公开(公告)号：US08890068B2

公开(公告)日：2014-11-18

申请号：US14002275

申请日：2012-01-27

Applicant: Yuji Kasai ,  Makoto Suzuki ,  Hiroshi Makino

Inventor： Yuji Kasai ,  Makoto Suzuki ,  Hiroshi Makino

IPC: H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  G01N23/225 ,  G06T1/00

CPC classification number: H01J37/05 ,  G01N23/2251 ,  G06T1/00 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24475 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/24495

Abstract: Provided is a technique to automatize a synthesis function of signal charged particles having different energies. A charged particle beam apparatus includes: a charged particle source configured to irradiate a sample with a primary charged particle ray; a first detector configured to detect a first signal electron having first energy from signal charged particles generated from the sample; a second detector configured to detect a second signal electron having second energy from signal charged particles generated from the sample; a first operation part configured to change a synthesis ratio of a signal intensity of the first signal electron and a signal intensity of the second signal electron and to generate a detected image corresponding to each synthesis ratio; a second operation part configured to calculate a ratio of signal intensities corresponding to predetermined two areas of the detected image generated for each synthesis ratio; and a third operation part configured to determine a mixture ratio to be used for acquisition of the detected image on a basis of a change of the ratio of signal intensities.

Abstract translation: 提供了一种使具有不同能量的信号带电粒子的合成功能自动化的技术。 带电粒子束装置包括：带电粒子源，被配置为用一次带电粒子射线照射样品; 第一检测器，被配置为检测从所述样品产生的信号带电粒子的具有第一能量的第一信号电子; 第二检测器，被配置为检测从样品产生的信号带电粒子的具有第二能量的第二信号电子; 第一操作部，被配置为改变第一信号电子的信号强度和第二信号电子的信号强度的合成比，并且生成与每个合成比相对应的检测图像; 第二操作部，被配置为计算与针对每个合成比生成的检测图像的预定的两个区域相对应的信号强度的比率; 以及第三操作部件，被配置为基于信号强度比的变化来确定用于获取检测到的图像的混合比率。

公开(公告)号：US08686380B2

公开(公告)日：2014-04-01

申请号：US12453986

申请日：2009-05-28

Applicant: Souichi Katagiri ,  Takashi Ohshima ,  Sho Takami ,  Makoto Ezumi ,  Takashi Doi ,  Yuji Kasai

Inventor： Souichi Katagiri ,  Takashi Ohshima ,  Sho Takami ,  Makoto Ezumi ,  Takashi Doi ,  Yuji Kasai

IPC: G21G5/00

CPC classification number: H01J37/18 ,  H01J2237/06341 ,  H01J2237/182 ,  H01J2237/188

Abstract: The present invention provides a charged particle beam apparatus that keeps the degree of vacuum in the vicinity of the electron source to ultra-high vacuum such as 10−8 to 10−9 Pa even in the state where electron beams are emitted using a non-evaporable getter pump and is not affected by dropout foreign particles.The present invention includes a vacuum vessel in which a charged particle source (electron source, ion source, etc.) is disposed and a non-evaporable getter pump disposed at a position that does not directly face electron beams and includes a structure that makes the non-evaporable getter pump upward with respect to a horizontal direction to drop out foreign particles into a bottom in a groove, so that the foreign particles dropped out from the non-evaporable getter pump do not face an electron optical system. Or, the present invention includes a structure that is covered by a shield means, or a means that is disposed immediately on a surface of the non-evaporable getter pump but at a position where the electron beams are not seen and has a concave structure capable of trapping the dropout foreign particles on a lower portion of the non-evaporable getter pump.

Abstract translation: 本发明提供了一种带电粒子束装置，其将电子源附近的真空度保持为10-8至10-9Pa的超高真空度，即使在使用非电子束发射电子束的状态下， 可蒸发吸气泵，不受脱落异物的影响。 本发明包括设置有带电粒子源（电子源，离子源等）的真空容器和设置在不直接面向电子束的位置的非蒸发性吸气泵，并且包括使 不可蒸发的吸气剂相对于水平方向向上泵送以将异物排出到槽中的底部，使得从非蒸发性吸气泵排出的异物不面向电子光学系统。 或者，本发明包括被屏蔽装置覆盖的结构，或者立即设置在不可蒸发的吸气泵的表面上，但是在不能看到电子束的位置处并具有凹形结构的装置 在非蒸发性吸气泵的下部捕获脱落的异物。

公开(公告)号：US07514683B2

公开(公告)日：2009-04-07

申请号：US11655275

申请日：2007-01-19

Applicant: Kazuma Tanii ,  Yuji Kasai ,  Katsuhiro Sasada ,  Eiichi Seya

Inventor： Kazuma Tanii ,  Yuji Kasai ,  Katsuhiro Sasada ,  Eiichi Seya

IPC: H01J37/28

CPC classification number: G01N23/2251 ,  H01J37/28 ,  H01J2237/004 ,  H01J2237/216 ,  H01J2237/24564

Abstract: Disclosed is a scanning electron microscope capable of performing speedy focusing by automatically measuring an electrostatic voltage of a surface of a wafer inside a specimen chamber in an accurate, and easy speedy manner, the wafer assuming different electrostatic voltages inside and outside the specimen chamber. The scanning electron microscope that controls optical systems measures an electrostatic voltage of the specimen according to an electrostatic capacitance between the both parts of the divided electrode plate, by dividing an electrode plate into two parts and switching potentials of electrodes obtained by the division with each other, an electrostatic voltage of the specimen based on an electrostatic capacitance between the both parts of the divided electrode plate. The electrode plate is used for applying a retarding voltage and arranged over a specimen.

Abstract translation: 公开了一种扫描电子显微镜，其能够以准确且容易的方式自动测量样品室内的晶片表面的静电电压，从而在晶片内部和外部具有不同的静电电压来进行快速聚焦。 控制光学系统的扫描电子显微镜通过将电极板分成两部分并通过彼此分割获得的电极的切换电位来测量根据分隔电极板的两个部分之间的静电电容的样品的静电电压 基于分割电极板的两个部分之间的静电电容的试样的静电电压。 电极板用于施加延迟电压并且布置在试样上。

公开(公告)号：US07274238B2

公开(公告)日：2007-09-25

申请号：US10520429

申请日：2003-07-08

Applicant: Eiichi Takahashi ,  Yuji Kasai ,  Tetsuya Higuchi

Inventor： Eiichi Takahashi ,  Yuji Kasai ,  Tetsuya Higuchi

IPC: H03H11/26

CPC classification number: H03L7/07 ,  H03K5/133 ,  H03K2005/00026 ,  H03L7/0805 ,  H03L7/0812

Abstract: A digital circuit according to the present invention includes a pulse delay circuit where a driving current of an inverter is variable, for causing timing of a clock signal to be variable; and the pulse delay circuit has a stabilizing circuit for an amount of a pulse delay by a delay synchronizing loop, and a generating circuit for a pulse delay amount setting voltage with nonlinear characteristics. The present invention makes it possible to realize a timing delay circuit with high resolution, which is not influenced by an operating environment and requires only a small area for the circuit.

Abstract translation: 根据本发明的数字电路包括脉冲延迟电路，其中逆变器的驱动电流是可变的，用于使时钟信号的定时可变; 并且脉冲延迟电路具有用于通过延迟同步环路的脉冲延迟量的稳定电路，以及具有非线性特性的脉冲延迟量设定电压的发生电路。 本发明使得可以实现不受操作环境影响的高分辨率的定时延迟电路，并且仅需要较小的电路面积。

公开(公告)号：US07098455B2

公开(公告)日：2006-08-29

申请号：US10404451

申请日：2003-04-02

Applicant: Hiroyuki Shinada ,  Atsuko Takafuji ,  Takanori Ninomiya ,  Yuko Sasaki ,  Mari Nozoe ,  Hisaya Murakoshi ,  Taku Ninomiya ,  Yuji Kasai ,  Hiroshi Makino ,  Yutaka Kaneko ,  Kenji Tanimoto

Inventor： Hiroyuki Shinada ,  Atsuko Takafuji ,  Takanori Ninomiya ,  Yuko Sasaki ,  Mari Nozoe ,  Hisaya Murakoshi ,  Taku Ninomiya ,  Yuji Kasai ,  Hiroshi Makino ,  Yutaka Kaneko ,  Kenji Tanimoto

IPC: H01J37/28

CPC classification number: G01N23/225 ,  G01R31/307 ,  H01J37/28 ,  H01J2237/2817

Abstract: A circuit pattern inspecting instrument includes an electron-optical system for irradiating an electron beam on a sample, an electron beam deflector, a detector for detecting secondary charged particles from the sample, and a mode setting unit for switching between a first mode and a second mode. An electron beam current is larger in the first mode than in the second mode, and an electron beam scanning speed is higher in the first mode than in the second mode. The circuit pattern inspecting instrument is configured so that first the sample is observed in the first mode, then a particular position on the sample is selected based on image data produced by an output of the detector in the first mode, and then the particular position on the sample is observed in the second mode.

公开(公告)号：US20130089120A1

公开(公告)日：2013-04-11

申请号：US13704087

申请日：2011-06-06

Applicant: Yuji Kasai ,  Masahiro Murakawa ,  Tetsuya Higuchi

Inventor： Yuji Kasai ,  Masahiro Murakawa ,  Tetsuya Higuchi

IPC: H04B1/7075

CPC classification number: H04B1/7075 ,  H04B1/707 ,  H04B1/7073 ,  H04B1/70735 ,  H04B3/542 ,  H04B2203/5416 ,  H04J13/16

Abstract: Disclosed is a spectrum spread communication system which is hardly influenced by noises, and in which a frame structure can be identified at a receiving side without use of a frame synchronization signal. A spread code generator switches spread codes (“Scai” and “Scbi”) in each frame, and outputs it to a spread modulation unit. The spread modulation unit performs spread modulation of transmission data, and transmits it to a direct current power line. A reference code generator generates reference codes (“Scai” and “Scbi”) in the same code phase. Spread demodulation units performs spread demodulation of the received signal with use of the reference codes (“Scai” and “Scbi”), and output it to a selection unit. A frame synchronization detection unit identifies a frame structure on the basis of switching of a synchronization state of a code phase in a code phase synchronization detection unit. The selection unit outputs reception data by selecting spread demodulated data from the spread demodulation unit which is in a phase-synchronized state.

Abstract translation: 公开了几乎不受噪声影响的频谱扩展通信系统，其中可以在接收侧识别帧结构而不使用帧同步信号。 扩频码发生器在每帧中切换扩频码（Scai和Scbi），并将其输出到扩展调制单元。 扩展调制单元执行发送数据的扩展调制，并将其发送到直流电力线。 参考代码生成器在相同的代码阶段生成参考代码（Scai和Scbi）。 扩展解调单元使用参考码（Scai和Scbi）对接收信号进行扩展解调，并将其输出到选择单元。 帧同步检测单元基于码相位同步检测单元中的码相位的同步状态的切换来识别帧结构。 选择单元通过从相位同步状态的扩展解调单元中选择扩展解调数据来输出接收数据。

公开(公告)号：US20110142066A1

公开(公告)日：2011-06-16

申请号：US12988939

申请日：2009-04-20

Applicant: Yuji Kasai ,  Eiichi Takahashi ,  Masahiro Murakawa ,  Tetsuya Higuchi

Inventor： Yuji Kasai ,  Eiichi Takahashi ,  Masahiro Murakawa ,  Tetsuya Higuchi

IPC: H04B7/212

CPC classification number: H04L12/4035

Abstract: A master node (12) sends an identification signal for designating a communication channel in an identification signal time slot. When the own node matches the node in which the communication channel designated by the identification signal sent from the master node (12) is set in the identification signal time slot, the master node (12) and slave nodes (131 to 13n) each perform data transmission via the communication channel, based on the set contents of the communication channel, in the data transmission time slot corresponding to the identification signal time slot in which the identification signal has been sent.

Abstract translation: 主节点（12）在识别信号时隙中发送用于指定通信信道的识别信号。 当自身节点与在主节点（12）发送的识别信号指定的通信信道被设置在识别信号时隙中的节点匹配时，主节点（12）和从节点（131至13n）各自执行 在与发送识别信号的识别信号时隙对应的数据传输时隙中，基于通信信道的设定内容，经由通信信道的数据传输。

公开(公告)号：US07447289B2

公开(公告)日：2008-11-04

申请号：US10809374

申请日：2004-03-26

Applicant: Munehiro Uratani ,  Eiichi Takahashi ,  Yuji Kasai ,  Tetsuya Higuchi ,  Masahiro Murakawa

Inventor： Munehiro Uratani ,  Eiichi Takahashi ,  Yuji Kasai ,  Tetsuya Higuchi ,  Masahiro Murakawa

IPC: H04L7/00

CPC classification number: H04L7/0337 ,  H03L7/087

Abstract: Delay time between an input of data to a circuit block and an output of the data from the data block is measured in accordance with a timing at which the data from the circuit block is acquired by a measurement register and a timing at which the data from the circuit block is acquired by a data latch. An LSI tester sets well voltage adjustment values so that delay time of each circuit block is averaged. From voltages generated by the adjustment voltage generating circuit, a selector selects voltages that are in accordance with the well voltage adjustment values. The voltages selected are applied to a well of a CMOS transistor of each clock timing adjustment circuit. Delay time between timings of inputted clocks is thus adjusted.

Abstract translation: 根据来自电路块的数据通过测量寄存器获取的定时和来自数据块的数据的定时，测量数据到电路块的数据输入与来自数据块的数据的输出之间的延迟时间 电路块由数据锁存器获取。 LSI测试仪设置好的电压调整值，使得每个电路块的延迟时间被平均。 根据由调整电压产生电路产生的电压，选择器选择与电压调节值相一致的电压。 所选择的电压被施加到每个时钟定时调整电路的CMOS晶体管的阱。 因此调整输入时钟的定时之间的延迟时间。

公开(公告)号：US07248095B2

公开(公告)日：2007-07-24

申请号：US11213779

申请日：2005-08-30

Applicant: Munehiro Uratani ,  Yuji Kasai ,  Tetsuya Higuchi ,  Eiichi Takahashi

Inventor： Munehiro Uratani ,  Yuji Kasai ,  Tetsuya Higuchi ,  Eiichi Takahashi

IPC: G05F1/10

CPC classification number: H03K19/0005 ,  H03K19/018557

Abstract: A bus driving device is provided with a driver circuit for driving a bus line thereof. The driver circuit includes an MOS transistor whose well is separated from other circuits. Further, the bus driving device is provided with a voltage control section for adjusting a well voltage, in accordance with a level of a signal in the bus line. With this bus driving device, a threshold voltage of the MOS transistor is set at a predetermined target value.

Abstract translation: 总线驱动装置设有用于驱动总线的驱动电路。 驱动电路包括一个与其他电路分离的MOS晶体管。 此外，总线驱动装置设置有用于根据总线中的信号的电平来调节阱电压的电压控制部。 利用该总线驱动装置，将MOS晶体管的阈值电压设定为规定的目标值。

公开(公告)号：US20060243908A1

公开(公告)日：2006-11-02

申请号：US11452989

申请日：2006-06-15

Applicant: Hiroyuki Shinada ,  Atsuko Takafuji ,  Takanori Ninomiya ,  Yuko Sasaki ,  Mari Nozoe ,  Hisaya Murakoshi ,  Taku Ninomiya ,  Yuji Kasai ,  Hiroshi Makino ,  Yutaka Kaneko ,  Kenji Tanimoto

Inventor： Hiroyuki Shinada ,  Atsuko Takafuji ,  Takanori Ninomiya ,  Yuko Sasaki ,  Mari Nozoe ,  Hisaya Murakoshi ,  Taku Ninomiya ,  Yuji Kasai ,  Hiroshi Makino ,  Yutaka Kaneko ,  Kenji Tanimoto

IPC: G21K7/00

CPC classification number: G01N23/225 ,  G01R31/307 ,  H01J37/28 ,  H01J2237/2817

Abstract: An apparatus for inspecting a sample using a scanning electron microscope includes a sample stage, a first electron-optical system to scan an electron beam of a first beam current on the sample, a second electron-optical system to scan an electron beam of a second beam current smaller than the first beam current on the sample, a mechanism to move the sample stage, a detector provided in each of the first and second electron-optical systems to detect a secondary electron. The first electron-optical system is operable in a first mode and the second electron-optical system is operable in a second mode with higher resolution than that of the first mode. In the first mode, the sample is observed while the sample stage is moved continuously, and in the second mode, the sample is observed by detecting a secondary electron using the detector while the sample stage is held stationary.

Abstract translation: 使用扫描电子显微镜检查样品的装置包括样品台，用于扫描样品上的第一束电流的电子束的第一电子 - 光学系统，用于扫描第二电子束的电子束的第二电子 - 光学系统 光束电流小于样品上的第一光束电流，移动样品台的机构，设置在每个第一和第二电子光学系统中的检测二次电子的检测器。 第一电子 - 光学系统可在第一模式中操作，并且第二电子 - 光学系统可以以比第一模式更高的分辨率在第二模式中操作。 在第一模式中，在样品台连续移动时观察样品，在第二模式中，通过在样品台保持静止时使用检测器检测二次电子来观察样品。