摘要:
Provided are a cell culture compartment unit and an array including the same. The cell culture compartment unit includes: a cell culture region and a bio material emission region including a cell culture fluid, which are separated with a porous membrane therebetween; a piezoelectric device on the porous membrane of the cell culture region; a thin layer for cell attachment being on the piezoelectric device and having at least one surface on which cells are attachable; and a first power supply applying a first electric field to the piezoelectric device.
摘要:
The present invention relates to a method of forming a photosensitive film pattern. It provides a method of forming a photosensitive film pattern capable of performing a photolithography process by blocking an opening of a high aspect ratio trench with a DFR film, during forming a semiconductor element and an MEMS element. In addition, it is possible to prevent the photoresist from flowing into the trench when the liquid photoresist is deposited by a spin coating method to form the photosensitive film pattern for metal pattern to apply electric signal from outside to inside of trench.
摘要:
A multi-step landing micro-mirror, a method for manufacturing the same, and a multi-step landing micro-mirror array are disclosed. The multi-step landing micro-mirror comprises a trench formed in a substrate and having N−1 steps in one side wall thereof; N plates rotated in or on the trench; and 2N springs for connecting the plates to each other; wherein the N plates are composed of an outermost first plate, a second plate connected with the first plate by the spring and located in the first plate, . . . , and a N-th plate connected with a (N−1)-th plate by the spring and located in the (N−1)-th plate, wherein when voltages are applied to the N plates and the trench, respectively, the first plate is subjected to a first landing with a predetermined rotation angle on a first step of the trench due to the constant voltage, the second plate is subjected to a second landing with the predetermined rotation angle on a second step of the trench, . . . , the N-th plate is subjected to a N-th landing with the predetermined rotation angle on the other side wall of the trench. Accordingly, the low voltage driving can be performed by performing the multi-step driving during the electrostatic force is applied, the elastic force of the spring for supporting the mirror can be enhanced, therefore the reliability of the optical switch can be improved.
摘要:
In the present invention, a nanoporous membrane having a columnar structure is manufactured through a deposition technology used in a semiconductor process, and the size of a nanopore is adjusted by etching the lower surface of the manufactured nanoporous membrane or using a seed layer and a nanobead layer so that scaling up is available at a lowered process temperature and the size of the nanopore can be easily adjusted when manufacturing the nanoporous membrane having a columnar structure.
摘要:
A method for measuring the size of microparticles includes: measuring an extinction spectrum of a medium having microparticles dispersed therein; and calculating average size of the microparticles based on the measured extinction spectrum and the Mie scattering theory.
摘要:
A treatment apparatus using proton includes a proton generation unit and a magnet. The proton generation unit projects proton into a tumor site of a patient, and the magnet forms a magnetic field around the patient. The proton conducts a spiral motion due to collision with atom of the tumor site and Lorenz force generated by the magnetic field.
摘要:
Provided are a biochip and a biomaterial detection apparatus. The biochip includes a substrate, a metal layer, and a dielectric layer. The substrate includes a surface having a plurality of acute parts which are formed by first and second inclined planes. The metal layer is formed on at least one of the first and second inclined planes. The dielectric layer is formed on the metal layer, and capture molecules specifically binding to target molecules which are marked with a fluorescent substance are immobilized to a surface of the dielectric layer.
摘要:
Provided are an electric switching device with improved reliability and improved speed characteristics and an electric circuit device having the electric switching device. In the electric switching device, a first area is formed on an insulating substrate, and a second area formed on the insulating substrate such as to be a predetermined apart from the first area. The first and second areas contract or expand depending on the intensity of a laser.