 镜子通过多个支撑附件附接到旋转梳结构。 多个蛇形弹簧用作将可移动结构连接到固定支撑结构的柔性铰链。

公开(公告)号：US20060023293A1

公开(公告)日：2006-02-02

申请号：US10910384

申请日：2004-08-02

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: G02B26/00

CPC classification number: G02B26/0841

Abstract: A micro-electro-mechanical system (MEMS) mirror device includes a mirror coupled to a rotating frame by a first torsional hinge along a rotational axis. The rotating frame has a body that defines a frame opening, and a group of rotational teeth extending from the body. A first bonding pad is located in the frame opening and coupled to the rotating frame by a second torsional hinge along the rotational axis. A second bonding pad is coupled to the rotating frame by a third torsional hinge along the rotational axis.

Abstract translation: 微机电系统（MEMS）镜装置包括通过第一扭转铰链沿着旋转轴线耦合到旋转框架的反射镜。 旋转框架具有限定框架开口的主体和从主体延伸的一组旋转齿。 第一接合垫位于框架开口中，并通过沿着旋转轴线的第二扭转铰链与旋转框架连接。 第二接合焊盘通过沿着旋转轴线的第三扭转铰链联接到旋转框架。