公开(公告)号：US06441394B2

公开(公告)日：2002-08-27

申请号：US09746767

申请日：2000-12-26

申请人： Yuji Kasai ,  Shigeki Sakai

发明人： Yuji Kasai ,  Shigeki Sakai

IPC分类号： H01L310256

CPC分类号： H01L39/225 ,  Y10S505/779 ,  Y10S505/782

摘要： Using an oxide superconductor that does not require cryogenic temperatures, a superconducting tunnel junction device is provided which can accurately control the magnitudes of critical current and step voltage necessary for electronics applications and which has good characteristics as designed. The intrinsic Josephson superconducting tunnel junction device includes an oxide superconductor defined by a general expression (I): Bi2−zPbzSr2Can(1−x)RnxCun+1O2n+6 (n≧1, 0

摘要翻译： 使用不需要低温温度的氧化物超导体，提供超导隧道结装置，其可以精确地控制电子应用所需的临界电流和阶跃电压的大小，并且具有如设计的良好特性。 固有的约瑟夫森超导隧道结器件包括由通式（I）定义的氧化物超导体：Bi2-zPbzSr2Can（1-x）RnxCun + 1O2n + 6（n≥1,0

公开(公告)号：US4957196A

公开(公告)日：1990-09-18

申请号：US285935

申请日：1988-12-19

申请人： Kenji Shiojima ,  Yuji Kasai

发明人： Kenji Shiojima ,  Yuji Kasai

IPC分类号： G07F17/12

CPC分类号： G07F17/12 ,  Y10S70/41

摘要： A coin-operated locker which is impossible to be opened when the locker is unused and which is openable by means of its door and becomes usable when a coin or coins of a predetermined amount are deposited, includes a sensor for detecting the deposit of a coin or coins, a detector for detecting the locking and the unlocking of a cylinder lock, a plunger engageable with or removable from an engaging opening of the door, and a controller for retracting the plunger from the door in response to a coin deposit signal from the sensor and for engaging the plunger with the door after a predetermined time in response to an unlock signal from the detector.

摘要翻译： 一种投币式储物柜，其在储物柜未使用时不可能被打开，并且可以通过其门打开并且当存放预定量的硬币或硬币时变得可用，包括用于检测硬币沉积的传感器 或硬币，用于检测气缸锁的锁定和解锁的检测器，可与门的接合开口接合或可拆卸的柱塞，以及用于响应于来自所述门的硬币沉积信号而将柱塞从门回缩的控制器 传感器，并且用于响应于来自检测器的解锁信号在预定时间之后将柱塞与门接合。

公开(公告)号：US20140001360A1

公开(公告)日：2014-01-02

申请号：US14002275

申请日：2012-01-27

申请人： Yuji Kasai ,  Makoto Suzuki ,  Hiroshi Makino

发明人： Yuji Kasai ,  Makoto Suzuki ,  Hiroshi Makino

IPC分类号： H01J37/05

CPC分类号： H01J37/05 ,  G01N23/2251 ,  G06T1/00 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24475 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/24495

摘要： Provided is a technique to automatize a synthesis function of signal charged particles having different energies. A charged particle beam apparatus includes: a charged particle source configured to irradiate a sample with a primary charged particle ray; a first detector configured to detect a first signal electron having first energy from signal charged particles generated from the sample; a second detector configured to detect a second signal electron having second energy from signal charged particles generated from the sample; a first operation part configured to change a synthesis ratio of a signal intensity of the first signal electron and a signal intensity of the second signal electron and to generate a detected image corresponding to each synthesis ratio; a second operation part configured to calculate a ratio of signal intensities corresponding to predetermined two areas of the detected image generated for each synthesis ratio; and a third operation part configured to determine a mixture ratio to be used for acquisition of the detected image on a basis of a change of the ratio of signal intensities.

摘要翻译： 提供了一种使具有不同能量的信号带电粒子的合成功能自动化的技术。 带电粒子束装置包括：带电粒子源，被配置为用一次带电粒子射线照射样品; 第一检测器，被配置为检测从所述样品产生的信号带电粒子的具有第一能量的第一信号电子; 第二检测器，被配置为检测从样品产生的信号带电粒子的具有第二能量的第二信号电子; 第一操作部，被配置为改变第一信号电子的信号强度和第二信号电子的信号强度的合成比，并且生成与每个合成比相对应的检测图像; 第二操作部，被配置为计算与针对每个合成比生成的检测图像的预定的两个区域相对应的信号强度的比率; 以及第三操作部件，被配置为基于信号强度比的变化来确定用于获取检测到的图像的混合比率。

公开(公告)号：US20070235646A1

公开(公告)日：2007-10-11

申请号：US11655275

申请日：2007-01-19

申请人： Kazuma Tanii ,  Yuji Kasai ,  Katsuhiro Sasada ,  Eiichi Seya

发明人： Kazuma Tanii ,  Yuji Kasai ,  Katsuhiro Sasada ,  Eiichi Seya

IPC分类号： G01N23/00

CPC分类号： G01N23/2251 ,  H01J37/28 ,  H01J2237/004 ,  H01J2237/216 ,  H01J2237/24564

摘要： Disclosed is a scanning electron microscope capable of performing speedy focusing by automatically measuring an electrostatic voltage of a surface of a wafer inside a specimen chamber in an accurate, and easy speedy manner, the wafer assuming different electrostatic voltages inside and outside the specimen chamber. The scanning electron microscope that controls optical systems measures an electrostatic voltage of the specimen according to an electrostatic capacitance between the both parts of the divided electrode plate, by dividing an electrode plate into two parts and switching potentials of electrodes obtained by the division with each other, an electrostatic voltage of the specimen based on an electrostatic capacitance between the both parts of the divided electrode plate. The electrode plate is used for applying a retarding voltage and arranged over a specimen.

摘要翻译： 公开了一种扫描电子显微镜，其能够以准确且容易的方式自动测量样品室内的晶片表面的静电电压，从而在晶片内部和外部具有不同的静电电压来进行快速聚焦。 控制光学系统的扫描电子显微镜通过将电极板分成两部分并通过彼此分割获得的电极的切换电位来测量根据分隔电极板的两个部分之间的静电电容的样品的静电电压 基于分割电极板的两个部分之间的静电电容的试样的静电电压。 电极板用于施加延迟电压并且布置在试样上。

公开(公告)号：US5886778A

公开(公告)日：1999-03-23

申请号：US959523

申请日：1997-10-28

申请人： Yuji Kasai ,  Shigeki Sakai

发明人： Yuji Kasai ,  Shigeki Sakai

IPC分类号： G01J3/42 ,  G01N21/31

CPC分类号： G01N21/3103

摘要： A method of measuring a beam flux rate in a film growth apparatus which includes supplying a hollow cathode lamp with a current that alternates between two current values and does not include a zero current, introducing intensity-modulated spectral light emitted by the hollow cathode lamp into a vacuum chamber of a film growth apparatus, absorbing the light by a beam of atoms projected at a substrate surface, and detecting components synchronized with the modulation of the spectral light obtained.

摘要翻译： 一种测量薄膜生长装置中的光束通量速率的方法，该方法包括向空心阴极灯提供在两个电流值之间交替的电流，并且不包括零电流，将由中空阴极灯发出的强度调制的光谱光引入 膜生长装置的真空室，通过投射在基板表面的原子束吸收光，以及检测与所获得的光谱光的调制同步的成分。