Substrate holding apparatus for vertically holding a substrate in an
exposure apparatus
    32.
    发明授权
    Substrate holding apparatus for vertically holding a substrate in an exposure apparatus 失效
    用于在曝光装置中垂直保持基板的基板保持装置

    公开(公告)号:US5253012A

    公开(公告)日:1993-10-12

    申请号:US769974

    申请日:1991-10-02

    IPC分类号: G03F7/20 H01L21/687 G03B27/42

    CPC分类号: G03F7/70741 G03F7/707

    摘要: A substrate holding apparatus for vertically holding a substrate to be exposed by radiation includes a substrate holding member for attracting a substrate by a magnetic force or vacuum and an engaging device for engaging the substrate on the substrate holding member. The engaging device is retractably supported by or fixed to the substrate holding member, and is engageable with or engages the substrate in such a manner that the engagement between the vertically held substrate and the engaging device is maintained even if the substrate holding member ceases to attract the substrate. Thus, dropping of the substrate by gravitation is prevented even if the substrate ceases to be attracted by the substrate holding member.

    摘要翻译: 用于垂直保持要通过辐射曝光的基板的基板保持装置包括用于通过磁力或真空吸引基板的基板保持部件和用于将基板接合在基板保持部件上的卡合装置。 接合装置由基板保持构件伸缩地支撑或固定到基板保持构件,并且可以以这样的方式接合或接合基板,使得即使基板保持构件不再吸引,也保持垂直保持的基板和接合装置之间的接合 底物。 因此,即使基板停止被基板保持部件吸引,也能够防止重力下降基板。