公开(公告)号：US20060134896A1

公开(公告)日：2006-06-22

申请号：US11298187

申请日：2005-12-09

申请人： Shogo Ono

发明人： Shogo Ono

IPC分类号： H01L21/00 ,  H01L21/20 ,  G01D15/00

CPC分类号： B41J2/1603 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1645 ,  B41J2002/14475 ,  Y10S438/976

摘要： A process includes forming a protective layer in a region of a substrate including a PAD electrode; forming a soluble resin layer in a region including a region on the substrate where an energy generating element has been formed, for forming a liquid chamber; forming a coating resin layer in a region covering the soluble resin layer and a region where an opening is formed above the electrode; forming an opening in the coating resin layer above the energy generating element to form a nozzle; dipping the substrate in an dissolving liquid to dissolve the soluble resin layer; and removing the protective layer after dissolution of the soluble resin layer.

摘要翻译： 一种方法包括在包括PAD电极的基板的区域中形成保护层; 在形成液体室的基板上形成有能量产生元件的区域的区域中形成可溶性树脂层; 在覆盖可溶性树脂层的区域和在电极上方形成开口的区域上形成涂布树脂层; 在所述能量产生元件上方的所述涂覆树脂层中形成开口以形成喷嘴; 将基材浸渍在溶解液中以溶解可溶性树脂层; 在可溶性树脂层溶解后除去保护层。

公开(公告)号：US08210641B2

公开(公告)日：2012-07-03

申请号：US12264772

申请日：2008-11-04

申请人： Takeo Eguchi ,  Shogo Ono ,  Kazuyasu Takenaka ,  Atsushi Nakamura ,  Yuichiro Ikemoto ,  Shigeyoshi Hirashima ,  Atsushi Nakayama ,  Shota Nishi ,  Yuji Yakura ,  Shigeyoshi Fujiki ,  Manabu Matsuda

发明人： Takeo Eguchi ,  Shogo Ono ,  Kazuyasu Takenaka ,  Atsushi Nakamura ,  Yuichiro Ikemoto ,  Shigeyoshi Hirashima ,  Atsushi Nakayama ,  Shota Nishi ,  Yuji Yakura ,  Shigeyoshi Fujiki ,  Manabu Matsuda

IPC分类号： B41J2/165

CPC分类号： B41J2/14024 ,  B41J2/1603 ,  B41J2/1623 ,  B41J29/02

摘要： A liquid ejection head includes an energy-generating element arranged on a semiconductor substrate, a barrier layer deposited on the semiconductor substrate for forming a liquid chamber in the periphery of the energy-generating element, and a nozzle sheet bonded on the barrier layer and having a nozzle formed at a position opposing the energy-generating element, in which the liquid ejection head ejects liquid contained in the liquid chamber from the nozzle as liquid droplets by the energy-generating element, and the barrier layer is provided with a plurality of depressions, each having an independent contour, arranged within a range, which is separated from the border of the barrier layer, on an adhesive region adhering to the nozzle sheet.

公开(公告)号：US07581809B2

公开(公告)日：2009-09-01

申请号：US11443958

申请日：2006-05-31

申请人： Takeo Eguchi ,  Shogo Ono ,  Kazuyasu Takenaka ,  Atsushi Nakamura ,  Yuichiro Ikemoto ,  Shigeyoshi Hirashima ,  Atsushi Nakayama ,  Shota Nishi ,  Yuji Yakura ,  Shigeyoshi Fujiki ,  Manabu Matsuda

发明人： Takeo Eguchi ,  Shogo Ono ,  Kazuyasu Takenaka ,  Atsushi Nakamura ,  Yuichiro Ikemoto ,  Shigeyoshi Hirashima ,  Atsushi Nakayama ,  Shota Nishi ,  Yuji Yakura ,  Shigeyoshi Fujiki ,  Manabu Matsuda

IPC分类号： B41J2/015 ,  B41J2/155 ,  B41J2/21 ,  B41J2/05

CPC分类号： B41J2/14024 ,  B41J2/1603 ,  B41J2/1623 ,  B41J29/02

摘要： A liquid ejection head includes an energy-generating element arranged on a semiconductor substrate, a barrier layer deposited on the semiconductor substrate for forming a liquid chamber in the periphery of the energy-generating element, and a nozzle sheet bonded on the barrier layer and having a nozzle formed at a position opposing the energy-generating element, in which the liquid ejection head ejects liquid contained in the liquid chamber from the nozzle as liquid droplets by the energy-generating element, and the barrier layer is provided with a plurality of depressions, each having an independent contour, arranged within a range, which is separated from the border of the barrier layer, on an adhesive region adhering to the nozzle sheet.

摘要翻译： 液体喷射头包括布置在半导体衬底上的能量产生元件，沉积在半导体衬底上用于在能量产生元件周围形成液体室的阻挡层和粘合在阻挡层上的喷嘴片，并且具有 形成在与能量产生元件相对的位置处的喷嘴，其中液体喷射头将由液体容纳在液体室中的液体从喷嘴喷出，作为液体由能量产生元件和阻挡层设置有多个凹陷 每个具有独立的轮廓，布置在与阻挡层的边界分离的范围内，粘附在喷嘴片上的粘合剂区域上。

公开(公告)号：US08109584B2

公开(公告)日：2012-02-07

申请号：US12263208

申请日：2008-10-31

申请人： Takeo Eguchi ,  Shogo Ono ,  Kazuyasu Takenaka ,  Atsushi Nakamura ,  Yuichiro Ikemoto ,  Shigeyoshi Hirashima ,  Atsushi Nakayama ,  Shota Nishi ,  Yuji Yakura ,  Shigeyoshi Fujiki ,  Manabu Matsuda

发明人： Takeo Eguchi ,  Shogo Ono ,  Kazuyasu Takenaka ,  Atsushi Nakamura ,  Yuichiro Ikemoto ,  Shigeyoshi Hirashima ,  Atsushi Nakayama ,  Shota Nishi ,  Yuji Yakura ,  Shigeyoshi Fujiki ,  Manabu Matsuda

IPC分类号： B41J2/195

CPC分类号： B41J2/14024 ,  B41J2/1603 ,  B41J2/1623 ,  B41J29/02

摘要： A liquid ejection head includes an energy-generating element arranged on a semiconductor substrate, a barrier layer deposited on the semiconductor substrate for forming a liquid chamber in the periphery of the energy-generating element, and a nozzle sheet bonded on the barrier layer and having a nozzle formed at a position opposing the energy-generating element, in which the liquid ejection head ejects liquid contained in the liquid chamber from the nozzle as liquid droplets by the energy-generating element, and the barrier layer is provided with a plurality of depressions, each having an independent contour, arranged within a range, which is separated from the border of the barrier layer, on an adhesive region adhering to the nozzle sheet.

摘要翻译： 液体喷射头包括布置在半导体衬底上的能量产生元件，沉积在半导体衬底上用于在能量产生元件周围形成液体室的阻挡层和粘合在阻挡层上的喷嘴片，并且具有 形成在与能量产生元件相对的位置处的喷嘴，其中液体喷射头将由液体容纳在液体室中的液体从喷嘴喷出，作为液体由能量产生元件和阻挡层设置有多个凹陷 每个具有独立的轮廓，布置在与阻挡层的边界分离的范围内，粘附在喷嘴片上的粘合剂区域上。

公开(公告)号：US07371591B2

公开(公告)日：2008-05-13

申请号：US11298187

申请日：2005-12-09

申请人： Shogo Ono

发明人： Shogo Ono

IPC分类号： H01L21/00

CPC分类号： B41J2/1603 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1645 ,  B41J2002/14475 ,  Y10S438/976

摘要： A process includes forming a protective layer in a region of a substrate including a PAD electrode; forming a soluble resin layer in a region including a region on the substrate where an energy generating element has been formed, for forming a liquid chamber; forming a coating resin layer in a region covering the soluble resin layer and a region where an opening is formed above the electrode; forming an opening in the coating resin layer above the energy generating element to form a nozzle; dipping the substrate in an dissolving liquid to dissolve the soluble resin layer; and removing the protective layer after dissolution of the soluble resin layer.

摘要翻译： 一种方法包括在包括PAD电极的基板的区域中形成保护层; 在形成液体室的基板上形成有能量产生元件的区域的区域中形成可溶性树脂层; 在覆盖可溶性树脂层的区域和在电极上方形成开口的区域上形成涂布树脂层; 在所述能量产生元件上方的所述涂覆树脂层中形成开口以形成喷嘴; 将基材浸渍在溶解液中以溶解可溶性树脂层; 在可溶性树脂层溶解后除去保护层。

公开(公告)号：US20070188561A1

公开(公告)日：2007-08-16

申请号：US11699715

申请日：2007-01-30

申请人： Takeo Eguchi ,  Shogo Ono ,  Takaaki Miyamoto ,  Kazuyasu Takenaka

发明人： Takeo Eguchi ,  Shogo Ono ,  Takaaki Miyamoto ,  Kazuyasu Takenaka

IPC分类号： B41J2/05

CPC分类号： B41J2/1404 ,  B41J2/04526 ,  B41J2/04533 ,  B41J2/04541 ,  B41J2/0458 ,  B41J2/14145 ,  B41J2002/14387 ,  B41J2002/14403 ,  B41J2202/20

摘要： A liquid ejecting head includes a plurality of liquid ejecting portions arrayed in a flat region on a substrate. The liquid ejecting portions each include a liquid chamber that accommodates liquid to be ejected, a heater element arranged in the liquid chamber, the heater element generating bubbles in liquid in the liquid chamber when heated, and a nozzle for ejecting liquid in the liquid chamber in accordance with generation of bubbles by the heater element.

摘要翻译： 液体喷射头包括排列在基板上的平坦区域中的多个液体喷射部。 液体喷射部分包括容纳待喷射液体的液体室，布置在液体室中的加热器元件，加热器在液体室中产生液体的气泡，以及用于在液体室中喷射液体的喷嘴 根据加热器元件产生气泡。

公开(公告)号：US06773091B2

公开(公告)日：2004-08-10

申请号：US10307681

申请日：2002-12-02

申请人： Takaaki Miyamoto ,  Shogo Ono ,  Osamu Tateishi ,  Toshimitsu Sato

发明人： Takaaki Miyamoto ,  Shogo Ono ,  Osamu Tateishi ,  Toshimitsu Sato

IPC分类号： B41J205

CPC分类号： B41J2/14129 ,  B41J2202/03 ,  B41J2202/13

摘要： The present invention relates to a liquid discharge device, and a method of manufacturing the liquid discharge device. Particularly, the present invention relates to a liquid discharge device in a system in which droplets are ejected by heating with a heating element, and which is capable of effectively avoiding deterioration in reliability due to damage to a protecting layer. In the present invention, heat treatment is performed for stabilizing the connection between the heating element and a wiring pattern, and then an anti-cavitation layer is formed.

摘要翻译： 液体排出装置及液体排出装置的制造方法技术领域本发明涉及一种液体排出装置及其制造方法。 特别地，本发明涉及一种系统中的液体排出装置，其中通过用加热元件加热来喷射液滴，并且能够有效地避免由于对保护层的损坏导致的可靠性的劣化。 在本发明中，为了稳定加热元件与布线图案之间的连接，进行热处理，然后形成防空穴层。