Slurry, chemical mechanical polishing method using the slurry, and method of forming metal wiring using the slurry
    41.
    发明申请
    Slurry, chemical mechanical polishing method using the slurry, and method of forming metal wiring using the slurry 审中-公开
    使用浆料的浆料,化学机械抛光方法,以及使用该浆料形成金属配线的方法

    公开(公告)号:US20090068839A1

    公开(公告)日:2009-03-12

    申请号:US12213423

    申请日:2008-06-19

    CPC classification number: C09G1/02 H01L21/3212

    Abstract: A slurry, chemical mechanical polishing (CMP) method using the slurry, and method of forming metal wiring using the slurry. The slurry may include a polishing agent, an oxidant, and at least one defect inhibitor to protect the metal film. The CMP method and method of forming metal wiring may employ one or two slurries with at least one of the slurries including at least one defect inhibitor.

    Abstract translation: 使用浆料的浆料,化学机械抛光(CMP)方法以及使用该浆料形成金属配线的方法。 浆料可以包括抛光剂,氧化剂和至少一种保护金属膜的缺陷抑制剂。 形成金属布线的CMP方法和方法可以使用一种或两种浆料,其中至少一种浆料包括至少一种缺陷抑制剂。

    Test patterns and methods of controlling CMP process using the same
    43.
    发明授权
    Test patterns and methods of controlling CMP process using the same 失效
    使用该方法控制CMP工艺的测试模式和方法

    公开(公告)号:US07294516B2

    公开(公告)日:2007-11-13

    申请号:US11055505

    申请日:2005-02-10

    CPC classification number: H01L22/32 H01L22/34

    Abstract: A test pattern and a method of controlling a CMP using the same are provided. The test pattern is disposed on a monitoring region of a semiconductor substrate having a main region and a monitoring region. The test pattern includes a planar region and a pattern region. The method comprises setting a correlation between a step difference of a test pattern and an etched thickness of a main pattern, then applying the CMP to a semiconductor substrate having the test pattern and the main pattern for a predetermined time. The step difference of the test pattern is measured and the etched thickness of the main pattern, which corresponds to the step difference of the test pattern, is determined from the correlation. A polishing time is corrected by comparing the determined etched thickness of the main pattern with a reference value, and the corrected polishing time is applied to a subsequent lot or subsequent substrate.

    Abstract translation: 提供了一种测试图案和使用其的CMP控制方法。 测试图案设置在具有主区域和监视区域的半导体衬底的监视区域上。 测试图案包括平面区域和图案区域。 该方法包括设置测试图案的阶梯差和主图案的蚀刻厚度之间的相关性,然后将CMP施加到具有测试图案和主图案的半导体衬底预定时间。 测量测试图案的阶差,并根据相关性确定对应于测试图案的阶差的主图案的蚀刻厚度。 通过将确定的主图案的蚀刻厚度与参考值进行比较来校正抛光时间,并且将修正的抛光时间应用于随后的批次或随后的基板。

    Slurry delivery system, chemical mechanical polishing apparatus and method for using the same
    44.
    发明申请
    Slurry delivery system, chemical mechanical polishing apparatus and method for using the same 有权
    浆料输送系统,化学机械抛光装置及其使用方法

    公开(公告)号:US20060262641A1

    公开(公告)日:2006-11-23

    申请号:US11434215

    申请日:2006-05-16

    Abstract: A slurry delivery system, a chemical mechanical polishing (CMP) apparatus, and method for using the same are provided. An apparatus for supplying slurry to a polishing unit may include a first feed line through which an abrasive may be supplied at a first velocity. A velocity-changing member may be connected to the first feed line, and/or a velocity of the abrasive may be changed from the first velocity to. the second velocity different from the first velocity by the velocity-changing member. A second feed line may be connected to the velocity-changing member and/or an additive may be supplied through the second feed line. A supply line may be connected to the velocity-changing member. A slurry, which may be a mixture of the abrasive and/or the additive, may be supplied to a polishing unit through the supply line. Accordingly, the slurry may be more uniformly mixed and/or supplied to a polishing unit.

    Abstract translation: 提供浆料输送系统,化学机械抛光(CMP)装置及其使用方法。 用于将浆料供应到抛光单元的装置可以包括第一进料管线,研磨剂可以通过第一进料管线以第一速度被供给。 速度改变构件可以连接到第一进料管线,和/或磨料的速度可以从第一速度改变到。 第二速度与速度变化构件的第一速度不同。 第二进料管线可以连接到速度变化部件和/或可以通过第二进料管线供应添加剂。 供应管线可以连接到速度变化构件。 可以将研磨剂和/或添加剂的混合物的浆料通过供应管线供应到抛光单元。 因此,浆料可以被更均匀地混合和/或提供给抛光单元。

    Recovery method using extendible hashing-based cluster logs in shared-nothing spatial database cluster
    45.
    发明申请
    Recovery method using extendible hashing-based cluster logs in shared-nothing spatial database cluster 有权
    在无共享空间数据库集群中使用可扩展散列集群日志的恢复方法

    公开(公告)号:US20060259525A1

    公开(公告)日:2006-11-16

    申请号:US11157885

    申请日:2005-06-20

    Abstract: The present invention provides a recovery method using extendible hashing-based cluster logs in a shared-nothing spatial database cluster, which eliminates the duplication of cluster logs required for cluster recovery in a shared-nothing database cluster, so that recovery time is decreased, thus allowing the shared-nothing spatial database cluster system to continuously provide stable service. In the recovery method, if a failure occurs in a predetermined node, a second node in a group, including the node, records cluster logs in main memory on the basis of extendible hashing. If the node that has failed recovers itself using a local log, the second node in the group transmits cluster logs in packets to a recovery node that is the failed node. If the recovery node reflects the received cluster logs and maintains consistency with other nodes in the group, the recovery node resumes normal service.

    Abstract translation: 本发明提供了一种在无共享空间数据库集群中使用可扩展散列集群日志的恢复方法,其消除了在无共享数据库集群中集群恢复所需的集群日志的重复,从而减少了恢复时间 使无共享的空间数据库集群系统不断提供稳定的服务。 在恢复方法中,如果在预定节点中发生故障,则包括该节点在内的组中的第二节点基于可扩展哈希在主存储器中记录集群日志。 如果失败的节点使用本地日志恢复自身,则该组中的第二个节点将分组中的群集日志传输到作为故障节点的恢复节点。 如果恢复节点反映接收的群集日志并维护与组中其他节点的一致性,则恢复节点恢复正常服务。

    CMOS image sensor capable of increasing fill factor and driving method thereof
    48.
    发明授权
    CMOS image sensor capable of increasing fill factor and driving method thereof 有权
    CMOS图像传感器能够增加填充因子及其驱动方法

    公开(公告)号:US06762401B2

    公开(公告)日:2004-07-13

    申请号:US10205696

    申请日:2002-07-26

    Applicant: Jae-Dong Lee

    Inventor: Jae-Dong Lee

    CPC classification number: H01L27/14603 H04N5/37457 H04N5/378

    Abstract: The present invention relates to a complementary metal-oxide-semiconductor (CMOS) image sensor, comprising: a plurality of unit pixel arrayed in rows and columns, wherein the unit pixel including: (a) a charge generating means for generating charges in response to lights reflected from an object; (b) a first reset transistor for resetting the charge generating means; (c) a floating diffusion region receiving the charges from the charge generating means; and (d) a transfer transistor for receiving an address signal to transfer the charges from the charge generation means to the floating diffusion region; and a plurality of source following unit, each coupled to each column of unit pixel. And also, the present invention provides a driving method the CMOS image sensor.

    Abstract translation: 互补金属氧化物半导体(CMOS)图像传感器技术领域本发明涉及互补金属氧化物半导体(CMOS)图像传感器,其包括:排列成行和列的多个单位像素,其中所述单位像素包括:(a)电荷产生装置, 从物体反射的光; (b)用于复位电荷产生装置的第一复位晶体管; (c)从电荷产生装置接收电荷的浮动扩散区; 和(d)转移晶体管,用于接收地址信号以将电荷从电荷产生装置转移到浮动扩散区; 以及多个源追随单元,每个源单元与每个单元像素相连。 而且,本发明提供了CMOS图像传感器的驱动方法。

    APPARATUS AND METHOD FOR COLLECTING DATA AT MULTI-POINTS
    50.
    发明申请
    APPARATUS AND METHOD FOR COLLECTING DATA AT MULTI-POINTS 审中-公开
    用于收集多点数据的装置和方法

    公开(公告)号:US20130271306A1

    公开(公告)日:2013-10-17

    申请号:US13602770

    申请日:2012-09-04

    CPC classification number: G06F3/05 H03M1/1205

    Abstract: The present invention, which relates to an apparatus for collecting data at multi-points, suggests an apparatus connecting analog blocks obtaining the same channel data in series with each other and connecting analog blocks obtaining different channel data in parallel with each other to collect data. The suggested apparatus includes a channel data collecting group including at least two channel data collecting units having data obtaining modules collecting channel data at different points and connected in series with each other; and a channel data processing unit including the channel data collecting units connected in parallel with each other and controlling each of the data obtaining module so as to allow each of the channel obtaining module to shift the channel data by a predetermined size.

    Abstract translation: 涉及多点收集数据的装置的本发明提出了一种将获得相同信道数据的模拟块彼此串联连接的装置,并且将获得不同信道数据的模拟块彼此并联连接以收集数据。 所提出的装置包括:通道数据采集组,包括至少两个通道数据采集单元,具有数据获取模块,其在不同点收集通道数据并串联连接; 以及通道数据处理单元,其包括彼此并联连接的通道数据采集单元,并且控制每个数据获取模块,以便允许每个通道获取模块将通道数据移位预定尺寸。

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