中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

113 records (took 0.024 seconds)

    Thermoacoustic device
    31.
    发明申请
    Thermoacoustic device 有权
    热声装置

    公开(公告)号：US20100098272A1

    公开(公告)日：2010-04-22

    申请号：US12459495

    申请日：2009-07-02

    Applicant: Kai-Li Jiang ,  Lin Xiao ,  Zhuo Chen ,  Shou-Shan Fan ,  Chen Feng ,  Yuan-Chao Yang

    Inventor： Kai-Li Jiang ,  Lin Xiao ,  Zhuo Chen ,  Shou-Shan Fan ,  Chen Feng ,  Yuan-Chao Yang

    IPC: H04R25/00

    CPC classification number: H04R23/002 ,  B06B1/02

    Abstract: An apparatus includes an electromagnetic signal device, a medium, and a sound wave generator. The sound wave generator includes a carbon nanotube structure. The carbon nanotube structure includes one or more drawn carbon nanotube films. The electromagnetic signal device transmits an electromagnetic signal to the carbon nanotube structure. The carbon nanotube structure converts the electromagnetic signal into heat. The heat transfers to the medium and causes a thermoacoustic effect.

    Abstract translation: 一种装置包括电磁信号装置，介质和声波发生器。 声波发生器包括碳纳米管结构。 碳纳米管结构包括一个或多个拉伸碳纳米管膜。 电磁信号装置向碳纳米管结构发送电磁信号。 碳纳米管结构将电磁信号转换成热。 热传递到介质并引起热声效应。

    METHOD OF ONLINE PREDICTING MAINTENANCE OF AN APPARATUS
    34.
    发明申请
    METHOD OF ONLINE PREDICTING MAINTENANCE OF AN APPARATUS 有权
    在线预测装置的维护方法

    公开(公告)号：US20100042452A1

    公开(公告)日：2010-02-18

    申请号：US12441032

    申请日：2007-09-05

    Applicant: Zhuo Chen ,  Liqiong Hu ,  Kai Xie

    Inventor： Zhuo Chen ,  Liqiong Hu ,  Kai Xie

    IPC: G06F11/30

    CPC classification number: H01L21/67253

    Abstract: A method of online predicting maintenance of an apparatus is disclosed. Using an optical emission spectroscopy (OES) positioned on the apparatus and the change of emission spectrum intensity detected by the OES in the process, according to the detected results, measuring the parameter in the process, the function relation between the process parameter and spectrum intensity is acquired. A control threshold is decided by the processing requirement to the apparatus. When the parameter exceeds the control threshold, maintenance to the etching apparatus is engaged in order to avoid processing error caused by frequent shutdown or deficient maintenance which is estimated by experience, and hence decreasing the cost and increasing processing efficiency of substrates (such as silicon wafers) without changing apparatus and adding other online sensor, and improving production rate by avoiding waste substrates caused by error processing results. The method is suitable for semiconductor substrate etching maintenance of the apparatus and also other maintenance of the apparatus.

    Abstract translation: 公开了在线预测设备维护的方法。 使用位于设备上的光发射光谱（OES）和OES在该过程中检测到的发射光谱强度的变化，根据检测结果，测量过程中的参数，处理参数与光谱强度之间的函数关系 被收购。 控制阈值由对该装置的处理要求决定。 当参数超过控制阈值时，为了避免由经验估计的频繁停机或维护不足引起的处理误差，因此进行对蚀刻装置的维护，从而降低了基板（例如硅晶片）的成本和提高处理效率 ），不需要更换设备和添加其他在线传感器，并通过避免由错误处理结果引起的废弃基板来提高生产率。 该方法适用于设备的半导体衬底蚀刻维护以及设备的其他维护。

    Thermoacoustic device
    35.
    发明申请
    Thermoacoustic device 有权
    热声装置

    公开(公告)号：US20090279390A1

    公开(公告)日：2009-11-12

    申请号：US12459543

    申请日：2009-07-02

    Applicant: Kai-Li Jiang ,  Lin Xiao ,  Zhuo Chen ,  Shou-Shan Fan ,  Chen Feng ,  Yuan-Chao Yang

    Inventor： Kai-Li Jiang ,  Lin Xiao ,  Zhuo Chen ,  Shou-Shan Fan ,  Chen Feng ,  Yuan-Chao Yang

    IPC: B06B1/00

    CPC classification number: H04R23/002 ,  B06B1/02

    Abstract: An apparatus includes an electromagnetic signal device, a medium, and a sound wave generator. The sound wave generator includes a carbon nanotube structure. The carbon nanotube structure includes one or more carbon nanotube films. Each carbon nanotube film includes a plurality of carbon nanotubes entangled with each other. The electromagnetic signal device transmits an electromagnetic signal to the carbon nanotube structure. The carbon nanotube structure converts the electromagnetic signal into heat. The heat transfers to the medium and causes a thermoacoustic effect.

    Abstract translation: 一种装置包括电磁信号装置，介质和声波发生器。 声波发生器包括碳纳米管结构。 碳纳米管结构包括一个或多个碳纳米管膜。 每个碳纳米管膜包括彼此缠结的多个碳纳米管。 电磁信号装置向碳纳米管结构发送电磁信号。 碳纳米管结构将电磁信号转换成热。 热传递到介质并引起热声效应。

    Acoustic System
    36.
    发明申请
    Acoustic System 有权
    声学系统

    公开(公告)号：US20090268563A1

    公开(公告)日：2009-10-29

    申请号：US12459565

    申请日：2009-07-02

    Applicant: Kai-Li Jiang ,  Lin Xiao ,  Zhuo Chen ,  Shou-Shan Fan ,  Chen Feng ,  Yuan-Chao Yang

    Inventor： Kai-Li Jiang ,  Lin Xiao ,  Zhuo Chen ,  Shou-Shan Fan ,  Chen Feng ,  Yuan-Chao Yang

    IPC: B06B1/00

    CPC classification number: H04R23/002 ,  B06B1/02

    Abstract: An acoustic system includes a sound-electro converting device, a electro-wave converting device, and a sound wave generator. The electro-wave converting device is connected to the sound-electro converting device. The sound wave generator is spaced from the electro-wave converting device and includes a carbon nanotube structure. The sound-electro converting device converts a sound pressure to an electrical signal and transmits the electrical signal to the electro-wave converting device. The electro-wave converting device emits an electromagnetic signal corresponding to the electrical signal and transmits the electromagnetic signal to the carbon nanotube structure. The carbon nanotube structure converts the electromagnetic signal into heat, and the heat transfers to a medium causing a thermoacoustic effect.

    Abstract translation: 声学系统包括声电转换装置，电波转换装置和声波发生器。 电波转换装置连接到声电转换装置。 声波发生器与电波转换装置间隔开并且包括碳纳米管结构。 声电转换装置将声压转换为电信号，并将电信号发送到电波转换装置。 电波转换装置发射对应于电信号的电磁信号，并将电磁信号发送到碳纳米管结构。 碳纳米管结构将电磁信号转换为热，并将热量转移到导致热声效应的介质。

    Field emission electron source having carbon nanotubes and method for manufacturing the same
    38.
    发明申请
    Field emission electron source having carbon nanotubes and method for manufacturing the same 有权
    具有碳纳米管的场发射电子源及其制造方法

    公开(公告)号：US20090115306A1

    公开(公告)日：2009-05-07

    申请号：US12006334

    申请日：2007-12-29

    Applicant: Yang Wei ,  Zhuo Chen ,  Liang Liu ,  Shou-Shan Fan

    Inventor： Yang Wei ,  Zhuo Chen ,  Liang Liu ,  Shou-Shan Fan

    IPC: H01J1/02 ,  H01J9/02

    CPC classification number: H01J1/304 ,  H01J9/025 ,  H01J2201/30469

    Abstract: A field emission electron source having carbon nanotubes includes a CNT string and a conductive base. The CNT string has an end portion and a broken end portion, the end portion is contacted with and electrically connected to the surface of the conductive base. The CNTs at the broken end portion form a tooth-shape structure, wherein some CNTs protruding and higher than the adjacent CNTs. Each protruding CNT functions as an electron emitter. Further, a method for manufacturing a field emission electron source is provided. The field emission efficiency of the field emission electron source is high.

    Abstract translation: 具有碳纳米管的场发射电子源包括CNT串和导电基底。 CNT串具有端部和断开的端部，端部与导电性基体的表面接触并电连接。 破碎端部的CNT形成齿形结构，其中一些CNT突出并高于相邻的CNT。 每个突出的CNT用作电子发射体。 此外，提供了一种用于制造场发射电子源的方法。 场发射电子源的场发射效率高。

    Laser-based method for making field emission cathode
    39.
    发明申请
    Laser-based method for making field emission cathode 有权
    用于制造场致发射阴极的基于激光的方法

    公开(公告)号：US20080268739A1

    公开(公告)日：2008-10-30

    申请号：US11982674

    申请日：2007-11-02

    Applicant: Zhuo Chen ,  Chun-Xiang Luo ,  Kai-Li Jiang ,  Shou-Shan Fan

    Inventor： Zhuo Chen ,  Chun-Xiang Luo ,  Kai-Li Jiang ,  Shou-Shan Fan

    IPC: H01J9/02

    CPC classification number: H01J9/025 ,  H01J2201/30469 ,  Y10S977/742 ,  Y10S977/843

    Abstract: A method for making a field emission cathode includes the steps of: (a) providing a substrate having a first substrate surface and a second substrate surface opposite to the first substrate surface; (b) forming a conductive film on the first substrate surface; (c) forming a catalyst film on the conductive film, the catalyst film including carbonaceous material; (d) flowing a mixture of a carrier gas and a carbon source gas over the catalyst film; (e) focusing a laser beam on the catalyst film and/or on the second substrate surface to locally heat the catalyst to a predetermined reaction temperature; and (f) growing an array of the carbon nanotubes via the catalyst film to form a field emission cathode.

    Abstract translation: 制造场发射阴极的方法包括以下步骤：（a）提供具有与第一衬底表面相对的第一衬底表面和第二衬底表面的衬底; （b）在第一基板表面上形成导电膜; （c）在导电膜上形成催化剂膜，所述催化剂膜包括碳质材料; （d）将载气和碳源气体的混合物流过催化剂膜; （e）将激光束聚焦在催化剂膜和/或第二基板表面上，以将催化剂局部加热至预定的反应温度; 和（f）经由催化剂膜生长碳纳米管的阵列以形成场致发射阴极。

    Laser-based method for growing an array of carbon nanotubes
    40.
    发明申请
    Laser-based method for growing an array of carbon nanotubes 有权
    用于生长碳纳米管阵列的基于激光的方法

    公开(公告)号：US20080152575A1

    公开(公告)日：2008-06-26

    申请号：US11982517

    申请日：2007-11-02

    Applicant: Zhuo Chen ,  Yang Wei ,  Kai-Li Jiang ,  Shou-Shan Fan

    Inventor： Zhuo Chen ,  Yang Wei ,  Kai-Li Jiang ,  Shou-Shan Fan

    IPC: D01F9/12

    CPC classification number: D01F9/12 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  C01B2202/08 ,  Y10S977/742 ,  Y10S977/843

    Abstract: A method for making/growing an array of carbon nanotubes includes the steps of: (a) providing a substrate; (b) forming a light absorption film made of a light absorption material on the substrate; (c) forming a catalyst film on the light absorption film; (d) introducing a mixture of a carrier gas and a carbon source gas by flowing the mixture over/across the catalyst film; (e) focusing a laser beam on the light absorption film to locally heat the catalyst to a predetermined/reaction temperature; and (f) growing an array of the carbon nanotubes from the substrate.

    Abstract translation: 制造/生长碳纳米管阵列的方法包括以下步骤：（a）提供基底; （b）在基板上形成由光吸收材料制成的光吸收膜; （c）在光吸收膜上形成催化剂膜; （d）通过使所述混合物流过/穿过所述催化剂膜引入载气和碳源气体的混合物; （e）将激光束聚焦在光吸收膜上以将催化剂局部加热至预定/反应温度; 和（f）从基底生长碳纳米管阵列。

Patent Agency Ranking