公开(公告)号：US11303092B2

公开(公告)日：2022-04-12

申请号：US17152425

申请日：2021-01-19

申请人： Carl Zeiss SMT GmbH

发明人： Udo Dinger

IPC分类号： G03F7/20 ,  H01S3/09 ,  H01S3/10 ,  G21K1/06

摘要： An FEL includes a feedback device for feeding back emitted illumination radiation.

公开(公告)号：US11270808B2

公开(公告)日：2022-03-08

申请号：US16461360

申请日：2017-11-27

申请人： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE

发明人： Franck Delmotte ,  Maël Dehlinger

IPC分类号： G02B5/08 ,  G02B5/28 ,  G21K1/06 ,  G02B5/26

摘要： A spectral selection component for XUV radiation comprises a first multilayer mirror for receiving an XUV radiation beam along an input axis located in a first plane of incidence. The spectral selection component comprises a second multilayer mirror for receiving, in a second plane of incidence, an XUV radiation beam reflected by the first mirror in order to transmit the radiation to an output axis of the spectral selection component. One of the first and second mirrors has a first, high-pass energy spectral response, with a flank on the low-energy side with a steepness that is greater than 0.1 eV−1, whereas the other mirror has a second, low-pass energy spectral response, with a flank on the high-energy side with a steepness that is greater than 0.1 eV−1. The first and second mirrors may have an only partial overlap in their spectral energy responses.

公开(公告)号：US11250968B2

公开(公告)日：2022-02-15

申请号：US16930967

申请日：2020-07-16

申请人： Convergent R.N.R. Ltd.

发明人： Aharon Bar-David ,  Shirly Borukhin ,  Michael Kleckner ,  Zeev Harel

IPC分类号： G21K1/06 ,  A61N5/10

摘要： An X-ray system for providing a converging X-rays comprises: (a) an X-ray source having an optical axis thereof; and an X-ray lens comprising at least one ring having a Bragg reflecting surface formed by a plurality of single-crystal tiles. Each tile individually comprises an adjusting arrangement enabling a tridimensional individual displacement thereof in angular and translational manner.

公开(公告)号：US20220037048A1

公开(公告)日：2022-02-03

申请号：US17276243

申请日：2019-09-18

申请人： KONINKLIJKE PHILIPS N.V.

发明人： ROGER STEADMAN BOOKER ,  EWALD ROESSL ,  DENNIS JOHN VERSTEEG

IPC分类号： G21K1/06 ,  G01N23/041

摘要： A switchable grating for phase contrast imaging comprising a reservoir with a medium and x-ray absorbing particles acoustically connected to a first ultrasound generator and a second ultrasound generator arranged along a side of the reservoir orthogonal to the first side. The ultrasound generators are each, individually or together, configured to generate a soundwave with a frequency and phase such that a standing wave is formed within the medium causing the x-ray absorbing particles to organize along pressure nodes of the standing waves.

公开(公告)号：US11229411B2

公开(公告)日：2022-01-25

申请号：US16526186

申请日：2019-07-30

申请人： Siemens Healthcare GmbH

发明人： Michael Wiets ,  Philipp Wiets

IPC分类号： A61B6/00 ,  A61B6/03 ,  G21K1/06 ,  A61B6/04 ,  A61B6/06

摘要： An X-ray apparatus includes an X-ray source embodied to generate X-rays; an X-ray detector; and an X-ray reflector. The X-ray reflector is embodied to reflect X-rays generated by the X-ray source such that the reflected X-rays hit the X-ray detector. The X-ray detector is in particular embodied to detect the X-rays. The X-ray apparatus can, on the one hand, enlarge the available space above a patient. Furthermore, focusing via the X-ray reflector enables the power of the X-ray source to be increased while retaining a constant spatial resolution or the spatial resolution to be improved while retaining a constant power of the X-ray source.

公开(公告)号：US20220003689A1

公开(公告)日：2022-01-06

申请号：US16650284

申请日：2020-02-17

申请人： Tohoku University

发明人： Asao Nakano ,  Atsushi Momose

IPC分类号： G01N23/041 ,  H01J35/08 ,  G21K1/06

摘要： An electron source irradiates a target by inclining an electron beam at a predetermined irradiation angle θ with respect to a perpendicular to a target substrate. In this way, it is possible to extract grating-shaped X-rays in a direction perpendicular to the target substrate. The target substrate includes a substance containing a light element. On a surface of the target substrate, a plurality of grooves periodically disposed in a one-dimensional or two-dimensional direction to have a grating shape is formed. X-ray generating portions are arranged in a grating shape by being embedded in the plurality of grooves formed in the target substrate. The X-ray generating portions are made of a metal including W, Ta, Pt or Au or an alloy thereof. A depth M of the X-ray generating portions arranged in the grating shape is set within a predetermined range. The generation efficiency of X-rays for phase imaging is improved.

公开(公告)号：US11217357B2

公开(公告)日：2022-01-04

申请号：US17169159

申请日：2021-02-05

申请人： Sigray, Inc.

发明人： Wenbing Yun ,  Sylvia Jia Yun Lewis ,  Janos Kirz

IPC分类号： G21K1/06 ,  G01N23/20008 ,  G01N23/083 ,  G01N23/205

摘要： An x-ray mirror optic includes a plurality of surface segments with quadric cross-sections having differing quadric parameters. The quadric cross-sections of the surface segments share a common axis and are configured to reflect x-rays in a plurality of reflections along a single optical axis or in a scattering plane defined as containing an incident x-ray and a corresponding reflected x-ray.

公开(公告)号：US11215736B2

公开(公告)日：2022-01-04

申请号：US15038430

申请日：2015-01-29

申请人： ASML NETHERLANDS B.V.

发明人： Norbert Bowering

IPC分类号： G02B1/14 ,  G02B5/08 ,  G21K1/06

摘要： A multilayer mirror having a cap with a multilayer structure including a top layer and a series of bilayers each having an absorber layer and a spacer layer, where the materials for the top layer, absorber layers, and spacer layers are chosen to resist blistering.

公开(公告)号：US11189391B2

公开(公告)日：2021-11-30

申请号：US15734238

申请日：2019-11-11

申请人： KONINKLIJKE PHILIPS N.V. ,  NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO

发明人： Gereon Vogtmeier ,  Dorothee Hermes ,  Bo Liu ,  Andre Yaroshenko ,  Sandeep Unnikrishnan ,  Johannes Wilhelmus Maria Jacobs

IPC分类号： G01K1/06 ,  G21K1/06 ,  G02B5/18 ,  A61B6/00

摘要： The invention relates to a method of manufacturing a structured grating, a corresponding structured grating component (1) and an imaging system. The method comprising the steps of: providing (110, 120, 130) a catalyst (30) on a substrate (20), the catalyst (20) having a grating pattern; growing (140) nanostructures (50) on the catalyst (30) so as to form walls (52) and trenches (54) based on the grating pattern; and filling (160) the trenches (54) between the walls (52) of nanostructures (50) using an X-ray absorbing material (70). The invention provides an improved method for manufacturing a structured grating and such structured grating component (1), which is particularly suitable for dark-field X-ray imaging or phase-contrast imaging.

公开(公告)号：US20210343444A1

公开(公告)日：2021-11-04

申请号：US17378099

申请日：2021-07-16

申请人： Arizona Board of Regents on Behalf of Arizona State University

发明人： William Graves

IPC分类号： G21K1/06 ,  H05G2/00 ,  H01S4/00

摘要： A method includes accelerating an electron bunch along a direction of propagation to a relativistic energy and partitioning the electron bunch by transmitting the electron bunch through a grating at the relativistic energy. The grating includes a plurality of alternating narrow portions and wide portions. The narrow portions have a first thickness in a direction substantially parallel to the direction of propagation of the electron bunch, and the wide portions have a second thickness in the direction substantially parallel to the direction of propagation of the electron bunch. The second thickness is greater than the first thickness. The method also includes generating a pulse of light using the partitioned electron bunch.