公开(公告)号：US20200277215A1

公开(公告)日：2020-09-03

申请号：US16726207

申请日：2019-12-23

申请人： THE REGENTS OF THE UNIVERSITY OF MICHIGAN

发明人： Khalil NAJAFI ,  Jae Yoong CHO ,  Ali DARVISHIAN ,  Guohong HE ,  Behrouz SHIARI ,  Tal NAGOURNEY

IPC分类号： C03B23/025 ,  G01C19/567 ,  G01C19/5691 ,  C03C15/00 ,  C03B23/035 ,  G01D5/34 ,  C03C17/06 ,  G01C25/00

摘要： Gyroscopes are sensors that measure angular rate and angular orientation. A three-dimensional fused silica micro shell rate-integrating gyroscope is presented. One aspect of the gyroscope includes the use of optical sensors to detect motion of the resonator. The proposed gyroscope is attractive because it achieves several magnitudes higher accuracy as well as high vibration and shock insensitivity from a novel resonator design as well as other unique manufacturing processes.

公开(公告)号：US10746548B2

公开(公告)日：2020-08-18

申请号：US14532256

申请日：2014-11-04

申请人： Analog Devices, Inc.

发明人： Jeffrey A. Gregory ,  Igor P. Prikhodko

IPC分类号： G01C19/5677 ,  G01C19/5684 ,  G01C19/567

摘要： Novel structural features applicable to a variety of inertial sensors. A composite ring composed of concentric subrings is supported by a compliant support structure suspending the composite ring relative to a substrate. The compliant support structure may either be interior or exterior to the composite ring. The compliant support may be composed of multiple substantially concentric rings coupled to neighboring rings by transverse members regularly spaced at intervals that vary with radius relative to a central axis of symmetry. Subrings making up the composite ring may vary in width so as to provide larger displacement amplitudes at intermediate radii, for example. In other embodiments, electrodes are arranged to reduce sensitivity to vibration and temperature, and shock stops are provided to preclude shorting in response to shocks.

公开(公告)号：US20180172445A1

公开(公告)日：2018-06-21

申请号：US15383366

申请日：2016-12-19

申请人： Analog Devices, Inc.

发明人： Igor P. Prikhodko ,  John A. Geen ,  Jeffrey A. Gregory

IPC分类号： G01C19/567 ,  G01C19/5712

CPC分类号： G01C19/574

摘要： Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit anti-phase motion. The couplers move in opposite directions of each other, such that one coupler on one side of the movable masses moves in a first linear direction and another coupler on the opposite side of the movable masses moves in a second linear direction opposite the first linear direction. The couplers ensure proper anti-phase motion of the masses.

公开(公告)号：US20180156634A1

公开(公告)日：2018-06-07

申请号：US15368206

申请日：2016-12-02

申请人： ALEXANDER TRUSOV

发明人： ALEXANDER TRUSOV

IPC分类号： G01C25/00 ,  G01C19/567

CPC分类号： G01C19/567 ,  G01C25/00

摘要： One example includes a resonator gyroscope. The resonator gyroscope includes a sensing system comprising a plurality of electrodes arranged about a sensitive axis and configured to electrostatically force a resonator into a substantially periodic motion based on a plurality of forcer signals applied to the plurality of electrodes, and configured to provide an indication of rotation about a sensitive axis of the resonator gyroscope. The resonator gyroscope further includes a controller configured to generate the plurality of forcer signals to provide the substantially periodic motion of the resonator concurrently in each of a plurality of separate vibration pattern modes to measure the rotation of the resonator gyroscope about the sensitive axis in response to a plurality of pickoff signals associated with the substantially periodic motion.

公开(公告)号：US20170089701A1

公开(公告)日：2017-03-30

申请号：US14866561

申请日：2015-09-25

申请人： Apple Inc.

发明人： Gregory B. Arndt ,  Christopher C. Painter

IPC分类号： G01C19/567 ,  G01N29/12

CPC分类号： G01C19/567 ,  G01C19/5776 ,  H03L1/00

摘要： In some implementations, a control system for a resonating element comprises: a resonating element being driven by an oscillating drive signal and configured to generate a sense signal proportional to an amplitude of motion; a phase comparator coupled to the resonating element and to an oscillating drive signal, the phase comparator configured to compare the sense signal and the oscillating drive signal and to generate an error signal proportional to the phase difference; an oscillator coupled to the phase comparator and configured for generating the oscillating drive signal, the oscillator configured to receive the error signal and to adjust a phase of the oscillating signal based on the error signal; and an automatic gain control coupled to the resonating element and the oscillator, the automatic gain control configured to adjust the gain of the oscillating drive signal based on the signal generated by the resonating element.

公开(公告)号：US20150176992A1

公开(公告)日：2015-06-25

申请号：US14552891

申请日：2014-11-25

申请人： EM Microelectronic-Marin SA

发明人： Christophe ENTRINGER ,  Alexandre DESCHILDRE ,  Sylvain GROSJEAN

IPC分类号： G01C19/567

CPC分类号： G01C19/567 ,  G01C19/5776

摘要： The electronic circuit measures angular speed in a gyroscope, which includes a mass connected to a spring and a damping element, an actuation capacitor for actuating the mass and a detection capacitor for detecting motion of the mass. The electronic circuit includes a measurement resistor, which is connected to the moving mass and has a variation in resistive value equal to the oscillation frequency of the mass. The resistor is polarized to supply a measurement signal, which includes a carrier signal in phase with the oscillation of the mass and an angular speed signal phase shifted by π/2 relative to the carrier signal The measurement signal is supplied to an integration unit clocked by a clocking signal phase shifted by π/2 relative to the carrier signal and originating from the drive circuit. The angular speed signal is demodulated at the integration unit output.

摘要翻译： 电子电路测量陀螺仪中的角速度，其包括连接到弹簧和阻尼元件的质量，用于致动质量的致动电容器和用于检测质量块的运动的检测电容器。 电子电路包括测量电阻，其连接到移动质量块，并具有等于质量的振荡频率的电阻值的变化。 电阻器被极化以提供测量信号，其包括与质量的振荡同相的载波信号和相对于载波信号移位＆pgr / / 2的角速度信号相位。测量信号被提供给具有时钟 通过相对于载波信号移位并且来自驱动电路的时钟信号相位移位＆pgr; / 2。 角速度信号在积分单元输出处被解调。