公开(公告)号：US20120167261A1

公开(公告)日：2012-06-28

申请号：US13307464

申请日：2011-11-30

申请人： Mikhail Belkin ,  Feng Lu ,  Vladislav V. Yakolev ,  Craig Prater ,  Kevin Kjoller

发明人： Mikhail Belkin ,  Feng Lu ,  Vladislav V. Yakolev ,  Craig Prater ,  Kevin Kjoller

IPC分类号： G01Q70/08

CPC分类号： G01Q20/02 ,  G01N21/1717 ,  G01N21/35 ,  G01N21/3581 ,  G01N21/552 ,  G01N2021/1721 ,  G01Q30/02 ,  G01Q60/32 ,  G01Q60/40

摘要： An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface by using the AFM probe to detect wavelength dependent IR radiation interaction, typically absorption with the sample in the region of the tip. The tip may be configured to produce electric field enhancement when illuminated by a radiation source. This enhancement allows for significantly reduced illumination power levels resulting in improved spatial resolution by confining the sample-radiation interaction to the region of field enhancement which is highly localized to the tip.

摘要翻译： 已经证明了基于AFM的技术，通过使用AFM探针来检测波长相关的IR辐射相互作用（通常在尖端区域中的样品吸收）来在样品表面上进行高度局部化的IR光谱。 尖端可以被配置为当由辐射源照射时产生电场增强。 该增强允许显着降低的照明功率水平，通过将样本 - 辐射相互作用限制在高度定位于尖端的场增强区域上，从而提高了空间分辨率。

公开(公告)号：US08166567B2

公开(公告)日：2012-04-24

申请号：US11687304

申请日：2007-03-16

申请人： Nghi Phan ,  Craig Cusworth ,  Craig Prater

发明人： Nghi Phan ,  Craig Cusworth ,  Craig Prater

IPC分类号： G01Q10/00 ,  G01Q20/02 ,  G01Q60/24

CPC分类号： G01Q10/02 ,  G01Q20/02 ,  G01Q30/025

摘要： A high-bandwidth SPM tip scanner is provided that additionally includes an objective that is vertically movable within the scan head to increase the depth of focus for the sensing light beam. Movable optics also are preferably provided to permit targeting of the sensing light beam on the SPM's probe and to permit the sensing light beam to track the probe during scanning. The targeting and tracking permit the impingement of a small sensing light beam spot on the probe under direct visual inspection of focused illumination beam of an optical microscope integrated into the SPM and, as a result, permits the use of a relatively small cantilever with a commensurately small resonant frequency. A high-bandwidth tip scanner constructed in this fashion has a fundamental resonant frequency greater than greater than 500 Hz and a sensing light beam spot minor diameter of less than 10 μm. Images can be scanned on large samples having a largest dimension exceeding 7 mm with a resolution of less than 1 Angstrom and while scanning at rates exceeding 30 Hz.

摘要翻译： 提供了一种高带宽SPM尖端扫描器，其另外包括可在扫描头内垂直移动以增加感测光束的聚焦深度的物镜。 优选地提供可移动光学器件以允许在SPM的探针上瞄准感测光束，并允许感测光束在扫描期间跟踪探针。 瞄准和跟踪允许在直接目视检查集成在SPM中的光学显微镜的聚焦照明光束上的探针上的小感测光束点的撞击，结果允许使用相对较小的悬臂 小谐振频率。 以这种方式构造的高带宽尖端扫描器具有大于500Hz的基本谐振频率和小于10μm的感测光束光点小直径。 可以在尺寸超过7 mm的大样品上扫描图像，分辨率小于1埃，扫描速度超过30赫兹。

公开(公告)号：US20120050718A1

公开(公告)日：2012-03-01

申请号：US13289640

申请日：2011-11-04

申请人： A. Dazzi Dazzi ,  Konstantin Vodopyanov ,  Clotilde Policar ,  M. Reading ,  Kevin Kjoller ,  Craig Prater

发明人： A. Dazzi Dazzi ,  Konstantin Vodopyanov ,  Clotilde Policar ,  M. Reading ,  Kevin Kjoller ,  Craig Prater

IPC分类号： G01J3/00

CPC分类号： G01Q30/02 ,  G01N21/3563 ,  G01Q60/32

摘要： An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Such a technique implemented in a commercially viable analytical instrument would be extremely useful. Various aspects of the experimental set-up have to be changed to create a commercial version. The invention addresses many of these issues thereby producing a version of the analytical technique that cab be made generally available to the scientific community.

摘要翻译： 已经证明了基于AFM的技术用于在样品表面上进行高度局部化的IR光谱。 在商业可行的分析仪器中实施的这种技术将是非常有用的。 必须改变实验设置的各个方面，以创建商业版本。 本发明解决了许多这些问题，从而产生了一般可用于科学界的驾驶室的分析技术的版本。

公开(公告)号：US20110205527A1

公开(公告)日：2011-08-25

申请号：US12927248

申请日：2010-11-09

申请人： Craig Prater ,  Michael Lo ,  Doug Gotthard ,  Anthony Kurtz ,  Kevin Kjoller

发明人： Craig Prater ,  Michael Lo ,  Doug Gotthard ,  Anthony Kurtz ,  Kevin Kjoller

IPC分类号： G01N21/35

CPC分类号： G01N21/3563 ,  G01Q30/02

摘要： Dynamic IR radiation power control, beam steering and focus adjustment for use in a nanoscale IR spectroscopy system based on an Atomic Force Microscope. During illumination with a beam from an IR source, an AFM probe tip interaction with a sample due to local IR sample absorption is monitored. The power of the illumination at the sample is dynamically decreased to minimize sample overheating in locations/wavelengths where absorption is high and increased in locations/wavelengths where absorption is low to maintain signal to noise. Beam alignment and focus optimization as a function of wavelength are automatically performed.

摘要翻译： 动态IR辐射功率控制，光束转向和聚焦调整，用于基于原子力显微镜的纳米级红外光谱系统。 在用来自IR源的光照射期间，监测由于局部IR样品吸收而导致AFM探针尖端与样品的相互作用。 动态地降低样品照度的功率，以使吸收率高的位置/波长处的样品过热度最小化，吸收低的位置/波长增加，以保持信噪比。 自动执行光束对准和聚焦优化作为波长的函数。

公开(公告)号：US20110203357A1

公开(公告)日：2011-08-25

申请号：US12660266

申请日：2010-02-23

申请人： Craig Prater ,  Kevin Kjoller

发明人： Craig Prater ,  Kevin Kjoller

IPC分类号： G01N13/00

CPC分类号： G01Q30/02

摘要： Dynamic IR radiation power control for use in a nanoscale IR spectroscopy system based on an Atomic Force Microscope. During illumination from an IR source, an AFM probe tip interaction with a sample due to local IR sample absorption is monitored. The power of the illumination at the sample is dynamically decreased to minimize sample overheating in locations/wavelengths where absorption is high and increased in locations/wavelengths where absorption is low to maintain signal to noise.

摘要翻译： 动态红外辐射功率控制，用于基于原子力显微镜的纳米级红外光谱系统。 在来自IR源的照射期间，监测由于局部IR样品吸收而导致的AFM探针尖端与样品的相互作用。 动态地降低样品照度的功率，以使吸收率高的位置/波长处的样品过热度最小化，吸收低的位置/波长增加，以保持信噪比。

公开(公告)号：US07617719B2

公开(公告)日：2009-11-17

申请号：US11606695

申请日：2006-11-30

申请人： Chanmin Su ,  Craig Prater ,  Gregory F. Meyers ,  Bryant R. LaFreniere

发明人： Chanmin Su ,  Craig Prater ,  Gregory F. Meyers ,  Bryant R. LaFreniere

IPC分类号： G01B5/28

CPC分类号： G01Q60/32 ,  G01Q30/04

摘要： A method and apparatus for its practice are provided of differentiating at least one component of a heterogeneous sample from other component(s) using harmonic resonance imaging and of obtaining information regarding the sample from the differentiation. In a preferred embodiment, an image is created of a property of a harmonic or a combination of a harmonics producing a response having a contrast factor between the sample's constituent components. The desired harmonic(s) can be identified either in a preliminary data acquisition procedure on the sample or, if the sample's constituent components are known in advance, predetermined. The desired harnonic(s) may be identified directly by the user or automatically through, e.g., pattern recognition. A compositional map may then be generated and displayed and/or additional information about the sample may be obtained.

摘要翻译： 提供了一种用于其实践的方法和装置，其使用谐波共振成像将异质样品的至少一个组分与其他组分区分开，并且从差异化获得关于样品的信息。 在优选实施例中，产生具有谐波特性或谐波的组合的图像，产生具有样品组成成分之间的对比度因子的响应。 可以在样品的初步数据采集程序中识别所需的谐波，或者如果样品的组成成分预先已知，则预先确定。 期望的哈密顿可以由用户直接识别或通过例如模式识别自动识别。 然后可以生成和显示组成图，和/或可以获得关于样本的附加信息。

公开(公告)号：US20080276695A1

公开(公告)日：2008-11-13

申请号：US12119382

申请日：2008-05-12

申请人： Craig Prater ,  Chanmin Su

发明人： Craig Prater ,  Chanmin Su

IPC分类号： G01B5/28

CPC分类号： G01Q60/06 ,  G01N29/0681 ,  G01Q60/32

摘要： A method, and corresponding apparatus, of imaging sub-surface features at a plurality of locations on a sample includes coupling an ultrasonic wave into a sample at a first lateral position. The method then measures the amplitude and phase of ultrasonic energy near the sample with a tip of an atomic force microscope. Next, the method couples an ultrasonic wave into a sample at a second lateral position and the measuring step is repeated for the second lateral position. Overall, the present system and methods achieve high resolution sub-surface mapping of a wide range of samples, including silicon wafers. It is notable that when imaging wafers, backside contamination is minimized.

摘要翻译： 在样本上的多个位置成像子表面特征的方法和相应的装置包括在第一横向位置将超声波耦合到样本中。 然后该方法用原子力显微镜的尖端测量样品附近的超声波能量的振幅和相位。 接下来，该方法在第二横向位置将超声波耦合到样品中，并且对于第二横向位置重复测量步骤。 总体而言，本系统和方法实现了广泛范围样品的高分辨率子表面映射，包括硅晶片。 值得注意的是，当成像晶片时，背面污染被最小化。