Abstract:
An exemplary system for sputtering deposition includes a sputtering chamber and a gas supplying system. The sputtering chamber includes a first sputtering space and a second sputtering space isolated from the first sputtering space. Each of the first and second sputtering spaces is configured for receiving a target and a substrate therein. The gas supplying system includes a reactive gas source, an inert gas source, a first chamber in communication with the reactive gas source and the inert gas source, and a second chamber in communication with the inert gas source. Both the first and second chambers are in communication with the first and second sputtering spaces through valves.
Abstract:
An exemplary actuator based on CNT yarns includes a base and a composite film mounted on a surface of the base. The composite film is extendable in a predetermined direction substantially perpendicular to the surface of the base in response to light irradiation applied thereupon. The composite film includes a polymer layer, a plurality of semiconducting CNT yarns dispersed in the polymer layer, and a plurality of metallic CNT yarns dispersed in the polymer layer. A longitudinal of each semiconducting CNT yarn is substantially parallel with the direction. Each semiconducting CNT yarn includes a plurality of twisted semiconducting CNTs. A longitudinal of each metallic CNT yarn is substantially parallel with the direction. Each metallic CNT yarn includes a plurality of twisted metallic CNTs.
Abstract:
An exemplary proton exchange membrane fuel cell includes a light-pervious first end plate, a second end plate, a light-pervious first bipolar plate, a second bipolar plate, and a membrane electrode assembly. The light-pervious first bipolar plate is arranged adjacent to the first end plate and capable of transmitting light having a given wavelength therethrough. The second bipolar plate is capable of having oxidant fed therein. The membrane electrode assembly includes a proton exchange membrane, and an anode and a cathode arranged at opposite sides of the proton exchange membrane. The anode is capable of having fuel fed therein, and includes a first catalyst layer containing photo-catalyst and noble metal such that the light is capable of activating the first catalyst layer to dissociate the fuel thereon.
Abstract:
An exemplary zinc oxide nano-wire based actuator includes a first electrode, a second electrode opposite to the first electrode, and a zinc oxide nano-wire layer sandwiched between the first electrode and the second electrode. The zinc oxide nano-wire layer includes two opposite surfaces in contact with the first and the second electrodes respectively, and a plurality of zinc oxide nano-wires substantially parallel to each other. The first electrode and the second electrode are configured for cooperatively creating therebetween an electric field with an electric field direction substantially parallel to the zinc oxide nano-wires so as to adjust a thickness of the zinc oxide nano-wire layer, thereby moving the second electrode relative to the first electrode.