公开(公告)号：US20160033550A1

公开(公告)日：2016-02-04

申请号：US14694115

申请日：2015-04-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyun-woo KIM ,  Woo-seok KO ,  Young-hwan KIM ,  Jeong-hoi KIM ,  Baek-man SUNG ,  Hyung-su SON ,  Chae-ho SHIN ,  Yu-sin YANG ,  Jae-youn WI ,  Sang-kil LEE ,  Chung-sam JUN

IPC: G01Q60/40

CPC classification number: G01Q60/40 ,  G01Q70/06

Abstract: A conductive atomic force microscope including a plurality of probe structures each including a probe and a cantilever connected thereto, a power supplier applying a bias voltage, a current detector detecting a first current flowing between a sample object and each of the probes and a second current flowing between a measurement object and each of the probes, and calculating representative currents for the sample and measurement objects based on the first and second currents, respectively, and a controller calculating a ratio between representative currents of the sample object measured by each of the probe structures, calculating a scaling factor for scaling the representative current with respect to the measurement object measured by each of the probes, and determine a reproducible current measurement value based on the second measurement current and the scaling factor may be provided.

Abstract translation: 一种导电原子力显微镜，包括多个探针结构，每个探针结构包括探针和连接到其上的悬臂，施加偏置电压的电源，检测在样品物体和每个探针之间流动的第一电流的电流检测器和第二电流 在测量对象和每个探针之间流动，并且基于第一和第二电流分别计算样本和测量对象的代表性电流，以及控制器，计算由每个探针测量的样本对象的代表性电流之间的比率 计算相对于由每个探针测量的测量对象的代表性电流的缩放因子，并且可以提供基于第二测量电流和缩放因子来确定可重现的电流测量值。

公开(公告)号：US08869602B2

公开(公告)日：2014-10-28

申请号：US13307464

申请日：2011-11-30

Applicant: Mikhail Belkin ,  Feng Lu ,  Vladislav V. Yakolev ,  Craig Prater ,  Kevin Kjoller ,  Markus Raschke

Inventor： Mikhail Belkin ,  Feng Lu ,  Vladislav V. Yakolev ,  Craig Prater ,  Kevin Kjoller ,  Markus Raschke

IPC: G01B5/28 ,  G01Q20/02

CPC classification number: G01Q20/02 ,  G01N21/1717 ,  G01N21/35 ,  G01N21/3581 ,  G01N21/552 ,  G01N2021/1721 ,  G01Q30/02 ,  G01Q60/32 ,  G01Q60/40

Abstract: An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface by using the AFM probe to detect wavelength dependent IR radiation interaction, typically absorption with the sample in the region of the tip. The tip may be configured to produce electric field enhancement when illuminated by a radiation source. This enhancement allows for significantly reduced illumination power levels resulting in improved spatial resolution by confining the sample-radiation interaction to the region of field enhancement which is highly localized to the tip.

Abstract translation: 已经证明了基于AFM的技术，通过使用AFM探针来检测波长相关的IR辐射相互作用（通常在尖端区域中的样品吸收）来在样品表面上进行高度局部化的IR光谱。 尖端可以被配置为当由辐射源照射时产生电场增强。 该增强允许显着降低的照明功率水平，通过将样本 - 辐射相互作用限制在高度定位于尖端的场增强区域上，从而提高了空间分辨率。

公开(公告)号：US08739311B2

公开(公告)日：2014-05-27

申请号：US13816726

申请日：2011-08-11

Applicant: H. Kumar Wickramasinghe ,  Indrajith Rajapaksa

Inventor： H. Kumar Wickramasinghe ,  Indrajith Rajapaksa

IPC: G01Q60/38

CPC classification number: G01Q60/38 ,  G01Q30/02 ,  G01Q60/34 ,  G01Q60/40

Abstract: A new method in microscopy is provided which extends the domain of AFM's to nanoscale spectroscopy. Molecular resonance of nanometer features can be detected and imaged purely by mechanical detection of the force gradient between the interaction of the optically driven molecular dipole/multipole and its mirror image in a Platinum coated scanning probe tip. The method is extendable to obtain nanoscale spectroscopic information ranging from infrared to UV and RF.

Abstract translation: 提供了一种新的显微镜方法，将AFM的领域扩展到纳米级光谱。 纳米特征的分子共振可以通过机械检测在铂涂层扫描探针尖端中光学驱动的分子偶极/多极与其镜像的相互作用之间的力梯度来纯化而被检测和成像。 该方法可扩展，以获得从红外到UV和RF的纳米级光谱信息。

公开(公告)号：US20120192319A1

公开(公告)日：2012-07-26

申请号：US13009990

申请日：2011-01-20

Applicant: Xinxin Li ,  Yongliang Yang

Inventor： Xinxin Li ,  Yongliang Yang

IPC: G01Q60/40

CPC classification number: G01Q60/22 ,  G01Q60/40

Abstract: A microwave probe having a metal tip on the free end of a microcantilever. In one embodiment, a pyramidal pit is isotropically etched in a device wafer of monocrystalline silicon. Oxidation may sharpen the pit. Deposited metal forms the metal tip in the pit and a bottom shield. Other metal sandwiched between equally thick dielectric layers contact the tip and form a conduction path along the cantilever for the probe and detected signals. Further metal forms a top shield overlying the conduction path and the dielectrically isolated tip and having equal thickness to the bottom shield, thus producing together with the symmetric dielectric layers a balanced structure with reduced thermal bending. The device wafer is bonded to a handle wafer. The handle is formed and remaining silicon of the device wafer is removed to release the cantilever.

Abstract translation: 微型探针在微型悬臂梁的自由端上具有金属尖端。 在一个实施例中，在单晶硅的器件晶片中各向同性蚀刻金字塔形凹坑。 氧化可能会削弱坑。 沉积的金属在凹坑中形成金属尖端和底部屏蔽。 夹在同等厚度的电介质层之间的其他金属接触尖端，并形成沿着悬臂的探针和检测信号的导电路径。 另外的金属形成覆盖导电路径和介电隔离尖端的顶部屏蔽，并且具有与底部屏蔽件相等的厚度，从而与对称的电介质层一起产生具有降低的热弯曲的平衡结构。 器件晶片被结合到处理晶片。 形成手柄并移除器件晶片的剩余硅以释放悬臂。

公开(公告)号：US20120167261A1

公开(公告)日：2012-06-28

申请号：US13307464

申请日：2011-11-30

Applicant: Mikhail Belkin ,  Feng Lu ,  Vladislav V. Yakolev ,  Craig Prater ,  Kevin Kjoller

Inventor： Mikhail Belkin ,  Feng Lu ,  Vladislav V. Yakolev ,  Craig Prater ,  Kevin Kjoller

IPC: G01Q70/08

CPC classification number: G01Q20/02 ,  G01N21/1717 ,  G01N21/35 ,  G01N21/3581 ,  G01N21/552 ,  G01N2021/1721 ,  G01Q30/02 ,  G01Q60/32 ,  G01Q60/40

Abstract: An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface by using the AFM probe to detect wavelength dependent IR radiation interaction, typically absorption with the sample in the region of the tip. The tip may be configured to produce electric field enhancement when illuminated by a radiation source. This enhancement allows for significantly reduced illumination power levels resulting in improved spatial resolution by confining the sample-radiation interaction to the region of field enhancement which is highly localized to the tip.

Abstract translation: 已经证明了基于AFM的技术，通过使用AFM探针来检测波长相关的IR辐射相互作用（通常在尖端区域中的样品吸收）来在样品表面上进行高度局部化的IR光谱。 尖端可以被配置为当由辐射源照射时产生电场增强。 该增强允许显着降低的照明功率水平，通过将样本 - 辐射相互作用限制在高度定位于尖端的场增强区域上，从而提高了空间分辨率。

公开(公告)号：US07757544B2

公开(公告)日：2010-07-20

申请号：US11619097

申请日：2007-01-02

Applicant: Lin Huang ,  Chanmin Su

Inventor： Lin Huang ,  Chanmin Su

IPC: G01B5/28

CPC classification number: G01Q20/04 ,  G01Q10/065 ,  G01Q30/06 ,  G01Q30/18 ,  G01Q60/26 ,  G01Q60/30 ,  G01Q60/32 ,  G01Q60/40 ,  G01Q60/48

Abstract: The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) including oscillating a probe of the SPM at a torsional resonance of the probe, and generally simultaneously measuring an electrical property, e.g., a current, capacitance, impedance, etc., between a probe of the SPM and a sample at a separation controlled by the torsional resonance mode. Preferably, the measuring step is performed while using torsional resonance feedback to maintain a set-point of SPM operation.

Abstract translation: 优选实施例涉及一种操作扫描探针显微镜（SPM）的方法和装置，包括在探针的扭转共振下振荡SPM的探针，并且通常同时测量电特性，例如电流，电容，阻抗 等等，在SPM的探针和由扭转共振模式控制的分离的样品之间。 优选地，在使用扭转共振反馈以维持SPM操作的设定点的同时执行测量步骤。

公开(公告)号：US20100115673A1

公开(公告)日：2010-05-06

申请号：US12312705

申请日：2007-11-27

Applicant: Christine Kranz ,  Boris Mizaikoff ,  Wolfgang Schuhmann ,  Kathrin Eckhard

Inventor： Christine Kranz ,  Boris Mizaikoff ,  Wolfgang Schuhmann ,  Kathrin Eckhard

IPC: G01Q60/18 ,  G01Q60/32

CPC classification number: G01Q60/02 ,  G01Q60/40 ,  G01Q60/60

Abstract: Briefly described, embodiments of this disclosure include near-field scanning measurement-alternating current-scanning electrochemical microscopy devices, near-field scanning measurement-alternating current-scanning electrochemical microscopy systems, methods of using near-field scanning measurement-alternating current-scanning electrochemical microscopy, atomic force measurement-alternating current-scanning electrochemical microscopy (AFM-AC-SECM) devices, AFM-AC-SECM systems, methods of using AFM-AC-SECM, and the like.

Abstract translation: 简而言之，本公开的实施例包括近场扫描测量 - 交流电扫描电化学显微镜装置，近场扫描测量 - 交流电扫描电化学显微镜系统，使用近场扫描测量 - 交流电扫描电化学 显微镜，原子力测量 - 交流电扫描电化学显微镜（AFM-AC-SECM）器件，AFM-AC-SECM系统，使用AFM-AC-SECM的方法等。

公开(公告)号：US20090100554A1

公开(公告)日：2009-04-16

申请号：US12281806

申请日：2007-02-28

Applicant: Walter Arnold ,  Kerstin Schwarz ,  Ute Rabe

Inventor： Walter Arnold ,  Kerstin Schwarz ,  Ute Rabe

IPC: G01N13/16

CPC classification number: G01Q60/30 ,  G01Q60/32 ,  G01Q60/40

Abstract: A method is described for determining a dopant concentration on a surface and/or in layer region lying close to the surface of a semiconductor sample using an atomic force microscope, whose leaf-spring tip is brought into contact with the semiconductor sample, forming a Schottky barrier, wherein an electric alternating potential is applied between the spring-leaf tip and the semiconductor sample in the region of the Schottky barrier in such a way that a space charge region inside the semiconductor sample defining the three-dimensional extension of the Schottky barrier is excited and begins to oscillate within the confines of its spatial extension, said oscillations are transmitted to the leaf-spring, are detected and form the basis for determining the dopant concentration.

Abstract translation: 描述了一种用于使用原子力显微镜确定在靠近半导体样品的表面的表面和/或层的区域中的掺杂剂浓度的方法，所述原子力显微镜的板簧尖与半导体样品接触，形成肖特基 阻挡层，其中在所述肖特基势垒区域中的所述弹簧叶尖和所述半导体样品之间施加电交替电位，使得限定所述肖特基势垒的三维延伸的所述半导体样品内的空间电荷区域为 激发并在其空间延伸的范围内开始振荡，所述振荡被传输到板簧，被检测并形成用于确定掺杂剂浓度的基础。

公开(公告)号：US20070020938A1

公开(公告)日：2007-01-25

申请号：US11527492

申请日：2006-09-27

Applicant: Hong-Sik Park ,  Hyun-Jung Shin ,  Ju-Hwan Jung

Inventor： Hong-Sik Park ,  Hyun-Jung Shin ,  Ju-Hwan Jung

IPC: H01L21/302

CPC classification number: G01Q60/40 ,  G11B9/02 ,  G11B9/14 ,  G11B9/1409 ,  G11B9/1418 ,  G11B11/08

Abstract: Provided are a semiconductor probe having a resistive tip, a method of fabricating the semiconductor probe, and a method of recording and reproducing information using the semiconductor probe. The semiconductor probe includes a tip and a cantilever. The tip is doped with first impurities. The cantilever has an end portion on which the tip is positioned. The tip includes a resistive area, and first and second semiconductor electrode areas. The resistive area is positioned at the peak of the tip and lightly doped with second impurities that are different from the first impurities. The first and second semiconductor electrode areas are heavily doped with the second impurities and contact the resistive area.

Abstract translation: 提供了具有电阻尖端的半导体探针，制造半导体探针的方法以及使用半导体探针记录和再现信息的方法。 半导体探头包括尖端和悬臂。 尖端掺杂有第一杂质。 悬臂具有尖端位于其上的端部。 尖端包括电阻区域，以及第一和第二半导体电极区域。 电阻区域位于尖端的峰顶处，并且轻掺杂有与第一杂质不同的第二杂质。 第一和第二半导体电极区域被第二杂质重掺杂并接触电阻区域。

公开(公告)号：US07155964B2

公开(公告)日：2007-01-02

申请号：US11133802

申请日：2005-05-21

Applicant: Lin Huang ,  Chanmin Su

Inventor： Lin Huang ,  Chanmin Su

IPC: G01R29/12

CPC classification number: G01Q20/04 ,  G01Q10/065 ,  G01Q30/06 ,  G01Q30/18 ,  G01Q60/26 ,  G01Q60/30 ,  G01Q60/32 ,  G01Q60/40 ,  G01Q60/48

Abstract: The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) including oscillating a probe of the SPM at a torsional resonance of the probe, and generally simultaneously measuring an electrical property, e.g., a current, capacitance, impedance, etc., between a probe of the SPM and a sample at a separation controlled by the torsional resonance mode. Preferably, the measuring step is performed while using torsional resonance feedback to maintain a set-point of SPM operation.

Abstract translation: 优选实施例涉及一种操作扫描探针显微镜（SPM）的方法和装置，包括在探针的扭转共振下振荡SPM的探针，并且通常同时测量电特性，例如电流，电容，阻抗 等等，在SPM的探针和由扭转共振模式控制的分离的样品之间。 优选地，在使用扭转共振反馈以维持SPM操作的设定点的同时执行测量步骤。