Method to eliminate shorts between adjacent contacts due to interlevel dielectric voids

    公开(公告)号:US06555435B2

    公开(公告)日:2003-04-29

    申请号:US10087070

    申请日:2002-03-01

    CPC classification number: H01L21/76831 H01L21/76897

    Abstract: A method to form contacts in an integrated circuit device comprising to eliminate shorting between adjacent contacts due to dielectric layer voids is achieved. A substrate is provided. Narrowly spaced conductive lines are provided on the substrate. A dielectric layer is deposited overlying the conductive lines and the substrate. The dielectric layer is etched through to the top surface of the substrate in areas defined by lithographic mask to form contact openings between adjacent narrowly spaced conductive lines. An insulating layer is deposited overlying the dielectric layer and filling the contact openings wherein the insulating layer forms a lining layer inside the contact openings and fills any voids in the dielectric layer extending out of the contact openings. The insulating layer is etched through to expose the top surface of the substrate. A conductive layer is deposited overlying the dielectric layer and filling the contact openings. The conductive layer is etched as defined by lithographic mask. A passivation layer is deposited overlying the conductive layer and the dielectric layer. The integrated circuit device is completed.

    Method to eliminate shorts between adjacent contacts due to interlevel dielectric voids
    42.
    发明授权
    Method to eliminate shorts between adjacent contacts due to interlevel dielectric voids 有权
    消除由于层间电介质空隙引起的相邻触点之间的短路的方法

    公开(公告)号:US06365464B1

    公开(公告)日:2002-04-02

    申请号:US09318470

    申请日:1999-05-25

    CPC classification number: H01L21/76831 H01L21/76897

    Abstract: A method to form contacts in an integrated circuit device comprising to eliminate shorting between adjacent contacts due to dielectric layer voids is achieved. A substrate is provided. Narrowly spaced conductive lines are provided on the substrate. A dielectric layer is deposited overlying the conductive lines and the substrate. The dielectric layer is etched through to the top surface of the substrate in areas defined by lithographic mask to form contact openings between adjacent narrowly spaced conductive lines. An insulating layer is deposited overlying the dielectric layer and filling the contact openings wherein the insulating layer forms a lining layer inside the contact openings and fills any voids in the dielectric layer extending out of the contact openings. The insulating layer is etched through to expose the top surface of the substrate. A conductive layer is deposited overlying the dielectric layer and filling the contact openings. The conductive layer is etched as defined by lithographic mask. A passivation layer is deposited overlying the conductive layer and the dielectric layer. The integrated circuit device is completed.

    Abstract translation: 在集成电路器件中形成接触的方法包括消除由于电介质层空隙引起的相邻触点之间的短路。 提供基板。 在基板上设置窄间隔的导线。 沉积覆盖导电线和衬底的电介质层。 在由光刻掩模限定的区域中,将介电层蚀刻到衬底的顶表面,以在相邻的窄间隔的导线之间形成接触开口。 绝缘层沉积在电介质层上方并填充接触开口,其中绝缘层在接触开口内形成衬里层,并填充延伸出接触开口的电介质层中的任何空隙。 蚀刻绝缘层以暴露衬底的顶表面。 沉积覆盖介电层并填充接触开口的导电层。 如由光刻掩模所限定的那样蚀刻导电层。 沉积覆盖在导电层和电介质层上的钝化层。 集成电路装置完成。

    Shower head
    43.
    外观设计

    公开(公告)号:USD443024S1

    公开(公告)日:2001-05-29

    申请号:US29095208

    申请日:1998-10-15

    Applicant: James Wu

    Designer: James Wu

    Method to form a protected metal fuse
    45.
    发明授权
    Method to form a protected metal fuse 失效
    形成保护金属保险丝的方法

    公开(公告)号:US6100116A

    公开(公告)日:2000-08-08

    申请号:US99144

    申请日:1998-06-18

    CPC classification number: H01L23/5258 H01L2924/0002

    Abstract: A method for forming protection layers completely around a metal fuse to protect the metal fuse 74A and metal lines 74B from moisture corrosion from fuse opening and micro-cracks in dielectric layers. The invention surrounds the fuse on all sides with two protection layers: a bottom protection layer 70 and a top protection layer 78. The top protection layer 78 is formed over the fuse metal, the sidewalls of the metal fuse and the bottom protection layer 70. The protection layers 70 78 of the invention form a moisture proof seal structure around the metal fuse 74A and protect the metal fuse 74A and metal lines 74B from moisture and contaminates.

    Abstract translation: 一种用于在金属保险丝周围完全形成保护层的方法,用于保护金属保险丝74A和金属线74B免受保险丝开口的湿度腐蚀和电介质层中的微裂纹。 本发明在所有侧面上具有两个保护层的保险丝:底部保护层70和顶部保护层78.顶部保护层78形成在熔丝金属,金属熔断器的侧壁和底部保护层70上。 本发明的保护层70 78在金属熔断器74A周围形成防潮密封结构,并且保护金属熔断器74A和金属线74B免受潮湿和污染。

    VARIABLE VALVE LIFT DIAGNOSTIC TECHNIQUES USING AN INTAKE MANIFOLD ABSOLUTE PRESSURE SIGNAL
    47.
    发明申请
    VARIABLE VALVE LIFT DIAGNOSTIC TECHNIQUES USING AN INTAKE MANIFOLD ABSOLUTE PRESSURE SIGNAL 审中-公开
    使用入口歧管绝对压力信号的变量阀提升诊断技术

    公开(公告)号:US20150167560A1

    公开(公告)日:2015-06-18

    申请号:US14132913

    申请日:2013-12-18

    Abstract: A method can include receiving, at a controller for an internal combustion engine, the controller having one or more processors, an intake manifold absolute pressure (MAP) signal indicative of an air pressure in an intake manifold of the engine. The method can include processing, at the controller, the MAP signal in a crank angle domain to obtain distinct portions of the MAP signal corresponding to cylinders of the engine, respectively. The method can include calculating, at the controller, a valve stuck index value based on the distinct portions of the MAP signal. The method can also include detecting, at the controller, one or more stuck valves of the engine based on the valve stuck index value and one or more thresholds.

    Abstract translation: 一种方法可包括在用于内燃机的控制器处接收具有一个或多个处理器的控制器,指示发动机的进气歧管中的空气压力的进气歧管绝对压力(MAP)信号。 该方法可以包括在控制器处处理曲柄角域中的MAP信号,以分别获得对应于发动机气缸的MAP信号的不同部分。 该方法可以包括在控制器处基于MAP信号的不同部分计算阀粘滞指数值。 该方法还可以包括在控制器处基于阀卡住的索引值和一个或多个阈值来检测发动机的一个或多个卡止的阀。

    Techniques for detecting supercharger belt slip
    48.
    发明授权
    Techniques for detecting supercharger belt slip 有权
    检测增压器皮带滑移的技术

    公开(公告)号:US08903598B2

    公开(公告)日:2014-12-02

    申请号:US13865384

    申请日:2013-04-18

    Abstract: A technique can include receiving, at a controller for a vehicle, the controller including one or more processors, a signal indicative of a pressure in an intake manifold of an engine of the vehicle. The vehicle can include a supercharger configured to supply pressurized air to the intake manifold. The supercharger can be driven by a crankshaft of the engine via a belt. The technique can include estimating, at the controller, a frequency of the signal to obtain an estimated frequency. The technique can include determining, at the controller, whether the belt is slipping based on a comparison between the estimated frequency and a predetermined frequency. The technique can also include outputting, at the controller, a notification when the belt is determined to be slipping.

    Abstract translation: 技术可以包括在车辆的控制器处接收包括一个或多个处理器的控制器,指示车辆发动机的进气歧管中的压力的​​信号。 车辆可以包括配置成向进气歧管供应加压空气的增压器。 增压器可以由发动机的曲轴通过皮带驱动。 该技术可以包括在控制器处估计信号的频率以获得估计的频率。 该技术可以包括在控制器处基于估计频率和预定频率之间的比较确定皮带是否滑动。 该技术还可以包括当控制器确定滑动时在控制器处输出通知。

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