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公开(公告)号:US2360013A
公开(公告)日:1944-10-10
申请号:US43877642
申请日:1942-04-13
申请人: GEORGE RENNER HAROLD
发明人: GEORGE RENNER HAROLD
IPC分类号: B24B53/065
CPC分类号: B24B53/065
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公开(公告)号:US2225489A
公开(公告)日:1940-12-17
申请号:US22131638
申请日:1938-07-26
申请人: KARL TESSKY
发明人: KARL TESSKY
IPC分类号: B24B53/065
CPC分类号: B24B53/065 , Y10T137/8593
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公开(公告)号:US1994386A
公开(公告)日:1935-03-12
申请号:US65689733
申请日:1933-02-15
申请人: DARDANL THOMAS H
发明人: DARDANL THOMAS H
IPC分类号: B24B53/065
CPC分类号: B24B53/065
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公开(公告)号:US1827659A
公开(公告)日:1931-10-13
申请号:US33037229
申请日:1929-01-04
申请人: KARL JUNG
发明人: KARL JUNG
IPC分类号: B24B53/065
CPC分类号: B24B53/065
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公开(公告)号:US1250359A
公开(公告)日:1917-12-18
申请号:US11742616
申请日:1916-08-29
申请人: SACREY ELMER P
发明人: SACREY ELMER P
CPC分类号: B24B53/065
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公开(公告)号:US819384A
公开(公告)日:1906-05-01
申请号:US1905288022
申请日:1905-11-18
申请人: STANSBURY JOSEPH A
发明人: STANSBURY JOSEPH A
CPC分类号: B24B53/065
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公开(公告)号:US06881130B1
公开(公告)日:2005-04-19
申请号:US10018767
申请日:2000-04-20
申请人: Mark Andrew Stocker
发明人: Mark Andrew Stocker
IPC分类号: B24B53/00 , B23H1/04 , B23H9/00 , B24B1/00 , B24B9/00 , B24B9/06 , B24B47/22 , B24B49/04 , B24B53/065 , B25J9/16 , H01L21/304
CPC分类号: B24B1/00 , B23H1/04 , B23H9/00 , B24B9/065 , B24B47/22 , B24B49/04 , B24B53/065 , B25J9/1602 , H01L21/304
摘要: A method of positioning a grooved grinding wheel relative to a disc-like circular workpiece for edge grinding the workpiece using the groove in the wheel includes the steps of mounting the workpiece for rotation about a first axis, mounting the grinding wheel for rotation about a second parallel axis, effecting relative movement between the workpiece and the wheel to engage the rim of the wheel within the groove and performing a preliminary grind. The position of the wheel is axially adjusted in accordance with the measurements made on the profile of the rim produced by the preliminary grind, and the rim is ground again with a second preliminary grind with the grinding wheel located at the axially shifted position. The steps of grinding and measuring the periphery of the workpiece are repeated until the rim profile possesses the desired accuracy. The final position of the grooved grinding wheel is then utilized for grinding future wafers.
摘要翻译: 相对于盘状圆形工件定位带槽砂轮的方法,用于使用车轮中的槽边缘研磨工件的步骤包括以下步骤:将工件安装在第一轴线周围,将砂轮安装在第二轴上 平行的轴线,影响工件和车轮之间的相对运动,以使车轮轮缘在槽内啮合并进行预磨。 轮的位置根据由预研磨产生的轮辋轮廓上的测量值进行轴向调节,并且轮辋再次用第二初步磨削研磨,砂轮位于轴向位移位置。 重复磨削和测量工件的周边的步骤,直到轮辋轮廓具有期望的精度。 然后利用开槽砂轮的最终位置研磨未来的晶圆。
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公开(公告)号:US3623469A
公开(公告)日:1971-11-30
申请号:US3623469D
申请日:1969-11-13
申请人: IND TECTONICS INC
发明人: NILES RAYMOND W
IPC分类号: B24B53/065 , B24B53/06
CPC分类号: B24B53/065
摘要: A radius dresser for generating a profile having arcuate portions generated about different centers and/or different radii of rotation. The dresser includes a first swingable member mounted on a frame for pivotal movement about a first axis and a second swingable member, having a tool thereon, mounted on the first member for pivotal movement about a second axis parallel to and laterally displaced from the first axis. Control means permit the first swingable member to be fixedly connected to the frame or to the second swingable member, the angular oscillation of the second member occurring about the first axis when the first member is nonrotatably connected relative to the second member and about the second axis when the first member is nonrotatably connected to the frame. The control means also include means for permitting the first swingable member to be nonrotatably secured to the frame in a plurality of positions for permitting relative lateral displacement between said axes.
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公开(公告)号:US3608537A
公开(公告)日:1971-09-28
申请号:US3608537D
申请日:1969-06-25
申请人: HEALD MACHINE CO
IPC分类号: B24B53/065 , B24B53/06
CPC分类号: B24B53/065
摘要: A device for dressing an arcuate surface on a grinding wheel wherein a diamond tool is rotated about an axis on a transversely pivoted platen to form the arc and adjusting screw means extends along the axis to transversely pivot the tool in order to adjust the distance of the tool from the first axis.
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公开(公告)号:US3474772A
公开(公告)日:1969-10-28
申请号:US3474772D
申请日:1967-06-02
申请人: ROBERT J SIROIS
发明人: SIROIS ROBERT J
IPC分类号: B24B53/065 , B24B53/12 , B24B53/00
CPC分类号: B24B53/065 , B24B53/12 , Y10T137/2544
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