公开(公告)号：US06922270B2

公开(公告)日：2005-07-26

申请号：US10735669

申请日：2003-12-16

申请人： Moon Youn Jung ,  Chi Hoon Jun ,  Chang Auck Choi ,  Yun Tae Kim

发明人： Moon Youn Jung ,  Chi Hoon Jun ,  Chang Auck Choi ,  Yun Tae Kim

IPC分类号： B81B3/00 ,  G02B26/08

CPC分类号： G02B26/0841 ,  B81B3/0062 ,  B81B2201/042 ,  Y10S359/904

摘要： A multi-step landing micro-mirror, a method for manufacturing the same, and a multi-step landing micro-mirror array are disclosed. The multi-step landing micro-mirror comprises a trench formed in a substrate and having N−1 steps in one side wall thereof; N plates rotated in or on the trench; and 2N springs for connecting the plates to each other; wherein the N plates are composed of an outermost first plate, a second plate connected with the first plate by the spring and located in the first plate, . . . , and a N-th plate connected with a (N−1)-th plate by the spring and located in the (N−1)-th plate, wherein when voltages are applied to the N plates and the trench, respectively, the first plate is subjected to a first landing with a predetermined rotation angle on a first step of the trench due to the constant voltage, the second plate is subjected to a second landing with the predetermined rotation angle on a second step of the trench, . . . , the N-th plate is subjected to a N-th landing with the predetermined rotation angle on the other side wall of the trench. Accordingly, the low voltage driving can be performed by performing the multi-step driving during the electrostatic force is applied, the elastic force of the spring for supporting the mirror can be enhanced, therefore the reliability of the optical switch can be improved.

摘要翻译： 公开了一种多步着陆微镜，其制造方法以及多台阶着陆微镜阵列。 多台阶着陆微反射镜包括形成在基板中并在其一个侧壁中具有N-1个台阶的沟槽; N个板在沟槽中或沟槽上旋转; 和2N弹簧，用于将板彼此连接; 其中所述N个板由最外面的第一板，通过弹簧与所述第一板连接并位于所述第一板中的第二板组成。 。 。 以及通过弹簧与第（N-1）板连接并位于（N-1）板中的第N板，其中当分别向N个板和沟槽施加电压时， 第一板由于恒定的电压在沟槽的第一台阶上以预定的旋转角度进行第一次着陆，第二板在沟槽的第二台阶上以预定的旋转角进行第二次着陆。 。 。 第N个板在沟槽的另一个侧壁上以预定的旋转角进行第N次着陆。 因此，通过在施加静电力的同时进行多级驱动，可以进行低压驱动，可以提高用于支撑反射镜的弹簧的弹力，从而可以提高光开关的可靠性。

公开(公告)号：US07116863B2

公开(公告)日：2006-10-03

申请号：US10819271

申请日：2004-04-07

申请人： Chang Kyu Kim ,  Myung Lae Lee ,  Chang Auck Choi ,  Chi Hoon Jun ,  Yun Tae Kim

发明人： Chang Kyu Kim ,  Myung Lae Lee ,  Chang Auck Choi ,  Chi Hoon Jun ,  Yun Tae Kim

IPC分类号： G02B6/26

CPC分类号： G02B6/29358 ,  G02B6/29395

摘要： Provided is a wavelength tunable optical filter of a micro-electro-mechanical system (MEMS). The wavelength tunable optical filter comprises two optical fibers or optical waveguides having their optical axes aligned to each other, two lens for collimating light at leading ends of the optical fibers or optical waveguides, two or more mirrors formed on a substrate, thermal actuators supporting at least one of the mirrors, wherein one of the mirrors is actuated by thermal expansion of the actuator. Because all mirrors are formed on a substrate, a manufacturing process is simple and an initial resonance wavelength can be precisely adjusted. Since the thermal expansion is generated by the electrical current directly flowing through the thermal actuators, it can be actuated by a low consumption power. Also, since an electrostatic force is not used to move the mirrors, a sticking phenomenon between the mirrors does not occur, and the wavelength can be tunable in a wide range. Since the planar mirrors are arranged in parallel, the light alignment is easily performed, the line width is constant and the insertion loss is low.

摘要翻译： 提供了微机电系统（MEMS）的波长可调光滤波器。 波长可调光滤波器包括两个光纤或光波导，其光轴彼此对准，用于准直光纤​​或光波导前端的光的两个透镜，形成在基板上的两个或更多个反射镜，支持在 至少一个反射镜，其中一个反射镜由致动器的热膨胀致动。 因为所有的反射镜都形成在基板上，所以制造工艺简单，可以精确调节初始共振波长。 由于热膨胀是由直接流过热致动器的电流产生的，因此可以通过低功耗来致动。 此外，由于不使用静电力来移动反射镜，所以不会发生反射镜之间的粘附现象，并且波长可以在宽范围内可调。 由于平面镜平行配置，因此容易进行光对准，线宽恒定，插入损耗低。

公开(公告)号：US07209608B2

公开(公告)日：2007-04-24

申请号：US10923838

申请日：2004-08-24

申请人： Chang Kyu Kim ,  Myung Lae Lee ,  Chi Hoon Jun ,  Chang Auck Choi ,  Yun Tae Kim

发明人： Chang Kyu Kim ,  Myung Lae Lee ,  Chi Hoon Jun ,  Chang Auck Choi ,  Yun Tae Kim

IPC分类号： G02B6/28 ,  G02B6/36 ,  G02B27/00 ,  G02B1/10 ,  G02B5/28

CPC分类号： G02B26/001 ,  G02B2006/12109

摘要： Provided is a Fabry-Perot type wavelength tunable optical filter, comprising a first mirror; a second mirror located over the first mirror; a driving body located over the first mirror, and having both ends fixed to the first mirror through a spacer; a plurality of electrodes, each formed on both ends of the driving body; a rod structure connecting a center of the driving body and the second mirror; a plurality of fixing means, each fixed to the first mirror at both sides of the rod structure through the spacer; and a plurality of elastic bodies connecting the rod structure with the plurality of fixing means and acting as a rotational axis. And the mirror is driven by the rod structure acting as a lever that has an elastic body as a rotational axis, when warping is generated by electro-thermal expansion, electromagnetic force or external force. Thereby the mirror can be driven in the larger wavelength tunable range and the low power consumption.

摘要翻译： 提供了一种法布里 - 珀罗型波长可调谐滤光器，包括第一反射镜; 位于第一镜上的第二镜; 位于所述第一反射镜上方的驱动体，并且其两端通过间隔件固定到所述第一反射镜; 多个电极，各自形成在所述驱动体的两端; 连接驱动体的中心和第二反射镜的杆结构; 多个固定装置，每个固定装置通过间隔件固定到杆结构的两侧的第一反射镜; 以及多个弹性体，其将所述杆结构与所述多个固定装置连接并用作旋转轴线。 并且当由作为电热膨胀，电磁力或外力产生翘曲时，作为具有弹性体作为旋转轴的杠杆的杆结构驱动反射镜。 从而可以在更大的波长可调范围和低功耗范围内驱动反射镜。

公开(公告)号：US06342427B1

公开(公告)日：2002-01-29

申请号：US09473968

申请日：1999-12-29

申请人： Chang Auck Choi ,  Chi Hoon Jun ,  Won Ick Jang ,  Yun Tae Kim

发明人： Chang Auck Choi ,  Chi Hoon Jun ,  Won Ick Jang ,  Yun Tae Kim

IPC分类号： H01L2100

CPC分类号： B81C1/00047 ,  B81B2203/033 ,  B81C2201/0133 ,  B81C2201/0178 ,  B81C2203/0136

摘要： A method for forming a micro cavity is disclosed. In the method for forming the cavity, a first layer is formed on a silicon layer and a trench is formed in the silicon layer by selectively etching the silicon layer. A second and a third layers are formed on the trench and on the silicon layer. Etching holes are formed through the third layer by partially etching the third layer. A cavity is formed between the silicon layer and the third layer after the second layer is removed through the etching holes. Therefore, the cavity having a large size can be easily formed and sealed in the silicon layer by utilizing the volume expansion of the silicon or the poly silicon layer. Also, a vacuum micro cavity can be formed according as a low vacuum CVD oxide layer or a nitride layer formed on the etching holes which are partially opened after the thermal oxidation process by controlling the size of the etching holes concerning the other portion of the poly silicon layer.

摘要翻译： 公开了一种用于形成微腔的方法。 在形成空腔的方法中，在硅层上形成第一层，并且通过选择性地蚀刻硅层，在硅层中形成沟槽。 在沟槽和硅层上形成第二和第三层。 通过部分地蚀刻第三层，通过第三层形成蚀刻孔。 在通过蚀刻孔除去第二层之后，在硅层和第三层之间形成空穴。 因此，通过利用硅或多晶硅层的体积膨胀，可以容易地在硅层中形成并密封具有大尺寸的空腔。 此外，可以根据在热氧化处理后部分打开的蚀刻孔上形成的低真空CVD氧化物层或氮化物层，通过控制与聚合物的其它部分相关的蚀刻孔的尺寸，形成真空微腔 硅层。

公开(公告)号：US07362387B2

公开(公告)日：2008-04-22

申请号：US11299111

申请日：2005-12-08

申请人： Moon Youn Jung ,  Hae Sik Yang ,  Chi Hoon Jun ,  Yun Tae Kim ,  Young Shin Kim ,  Dong Ho Shin

发明人： Moon Youn Jung ,  Hae Sik Yang ,  Chi Hoon Jun ,  Yun Tae Kim ,  Young Shin Kim ,  Dong Ho Shin

IPC分类号： G02F1/13

CPC分类号： B01J19/0046 ,  B01J2219/00434 ,  B01J2219/00527 ,  B01J2219/00529 ,  B01J2219/00596 ,  B01J2219/00605 ,  B01J2219/00608 ,  B01J2219/00659 ,  B01J2219/00675 ,  B01J2219/00677 ,  B01J2219/00689 ,  B01J2219/00711 ,  B01J2219/00722 ,  B82Y30/00 ,  C40B40/06 ,  C40B60/14 ,  G02F1/133528 ,  G02F1/13454 ,  G02F1/13725 ,  G02F1/216 ,  G02F2203/12 ,  G03F7/70291 ,  G03F7/7035 ,  H01L27/146

摘要： A programmable mask used in a photolithography process for fabricating a biomolecule array and a method for fabricating a biomolecule array using the same are disclosed. Particularly, a TFT-LCD type programmable mask for selectively transmitting incident light in accordance with an electrical signal applied thereto and a method for fabricating a biomolecule array using the same are provided. The ultraviolet light is selectively illuminated to a sample substrate so that the biomolecule array having high density can be fabricated.

摘要翻译： 公开了用于制造生物分子阵列的光刻工艺中使用的可编程掩模和使用其的生物分子阵列的制造方法。 特别地，提供了根据施加到其上的电信号选择性地透射入射光的TFT-LCD型可编程掩模和使用其的制造生物分子阵列的方法。 紫外光被选择性地照射到样品基底上，使得可以制造具有高密度的生物分子阵列。

公开(公告)号：US07038229B2

公开(公告)日：2006-05-02

申请号：US10721973

申请日：2003-11-24

申请人： Moon Youn Jung ,  Chi Hoon Jun ,  Yun Tae Kim

发明人： Moon Youn Jung ,  Chi Hoon Jun ,  Yun Tae Kim

IPC分类号： H01L47/00

CPC分类号： G09G3/3648

摘要： Provided are an electric switching device with improved reliability and improved speed characteristics and an electric circuit device having the electric switching device. In the electric switching device, a first area is formed on an insulating substrate, and a second area formed on the insulating substrate such as to be a predetermined apart from the first area. The first and second areas contract or expand depending on the intensity of a laser.

摘要翻译： 提供了具有改进的可靠性和改进的速度特性的电开关装置和具有电开关装置的电路装置。 在电开关装置中，第一区域形成在绝缘基板上，第二区域形成在绝缘基板上，以便与第一区域成预定的距离。 根据激光的强度，第一和第二区域收缩或扩大。

公开(公告)号：US07012752B2

公开(公告)日：2006-03-14

申请号：US11045554

申请日：2005-01-27

申请人： Chang Auck Choi ,  Myung Lae Lee ,  Chang Kyu Kim ,  Chi Hoon Jun ,  Youn Tae Kim

发明人： Chang Auck Choi ,  Myung Lae Lee ,  Chang Kyu Kim ,  Chi Hoon Jun ,  Youn Tae Kim

IPC分类号： G02B27/00

CPC分类号： G02B26/001 ,  G01J3/26 ,  G02B5/0833 ,  G02B6/29361 ,  G02B6/29389 ,  G02B6/29395

摘要： An active type tunable wavelength optical filter having a Fabry-Perot structure is disclosed. A tunable wavelength optical filter which comprises a lower mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion; an upper mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion and which is spaced away from the lower mirror by a predetermined distance; a connecting means for connecting and supporting the lower mirror and the upper mirror to a semiconductor substrate; and electrode pads for controlling the gap between the lower mirror and the upper mirror by an electrostatic force and the method of manufacturing the same are provided. Thereby, by finely driving the upper and lower mirrors composed of a multi-layer structure of the silicon film and the oxide film by the electrostatic force, the wavelength of the transmitted light with respect to the incident light can be selectively sent.

摘要翻译： 公开了一种具有法布里 - 珀罗结构的有源型可调谐波长滤光器。 一种可调波长滤光器，包括下反射镜，其中硅膜和氧化物膜顺次层叠在多层中，并且硅膜层压在最高部分上; 其中硅膜和氧化物膜顺次层叠在多层中并且硅膜层压在最高部分上并且与下反射镜间隔预定距离的上反射镜; 用于将下反射镜和上反射镜连接和支撑到半导体基板的连接装置; 以及用于通过静电力控制下反射镜和上反射镜之间的间隙的电极焊盘及其制造方法。 由此，通过利用静电力微细地驱动由硅膜和氧化膜构成的上反射镜和下反射镜，可以选择性地发送透射光相对于入射光的波长。

公开(公告)号：US08047074B2

公开(公告)日：2011-11-01

申请号：US12617701

申请日：2009-11-12

申请人： Chi Hoon Jun ,  Sang Choon Ko ,  Chang Auck Choi ,  Byoung Gon Yu

发明人： Chi Hoon Jun ,  Sang Choon Ko ,  Chang Auck Choi ,  Byoung Gon Yu

IPC分类号： G01N27/12

CPC分类号： G01N27/121

摘要： Provided are a humidity sensor and a method of manufacturing the same. The humidity sensor has high sensitivity, quick response time, improved temperature characteristics, low hysteresis and excellent durability. Moreover, for the humidity sensor, a humidity sensitive layer may be formed of various materials. The humidity sensor may be manufactured in a small size on a large scale.The humidity sensor includes a substrate, an open cavity with an open upper portion formed to have a depth and a width in the substrate, a plurality of electrode pads formed on the substrate, a heater connected to one pad of the electrode pads at one end, and connected to another pad of the electrode pads at the other end to be suspended over the open cavity, a plurality of sensing electrodes formed on the same plane as the heater, and suspended over the open cavity to output a sensed signal to the electrode pads, a humidity sensitive layer formed on the heater and the sensing electrodes, suspended over the open cavity, and changed in characteristic according to the humidity, and an ambient temperature measurement part configured to measure the temperature around the humidity sensor, wherein the temperature is used as a reference temperature to control a heating temperature of the heater.

摘要翻译： 提供了一种湿度传感器及其制造方法。 湿度传感器灵敏度高，响应时间快，温度特性好，滞后小，耐久性好。 此外，对于湿度传感器，湿度敏感层可以由各种材料形成。 湿度传感器可以大规模制造。 湿度传感器包括基底，具有形成为在基底中具有深度和宽度的敞开上部的开口腔，形成在基底上的多个电极垫，一端连接到电极垫的一个垫 并且在另一端连接到电极焊盘的另一焊盘以悬挂在开放空腔上，多个感测电极形成在与加热器相同的平面上，并且悬挂在开放空腔上以将感测到的信号输出到电极 衬垫，形成在加热器上的湿度敏感层和悬挂在开放空腔上的感测电极，并且根据湿度改变特性;以及环境温度测量部件，被配置为测量湿度传感器周围的温度，其中温度为 用作参考温度来控制加热器的加热温度。

公开(公告)号：USRE44356E1

公开(公告)日：2013-07-09

申请号：US12828908

申请日：2010-07-01

申请人： Chang Auck Choi ,  Myung Lae Lee ,  Chang Kyu Kim ,  Chi Hoon Jun ,  Youn Tae Kim

发明人： Chang Auck Choi ,  Myung Lae Lee ,  Chang Kyu Kim ,  Chi Hoon Jun ,  Youn Tae Kim

IPC分类号： H01L21/302 ,  B29D11/00

CPC分类号： G02B26/001 ,  G01J3/26 ,  G02B5/0833 ,  G02B6/29361 ,  G02B6/29389 ,  G02B6/29395

摘要： A method of manufacturing a tunable wavelength optical filter. The method includes steps of forming a first sacrificial oxide film for floating a lower mirror on a semiconductor substrate; sequentially laminating conductive silicon films and oxide films for defining a mirror region on the first sacrificial oxide film in a multi-layer and laminating another conductive silicon film to form a lower mirror; sequentially laminating conductive silicon films and oxide films for defining the mirror region on a second sacrificial oxide film in a multi-layer and laminating another conductive silicon film to form an upper mirror and forming an optical tuning space between the lower mirror and the upper mirror and etching the first sacrificial oxide film and the second sacrificial oxide film such that the lower mirror is floated on the semiconductor substrate.

摘要翻译： 一种可调波长光学滤波器的制造方法。 该方法包括以下步骤：在半导体衬底上形成用于浮置下反射镜的第一牺牲氧化膜; 依次层叠导电硅膜和用于在多层中在第一牺牲氧化膜上限定反射镜区域的氧化物膜，并层叠另一导电硅膜以形成下反射镜; 依次层叠导电硅膜和用于在多层中的第二牺牲氧化膜上限定反射镜区域的氧化物膜，并层叠另一导电硅膜以形成上反射镜并在下反​​射镜和上反射镜之间形成光学调谐空间，以及 蚀刻第一牺牲氧化物膜和第二牺牲氧化物膜，使得下反射镜浮在半导体衬底上。

公开(公告)号：US20100132467A1

公开(公告)日：2010-06-03

申请号：US12509360

申请日：2009-07-24

申请人： Sang Choon Ko ,  Chi Hoon Jun ,  Byoung Gon Yu ,  Chang Auck Choi

发明人： Sang Choon Ko ,  Chi Hoon Jun ,  Byoung Gon Yu ,  Chang Auck Choi

IPC分类号： G01P15/125 ,  H01L21/306

CPC分类号： G01P15/0802 ,  G01H11/06 ,  G01P1/023 ,  G01P15/125 ,  H04R19/005

摘要： Provided is a high-sensitivity MEMS-type z-axis vibration sensor, which may sense z-axis vibration by differentially shifting an electric capacitance between a doped upper silicon layer and an upper electrode from positive to negative or vice versa when center mass of a doped polysilicon layer is moved due to z-axis vibration. Particularly, since a part of the doped upper silicon layer is additionally connected to the center mass of the doped polysilicon layer, and thus an error made by the center mass of the doped polysilicon layer is minimized, it may sensitively respond to weak vibration of low frequency such as seismic waves. Accordingly, since the high-sensitivity MEMS-type z-axis vibration sensor sensitively responds to a small amount of vibration in a low frequency band, it can be applied to a seismograph sensing seismic waves of low frequency which have a very small amount of vibration and a low vibration speed. Moreover, since the high-sensitivity MEMS-type z-axis vibration sensor has a higher vibration sensibility than MEMS-type z-axis vibration sensor of the same size, it can be useful in electronic devices which are gradually decreasing in size.

摘要翻译： 提供了一种高灵敏度的MEMS型z轴振动传感器，其可以通过将掺杂的上硅层和上电极之间的电容从正向或者反向偏移来感测z轴振动，当中心质量为 掺杂多晶硅层由于z轴振动而移动。 特别地，由于掺杂的上硅层的一部分另外连接到掺杂多晶硅层的中心质量块，因此由掺杂多晶硅层的中心质量造成的误差最小化，可以敏感地响应低的振动弱 频率如地震波。 因此，由于高灵敏度的MEMS型z轴振动传感器对低频带中的少量振动敏感地作出响应，因此可以应用于地震仪中，以便感测具有极小振动频率的低频地震波 和低振动速度。 此外，由于高灵敏度的MEMS型z轴振动传感器具有比相同尺寸的MEMS型z轴振动传感器更高的振动灵敏度，所以在逐渐减小的电子设备中是有用的。