Cell culture compartment unit and array including the same
    41.
    发明授权
    Cell culture compartment unit and array including the same 失效
    细胞培养室单元和包括其的阵列

    公开(公告)号:US08133722B2

    公开(公告)日:2012-03-13

    申请号:US12635682

    申请日:2009-12-10

    IPC分类号: C12M1/12

    CPC分类号: C12M25/02 C12M23/34 C12M35/04

    摘要: Provided are a cell culture compartment unit and an array including the same. The cell culture compartment unit includes: a cell culture region and a bio material emission region including a cell culture fluid, which are separated with a porous membrane therebetween; a piezoelectric device on the porous membrane of the cell culture region; a thin layer for cell attachment being on the piezoelectric device and having at least one surface on which cells are attachable; and a first power supply applying a first electric field to the piezoelectric device.

    摘要翻译: 提供了细胞培养室单元和包括其的阵列。 细胞培养室单元包括:细胞培养区域和包括细胞培养液的生物材料发射区域,其间以多孔膜分离; 在细胞培养区的多孔膜上的压电元件; 用于细胞附着的薄层在压电装置上并且具有可附接细胞的至少一个表面; 以及向压电器件施加第一电场的第一电源。

    Method of forming photosensitive film pattern
    42.
    发明授权
    Method of forming photosensitive film pattern 失效
    形成感光膜图案的方法

    公开(公告)号:US06951708B2

    公开(公告)日:2005-10-04

    申请号:US10704624

    申请日:2003-11-12

    摘要: The present invention relates to a method of forming a photosensitive film pattern. It provides a method of forming a photosensitive film pattern capable of performing a photolithography process by blocking an opening of a high aspect ratio trench with a DFR film, during forming a semiconductor element and an MEMS element. In addition, it is possible to prevent the photoresist from flowing into the trench when the liquid photoresist is deposited by a spin coating method to form the photosensitive film pattern for metal pattern to apply electric signal from outside to inside of trench.

    摘要翻译: 本发明涉及形成感光膜图案的方法。 它提供了一种在形成半导体元件和MEMS元件期间形成能够通过用DFR膜阻挡高纵横比沟槽的开口来进行光刻工艺的感光膜图案的方法。 此外,当通过旋涂方法沉积液态光致抗蚀剂以形成用于金属图案的感光膜图案以从外部到沟槽内部施加电信号时,可以防止光致抗蚀剂流入沟槽。

    Multi-step landing micro-mirror, method for manufacturing the same and multi-step landing micro-mirror array
    43.
    发明授权
    Multi-step landing micro-mirror, method for manufacturing the same and multi-step landing micro-mirror array 有权
    多步登陆微镜,制造相同和多步登陆微镜阵列的方法

    公开(公告)号:US06922270B2

    公开(公告)日:2005-07-26

    申请号:US10735669

    申请日:2003-12-16

    IPC分类号: B81B3/00 G02B26/08

    摘要: A multi-step landing micro-mirror, a method for manufacturing the same, and a multi-step landing micro-mirror array are disclosed. The multi-step landing micro-mirror comprises a trench formed in a substrate and having N−1 steps in one side wall thereof; N plates rotated in or on the trench; and 2N springs for connecting the plates to each other; wherein the N plates are composed of an outermost first plate, a second plate connected with the first plate by the spring and located in the first plate, . . . , and a N-th plate connected with a (N−1)-th plate by the spring and located in the (N−1)-th plate, wherein when voltages are applied to the N plates and the trench, respectively, the first plate is subjected to a first landing with a predetermined rotation angle on a first step of the trench due to the constant voltage, the second plate is subjected to a second landing with the predetermined rotation angle on a second step of the trench, . . . , the N-th plate is subjected to a N-th landing with the predetermined rotation angle on the other side wall of the trench. Accordingly, the low voltage driving can be performed by performing the multi-step driving during the electrostatic force is applied, the elastic force of the spring for supporting the mirror can be enhanced, therefore the reliability of the optical switch can be improved.

    摘要翻译: 公开了一种多步着陆微镜,其制造方法以及多台阶着陆微镜阵列。 多台阶着陆微反射镜包括形成在基板中并在其一个侧壁中具有N-1个台阶的沟槽; N个板在沟槽中或沟槽上旋转; 和2N弹簧,用于将板彼此连接; 其中所述N个板由最外面的第一板,通过弹簧与所述第一板连接并位于所述第一板中的第二板组成。 。 。 以及通过弹簧与第(N-1)板连接并位于(N-1)板中的第N板,其中当分别向N个板和沟槽施加电压时, 第一板由于恒定的电压在沟槽的第一台阶上以预定的旋转角度进行第一次着陆,第二板在沟槽的第二台阶上以预定的旋转角进行第二次着陆。 。 。 第N个板在沟槽的另一个侧壁上以预定的旋转角进行第N次着陆。 因此,通过在施加静电力的同时进行多级驱动,可以进行低压驱动,可以提高用于支撑反射镜的弹簧的弹力,从而可以提高光开关的可靠性。

    Method and apparatus for measuring size of microparticles
    45.
    发明授权
    Method and apparatus for measuring size of microparticles 失效
    用于测量微粒尺寸的方法和装置

    公开(公告)号:US08760646B2

    公开(公告)日:2014-06-24

    申请号:US13289396

    申请日:2011-11-04

    IPC分类号: G01J3/28

    CPC分类号: G01N15/0205

    摘要: A method for measuring the size of microparticles includes: measuring an extinction spectrum of a medium having microparticles dispersed therein; and calculating average size of the microparticles based on the measured extinction spectrum and the Mie scattering theory.

    摘要翻译: 测定微粒尺寸的方法包括:测定其中分散有微粒的介质的消光谱; 并基于测得的消光谱和米氏散射理论计算微粒的平均尺寸。

    Electric switching device and electric circuit device having the same
    48.
    发明授权
    Electric switching device and electric circuit device having the same 失效
    电开关装置及其电路装置

    公开(公告)号:US07038229B2

    公开(公告)日:2006-05-02

    申请号:US10721973

    申请日:2003-11-24

    IPC分类号: H01L47/00

    CPC分类号: G09G3/3648

    摘要: Provided are an electric switching device with improved reliability and improved speed characteristics and an electric circuit device having the electric switching device. In the electric switching device, a first area is formed on an insulating substrate, and a second area formed on the insulating substrate such as to be a predetermined apart from the first area. The first and second areas contract or expand depending on the intensity of a laser.

    摘要翻译: 提供了具有改进的可靠性和改进的速度特性的电开关装置和具有电开关装置的电路装置。 在电开关装置中,第一区域形成在绝缘基板上,第二区域形成在绝缘基板上,以便与第一区域成预定的距离。 根据激光的强度,第一和第二区域收缩或扩大。