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公开(公告)号：US20100033255A1
公开(公告)日：2010-02-11
申请号：US12484878
申请日：2009-06-15
申请人： Jennifer S. Strabley , Daniel W. Youngner , Thomas Ohnstein , Douglas P. Mortenson , Terry D. Stark , Alan B. Touchberry , Bernard Fritz , William Platt , Delmer L. Smith
发明人： Jennifer S. Strabley , Daniel W. Youngner , Thomas Ohnstein , Douglas P. Mortenson , Terry D. Stark , Alan B. Touchberry , Bernard Fritz , William Platt , Delmer L. Smith
IPC分类号： H03B17/00
CPC分类号： G04F5/14
摘要： A physic package for an atomic clock comprising: a block made of optical glass, a glass ceramic material or another suitable material that includes a plurality of faces on its exterior and a plurality of angled borings that serve as a vacuum chamber cavity, light paths and measurement bores; mirrors fixedly attached using a vacuum tight seal to the exterior of the block at certain locations where two light paths intersect; optically clear windows fixedly attached using a vacuum tight seal to the block's exterior over openings of the measurement bores and at one location where two light paths intersect; and fill tubes fixedly attached using a vacuum tight seal to the exterior of the block over the ends of the vacuum chamber cavity. This physics package design makes possible atomic clocks having reduced size and power consumption and capable of maintaining an ultra-high vacuum without active pumping.
摘要翻译： 一种用于原子钟的物理包，包括：由光学玻璃制成的块，玻璃陶瓷材料或在其外部包括多个面的另外合适的材料，以及用作真空室腔的多个倾斜钻孔，光路和 测量孔; 镜子在两个光路相交的某些位置使用真空密封密封固定到块体的外部; 在测量孔的开口处和两个光路相交的一个位置处，使用真空密封密封到模块外部的光学透明窗口; 并且在真空室腔的端部上使用真空密封密封将固定连接的管填充到块的外部。 这种物理封装设计使得可能的原子钟具有减小的尺寸和功率消耗，并且能够在没有主动泵送的情况下保持超高真空。
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公开(公告)号：US07589329B1
公开(公告)日：2009-09-15
申请号：US12108446
申请日：2008-04-23
申请人： Daniel W. Youngner
发明人： Daniel W. Youngner
IPC分类号： G01N21/64
CPC分类号： G01L9/002 , G01N2201/06193
摘要： An optical-based sensor system that detects emitted light. An exemplary embodiment of an optical-based sensor has a substrate with a surface and an internal region; a shell disposed above the substrate surface, the shell operable to receive incident light characterized by a first wavelength; a beam disposed below the shell; a photodiode on the substrate surface below the beam, and in response to receiving a first portion of the incident light, the photodiode is operable to generate a charge such that a motion is induced to resonate at a resonate frequency; and a phosphor in the substrate internal region and operable to receive a second portion of the incident light, the phosphor further operable to emit light characterized by at least one second wavelength that is different from the first wavelength of the incident light, the phosphor emitted light transmitted through the photodiode, the beam, and the shell.
摘要翻译： 一种检测发射光的光学传感器系统。 光学传感器的示例性实施例具有具有表面和内部区域的基板; 壳体，其设置在所述衬底表面上方，所述壳体可操作以接收以第一波长为特征的入射光; 设置在壳体下方的梁; 在光束下面的衬底表面上的光电二极管，并且响应于接收到入射光的第一部分，光电二极管可操作地产生电荷，使得运动被感应为谐振频率谐振; 以及在所述基板内部区域中的荧光体，并且可操作以接收所述入射光的第二部分，所述荧光体还可操作以发射特征在于与所述入射光的第一波长不同的至少一个第二波长的光，所述荧光体发射光 透过光电二极管，光束和外壳。
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公开(公告)号：US20080296257A1
公开(公告)日：2008-12-04
申请号：US11164445
申请日：2005-11-22
申请人： Daniel W. Youngner , Son T. Lu
发明人： Daniel W. Youngner , Son T. Lu
CPC分类号： B81B7/0067
摘要： Miniature optically transparent windows are disclosed that extend vertically from a plane, which may be used to transmit light traveling in a direction substantially parallel with the plane. In one illustrative embodiment, a method for forming such miniature optically transparent windows includes: providing a substrate having a first surface and an opposing second surface, the substrate having a first layer and an adjacent second layer; forming a recess in the first layer of the substrate, the recess extending to the second layer; providing an optically transparent material in the recess to form an optically transparent feature; and removing at least a portion of the first layer that extends adjacent the optically transparent feature so that light can pass through the optically transparent feature in a direction that is substantially parallel to the first surface of the substrate.
摘要翻译： 公开了一种从平面垂直延伸的微型光学透明窗，该平面可用于透射在与该平面基本平行的方向上行进的光。 在一个说明性实施例中，用于形成这种微型光学透明窗的方法包括：提供具有第一表面和相对的第二表面的基底，所述基底具有第一层和相邻的第二层; 在所述基板的第一层中形成凹部，所述凹部延伸到所述第二层; 在所述凹部中提供光学透明材料以形成光学透明特征; 以及去除邻近所述光学透明特征延伸的所述第一层的至少一部分，使得光可以在基本上平行于所述衬底的第一表面的方向上穿过所述光学透明特征。
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公开(公告)号：US07189934B2
公开(公告)日：2007-03-13
申请号：US10749255
申请日：2003-12-31
申请人： Daniel W. Youngner
发明人： Daniel W. Youngner
IPC分类号： H01H29/00
CPC分类号： H01H29/00 , H01H29/06 , H01H59/0009 , H01H2029/008
摘要： A self-healing liquid contact switch and methods for producing such devices are disclosed. An illustrative self-healing liquid contact switch can include an upper actuating surface and a lower actuating surface each having a number of liquid contact regions thereon configured to wet with a liquid metal. The upper and lower actuating surfaces can be brought together electrostatically by an upper and lower actuating electrode. During operation, the liquid metal can be configured to automatically rearrange during each actuating cycle to permit the switch to self-heal.
摘要翻译： 公开了一种自愈式液体接触开关及其制造方法。 说明性自修复液体接触开关可以包括上致动表面和下致动表面，每个上致动表面和下致动表面上都具有多个液体接触区域，其上配置为用液态金属润湿。 上下致动表面可以通过上和下致动电极静电地组合在一起。 在操作期间，液态金属可以配置成在每个致动循环期间自动重新排列，以允许开关自愈。
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公开(公告)号：US07000477B2
公开(公告)日：2006-02-21
申请号：US10884292
申请日：2004-07-02
申请人： Daniel W. Youngner , Son Thai Lu
发明人： Daniel W. Youngner , Son Thai Lu
CPC分类号： G01L9/002
摘要： A pressure sensor is formed on a substrate, the surface of the substrate having a p-n junction and a shell with a beam inside the shell over the p-n junction. The beam and the shell and the p-n junction surface form optical Fabry-Pérot cavities. An optical fiber is positioned in a hole formed in the underside of the substrate below the p-n junction. Light from the fiber charges the p-n junction and drives it into vibration mode. Pressure changes change the tension in the diaphram to vary the frequency with changes in pressure, so that pressure can be detected.
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公开(公告)号：US06246305B1
公开(公告)日：2001-06-12
申请号：US09456107
申请日：1999-12-07
IPC分类号： H01F5122
CPC分类号： H01H36/00 , H01H1/0036 , H01H2036/0093
摘要： A micromechanical switch and a method for operating the micromechanical switch between an open position and a closed position by moving a magnet between two positions. The magnet produces a magnetic flux that travels through a magnetically conductive layer. The magnetic flux within the magnetically conductive layer forcibly draws a contact element into contact with an electrically conductive layer and electrically shorts the open electrical contacts.
摘要翻译： 一种微机电开关和一种通过在两个位置之间移动磁体来操作微机械开关在打开位置和闭合位置之间的方法。 磁体产生穿过导磁层的磁通量。 导磁层内的磁通量强制地将接触元件与导电层接触并使开放的电触点电短路。
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公开(公告)号：US5959338A
公开(公告)日：1999-09-28
申请号：US999420
申请日：1997-12-29
CPC分类号： H01H59/0009 , H01H1/66 , H01H9/42
摘要： A relay device build using MEMS technology and having a semiconductor wafer base with a surface depression having a first electrically conductive surface pattern. A lower diaphragm is moveably positioned above the depression for contact and has a second electrically conductive surface pattern thereon. An upper diaphragm is positioned above the lower diaphragm, with a central electrode mounted between them to selectively attract and move a diaphragm upon application of voltage. A post connects the upper and lower diaphragms to move a diaphragm when the other is moved electrostatically. The diaphragms define a sealed region enclosing the central electrode. The surface patterns may be tapered at their perimiters to provide a contact contour allowing gradually increasing contact as the diaphragm moves toward the surface. The preferred wafer is a silicon wafer, and the diaphragms are polysilicon. The patterns are formed from highly conductive material like gold, while the outer regions are a high resistive, chemically stable material like CrsiN. The sealed region is evacuated to have a vacuum, or may be filed with an inert gas. In a preferrred embodiment, the sealed region is filled with a fluid having a measurable viscosity, and region is adapted to move the fluid upon electrostatic movement of the diaphragm, such that the viscosity of the fluid is selected to adjust the rate of movement of the diaphragm.
摘要翻译： 一种使用MEMS技术构建并具有具有第一导电表面图案的具有表面凹陷的半导体晶片基座的中继装置。 下隔膜可移动地定位在凹部上方用于接触，并且在其上具有第二导电表面图案。 上隔膜位于下隔膜的上方，中心电极安装在它们之间，以在施加电压时选择性地吸引和移动隔膜。 当另一个静电移动时，柱连接上隔膜和下隔膜以移动隔膜。 膜片限定了封闭中心电极的密封区域。 表面图案可以在它们的定位器处变细，以提供接触轮廓，允许当隔膜向表面移动时逐渐增加接触。 优选的晶片是硅晶片，并且所述隔膜是多晶硅。 这些图案由诸如金的高导电材料形成，而外部区域是诸如CrsiN的高电阻，化学稳定的材料。 密封区域被抽空以具有真空，或者可以用惰性气体填充。 在优选的实施例中，密封区域填充有具有可测量粘度的流体，并且区域适于在隔膜的静电运动时移动流体，使得选择流体的粘度以调节流体的速度 隔膜
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公开(公告)号：US5280894A
公开(公告)日：1994-01-25
申请号：US954449
申请日：1992-09-30
CPC分类号： H01L21/67069 , Y10S269/903
摘要： A fixture which includes a lower base for supporting and protecting the front surface of a semiconductor wafer and a clamp. The lower base has an upper end having a central surface portion recessed from a peripheral surface portion for supporting by means of an O ring the peripheral portion of the front surface of the wafer. The clamp rests on a peripheral portion of the back surface of the wafer with the remaining back surface exposed to the backside etching process. A pin and hole arrangement help align the clamp to the base. Holes in the base equalize pressure on both sides of the wafer.
摘要翻译： 一种夹具，其包括用于支撑和保护半导体晶片的前表面的下基座和夹具。 下基部具有上表面部分，该中心表面部分从外周表面部分凹陷，用于通过O形环支撑晶片前表面的周边部分。 夹具搁置在晶片的背面的周边部分，其余的后表面暴露于背面蚀刻工艺。 销和孔布置有助于将夹具对准基座。 基座中的孔平衡晶片两侧的压力。
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