X-ray source and X-ray lithography method
    41.
    发明授权
    X-ray source and X-ray lithography method 失效
    X射线源和X射线光刻法

    公开(公告)号:US4635282A

    公开(公告)日:1987-01-06

    申请号:US699402

    申请日:1985-02-07

    摘要: A gas injection type plasma X-ray source has a gas plenum for storing a discharging gas at a pressure in the range of 150 Torr and 1000 Torr, the stored gas being injected between a pair of electrodes through a gas valve. The electrodes are opposed to each other in a vacuum vessel, so that a gas jet for the production of a plasma is formed. A voltage is applied between the electrodes, so that a discharge plasma is produced between said electrodes. A linear plasma with a high temperature and a high density is produced by the pinch of the plasma due to its own magnetic field produced by the current flowing through the plasma, so that X-rays are emitted from the linear plasma. The X-ray source has a high conversion efficiency and a high discharge timing margin, and accordingly the stability and reproducibility of discharges are improved and the X-ray output is increased.

    摘要翻译: 气体注入型等离子体X射线源具有用于储存在150乇和1000乇范围内的压力下的放电气体的气体增压室,所述储存气体通过气阀注入一对电极之间。 电极在真空容器中彼此相对,从而形成用于产生等离子体的气体射流。 在电极之间施加电压,使得在所述电极之间产生放电等离子体。 由于其自身通过流过等离子体的电流产生的磁场,由于等离子体的夹紧而产生具有高温和高密度的线性等离子体,从而从线性等离子体发射X射线。 X射线源具有高转换效率和高放电时间裕度,因此放电的稳定性和再现性得到改善,并且X射线输出增加。

    Method and apparatus for directionally solidified casting
    43.
    发明授权
    Method and apparatus for directionally solidified casting 失效
    定向凝固铸造的方法和装置

    公开(公告)号:US06868893B2

    公开(公告)日:2005-03-22

    申请号:US10305196

    申请日:2002-11-27

    IPC分类号: F02C7/00 B22D27/04

    CPC分类号: B22D27/045

    摘要: Provided is a directional solidification casting apparatus capable of heightening a cooling effect when molten material poured in a mold is directionally solidified. A mold (20) disposed around a predetermined area is drawn out from a heating chamber (10) heated above a melting temperature of metals for producing a casting (31), and molten metals (32) held in a cavity (21) of the mold (20) are directionally solidified. The directional solidification casting apparatus (100) comprises a driving rod (42) by which the mold (20) is drawn out from the heating chamber (10), a gas nozzle (52b) through which a cooling gas is jetted from inside a predetermined area where the mold (20) is disposed so as to rapidly cool the mold (20), and a gas nozzle (52a) through which a cooling gas is jetted from outside the predetermined area where the mold (20) is disposed so as to rapidly cool the mold (20). A baffle (15) that does not move even when the driving rod (42) moves up and down is additionally provided. The baffle (15) blocks radiant heat emitted from the heating chamber (10).

    摘要翻译: 本发明提供一种定向凝固铸造装置,其能够在浇铸在模具中的熔融材料定向凝固时提高冷却效果。 设置在预定区域周围的模具(20)从用于制造铸件(31)的金属的熔化温度以上的加热室(10)被拉出,并且熔融金属(32)保持在 模具(20)定向凝固。 定向凝固铸造装置(100)包括:驱动杆(42),通过该驱动杆将模具(20)从加热室(10)中抽出;气体喷嘴(52b),冷却气体从预定 模具(20)设置为快速冷却模具(20)的区域,以及气体喷嘴(52a),冷却气体从设置有模具(20)的预定区域的外侧喷出,从而 快速冷却模具(20)。 附加地设置即使当驱动杆(42)上下移动时也不移动的挡板(15)。 挡板(15)阻挡从加热室(10)发射的辐射热。

    X-ray source
    44.
    发明授权
    X-ray source 失效
    X射线源

    公开(公告)号:US4771447A

    公开(公告)日:1988-09-13

    申请号:US857112

    申请日:1986-04-29

    IPC分类号: G03F7/20 H05G2/00 H05H1/34

    摘要: In a gas injection type plasma X-ray source, a through hole communicated with vacuum is provided in each one of a pair of plasma-forming electrodes. This leads to a decrease in the dose of charged particles, a high temperature gas, etc. reflected from the upper electrode and inflicting damage on an X-ray extraction window. Accordingly, the thickness of the X-ray extraction window can be so decreased as to raise the X-ray extraction efficiency. Besides, evacuation of a space between the electrodes can be quickened. Accordingly, X-ray emission can be effected at a high repetition frequency. When the normal line direction of the electrode is inclined relative to the direction of the X-ray extraction, the effects mentioned above are enhanced.

    摘要翻译: 在气体注入型等离子体X射线源中,在一对等离子体形成电极中的每一个中设置有与真空连通的通孔。 这导致从上电极反射的带电粒子,高温气体等的剂量下降,并在X射线提取窗口上造成损伤。 因此,为了提高X射线提取效率,可以使X射线提取窗口的厚度减小。 此外,可以加快电极之间的空间的抽真空。 因此,可以以高重复频率进行X射线发射。 当电极的法线方向相对于X射线提取的方向倾斜时,上述效果增强。