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公开(公告)号：US4367429A
公开(公告)日：1983-01-04
申请号：US203294
申请日：1980-11-03
CPC分类号： H01J27/26 , H01J37/08 , H01J2237/0805
摘要： Alloys suitable for use in liquid metal field ionization ion sources are provided. Such sources include an anode electrode for supporting an ion emitter comprising an alloy in the liquid state. The source further comprises means for generating an ionizing electric field and a reservoir for the liquid metal, ions of which are to be emitted by the source.The alloys are selected from the group consisting of (a) metal-metalloid alloys comprising about 10 to 30 atom percent of at least one metalloid element, the balance at least one transition metal element, (b) early transition-late transition alloys comprising about 30 to 85 atom percent of at least one early transition metal, the balance at least one late transition metal, and (c) Group II alloys comprising about 35 to 80 atom percent of at least one Group II element, the balance at least one metal element.Ions generated in liquid metal ion sources form a high brightness ion beam, which permits focusing a beam of emitted ions to a submicrometer spot. The ions may be used to alter material properties by ion implantation such as to dope semiconductors, to form ohmic contacts, to improve wear and corrosion resistance in metal surfaces and by sputter etching thin films such as metals, dielectrics and semiconductors.
摘要翻译： 提供了适用于液态金属场离子源的合金。 这种源包括用于支撑包含处于液态的合金的离子发射体的阳极。 该源还包括用于产生电离电场的装置和用于液体金属的储存器，其离子将由源发射。 合金选自（a）包含约10至30原子％的至少一种准金属元素的金属 - 类金属合金，余量至少一种过渡金属元素，（b）早期过渡 - 后转变合金，其包含约 30至85原子％的至少一种早期过渡金属，余量至少一种后过渡金属，和（c）包含约35至80原子％的至少一种II族元素的II族合金，余量至少一种金属 元件。 在液态金属离子源中产生的离子形成高亮度离子束，其允许将发射的离子束聚焦到亚微米点。 离子可用于通过离子注入来改变材料性质，例如掺杂半导体，以形成欧姆接触，以改善金属表面的耐磨性和耐腐蚀性，并通过溅射蚀刻诸如金属，电介质和半导体的薄膜。
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公开(公告)号：US4262995A
公开(公告)日：1981-04-21
申请号：US17625
申请日：1979-03-05
申请人： Gregory L. Tangonan
发明人： Gregory L. Tangonan
CPC分类号： G02B6/2808
摘要： The specification describes a new and improved optical coupler which comprises (1) a substrate which is adapted to receive and reflect light, having formed therein and adjacent the major (or top) surface of the substrate an optical waveguiding structure comprising three interconnected light confining and propagating sections and (2) a light-reflecting or light-transmitting means. The first section of the waveguiding structure comprises a plurality of spaced-apart optical channel waveguides, each of which extends to a first minor surface of the substrate [which is perpendicular to the major (or top) surface of the substrate]. The second section of the waveguiding structure comprises a plurality of horn-shaped, tapered wave transition sections or regions which extend integrally from the channel waveguides and which are adjacently joined to each other at common points to form a multiple side-by-side horn-like configuration. The third section of the waveguiding structure comprises a wave-mixing section which is integral at one end thereof with the tapered wave transition sections or regions and which extends at the other end thereof to a second minor surface (or transmissive plane) of the substrate. In addition, at the second minor surface or transmissive plane of the substrate there may be provided a means for transmitting or reflecting light which is propagated thereto by the wave-mixing section. The tapered geometry of the wave transition sections enhances the optical coupling efficiency between the plurality of channel waveguides and the wave-mixing section.
摘要翻译： 该说明书描述了一种新的和改进的光耦合器，其包括（1）适于接收和反射光的衬底，该衬底已经在其中形成并邻近衬底的主（或顶部）表面，光波导结构包括三个互连的光限制和 传播部分和（2）光反射或透光装置。 波导结构的第一部分包括多个间隔开的光学通道波导，每个光通道波导延伸到基板的第一次表面（其垂直于基板的主要（或顶部）表面）。 波导结构的第二部分包括多个喇叭形的锥形波形过渡部分或区域，其从通道波导一体地延伸，并且在公共点处彼此相邻地接合以形成多个并排的喇叭形状， 像配置 波导结构的第三部分包括波形混合部分，该波形混合部分的一端与锥形波形过渡部分或区域成一体，并且在其另一端延伸到衬底的第二次表面（或透射平面）。 此外，在基板的第二次表面或透射平面处，可以设置用于透射或反射由波混合部分传播到其中的光的装置。 波过渡部分的锥形几何增强了多个通道波导与波混合部分之间的光耦合效率。
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