公开(公告)号：US20080182185A1

公开(公告)日：2008-07-31

申请号：US11942307

申请日：2007-11-19

申请人： Takayuki Abe ,  Junichi Suzuki ,  Tomohiro Iijima ,  Hideyuki Tsurumaki

发明人： Takayuki Abe ,  Junichi Suzuki ,  Tomohiro Iijima ,  Hideyuki Tsurumaki

IPC分类号： G03C5/00 ,  H01J3/14

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J2237/004 ,  H01J2237/30455 ,  Y10S430/143

摘要： A charged particle beam writing apparatus includes a first part configured, based on pattern data, to estimate a total writing time, a second part configured to acquire a base dose at an arbitrary time, after writing start time and within the total writing time by using a first correlation among a time having passed since the writing start time, the total writing time, and the base dose, a third part configured to acquire a fogging effect correction coefficient at the arbitrary time by using a second correlation among the time, the total writing time and the coefficient, a forth part configured to calculate a beam dose at the arbitrary time by using the base dose and the coefficient, a fifth part configured to calculate a beam irradiation time based on the beam dose, a deflector for deflecting the beam, and an aperture for blocking the beam.

摘要翻译： 带电粒子束写入装置包括：第一部分，基于图案数据构造，以估计总写入时间;第二部分，被配置为在写入开始时间之后并且在总写入时间内通过使用在任意时间获取基本剂量 从写入开始时刻起的时间，总写入时间和基本剂量之间的时间之间的第一相关性，第三部分，被配置为通过使用时间之间的第二相关性在任意时间获取起雾效果校正系数，总和 写入时间和系数，配置为通过使用基本剂量和系数来计算任意时间的束剂量的第四部分，被配置为基于束剂量计算束照射时间的第五部分，用于偏转光束的偏转器 ，以及用于阻挡光束的孔。

公开(公告)号：US20070192757A1

公开(公告)日：2007-08-16

申请号：US11671243

申请日：2007-02-05

申请人： Keiko Emi ,  Junichi Suzuki ,  Takayuki Abe

发明人： Keiko Emi ,  Junichi Suzuki ,  Takayuki Abe

IPC分类号： G06F17/50 ,  A61N5/00 ,  G21G5/00

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J2237/31764

摘要： A pattern generation method includes changing a dimension of a pattern included in each mesh-like region of a plurality of mesh-like regions by using an area of the pattern and a total sum of lengths of circumferential sides of the pattern included in each mesh-like region to correct a dimension error of the pattern, wherein the dimension error being caused by loading effects and the plurality of mesh-like regions being virtually divided from a pattern forming region of a target object, and generating a pattern of the dimension changed on the target object.

摘要翻译： 图案生成方法包括通过使用图案的区域和包括在每个网状区域中的图案的周边的长度的总和来改变包括在多个网状区域的每个网格区域中的图案的尺寸， 以校正图案的尺寸误差，其中所述尺寸误差是由加载效应引起的，并且所述多个网状区域从目标对象的图案形成区域虚拟地分割，并且生成维度上的尺寸的图案 目标对象。

公开(公告)号：US20070063087A1

公开(公告)日：2007-03-22

申请号：US11495783

申请日：2006-07-31

申请人： Akio Suto ,  Ikuhisa Sato ,  Yukio Nakano ,  Takayuki Abe

发明人： Akio Suto ,  Ikuhisa Sato ,  Yukio Nakano ,  Takayuki Abe

IPC分类号： G03C3/00 ,  B65H18/10

CPC分类号： G03B17/30 ,  B65H20/02 ,  B65H26/06

摘要： A rotation detecting apparatus for use in producing a photo film cassette has an opaque detecting dog device secured in a manner rotatable together with a rotatable inserter. A light source device applies collimated light flux to the detecting dog device. A detection hole is formed through the detecting dog device, for receiving application of the collimated light flux, and passing light through the detection hole when openings at ends thereof are aligned with one another in a direction of the collimated light flux. A photo receptor receives the passed light passed through the detection hole, and outputs a detection signal according to an amount of the received passed light. In the retention, a trailer of photo film is picked up by the inserter. The inserter is rotationally inserted through a passageway of the photo film cassette. The trailer is fastened on a trailer fastener of a spool.

摘要翻译： 用于制作摄影胶片盒的旋转检测装置具有以可旋转的插入件可转动的方式固定的不透明检测狗装置。 光源装置将准直光束施加到检测狗装置。 通过检测爪装置形成检测孔，用于接收准直光束的施加，并且当其端部的开口在准直光束的方向上彼此对准时，使光通过检测孔。 光接收器接收通过检测孔的通过的光，并根据接收到的光的量输出检测信号。 在保留期间，插入器拾取照片胶片的拖车。 插入器被旋转地插入通过照相胶片暗盒的通道。 拖车被固定在卷轴的拖车紧固件上。

公开(公告)号：US06938803B2

公开(公告)日：2005-09-06

申请号：US10757396

申请日：2004-01-15

申请人： Shinji Shimada ,  Katsuhito Kuwahara ,  Takao Kishi ,  Takayuki Abe ,  Shuzo Endo ,  Yuji Kohara ,  Takamitsu Nozawa

发明人： Shinji Shimada ,  Katsuhito Kuwahara ,  Takao Kishi ,  Takayuki Abe ,  Shuzo Endo ,  Yuji Kohara ,  Takamitsu Nozawa

IPC分类号： B05B11/00 ,  B65D47/34 ,  B65D83/00 ,  B65D83/76 ,  B65D88/54 ,  B67D1/08 ,  B67D7/58 ,  B67D7/60 ,  G01F11/06

CPC分类号： B05B11/306 ,  B05B11/0062 ,  B05B11/0064 ,  B05B11/3001 ,  B05B11/3023 ,  B05B11/3039 ,  B05B11/3067 ,  B05B11/3077 ,  B05B11/3097

摘要： A liquid jetting pump of the present invention is constructed such that an intra container liquid is sucked into a cylinder 3 through a suction valve 9 by moving a vertically movable member 4 up and down, and the intra cylinder liquid is jetted out of a nozzle 29 through a discharge valve 31 from a stem 28. A plurality of ribs 10 are protruded in a peripheral direction from a lower edge part within the cylinder. Engagement recessed portions 11 are formed in inner parts of the upper surfaces of the ribs. A lower edge of a coil spring 38 for biasing the vertically movable member 4 is secured to each of the engagement recessed portions 11, thereby permitting a flow of liquid on both sides of the lower edge of the spring internally externally.

摘要翻译： 本发明的液体喷射泵是通过使可垂直移动的构件4上下移动而将内部容器液体通过吸入阀9吸入气缸3的方式构成的，并且将气缸内液体从喷嘴29喷出 通过来自杆28的排出阀31.多个肋10沿圆周方向从圆筒内的下边缘部突出。 接合凹部11形成在肋的上表面的内部。 用于使可垂直移动的构件4偏置的螺旋弹簧38的下边缘固定到每个接合凹部11，从而允许在内部外部的弹簧的下边缘的两侧的液体流动。

公开(公告)号：US06773506B2

公开(公告)日：2004-08-10

申请号：US10162728

申请日：2002-06-04

申请人： Naoki Nakamura ,  Naomi Fukumaki ,  Takayuki Abe

发明人： Naoki Nakamura ,  Naomi Fukumaki ,  Takayuki Abe

IPC分类号： C30B2502

CPC分类号： C23C16/52 ,  C23C16/44 ,  H01L21/31604 ,  H01L21/3185

摘要： A thin film producing method in which the wafer film forming processing for a wafer to be a product may be carried out efficiently to shorten the processing time and to raise the operating ratio of the device. In a thin film deposition method using a single wafer processing for forming a thin film by chemical reaction under heat, a pseudo-process is provided which operates to suppress variations in the film thickness caused by the temperature in a reaction chamber 11. This pseudo process is the pre-heating processing of heating the reaction chamber 11 before actually charging the wafer W into the reaction chamber 11.

摘要翻译： 可以有效地进行用于制造晶片的晶片成膜处理以缩短处理时间并提高装置的操作比的薄膜制造方法。 在使用通过加热下的化学反应形成薄膜的单晶片处理的薄膜沉积方法中，提供了用于抑制由反应室11中的温度引起的膜厚度变化的伪工艺。该伪工艺 是在将晶片W实际装入反应室11之前加热反应室11的预热处理。

公开(公告)号：US06611144B2

公开(公告)日：2003-08-26

申请号：US10203260

申请日：2002-08-07

申请人： Takayuki Abe

发明人： Takayuki Abe

IPC分类号： G01V300

CPC分类号： G01R33/563 ,  G01R33/281

摘要： In a contrast MRA measurement, sampling order of k-space is controlled considering the distance from the origin such that sampling the low-frequency data is performed a time when the contrast concentration reaches it peak. First, the sampling points of k-space are divided into two groups. Then, a measurement of the first group is started a time when the contrast concentration of a blood vessel of interest becomes high and is controlled from the high-frequency component to the low-frequency component such that the distance of a sampling point from the origin progressively decreases. A measurement of the other group, which is performed successively, is controlled from the low-frequency component to the high-frequency component such that the distance of a sampling point from the origin progressively increases. According to this ordering, influence of measurement time error in the contrast MRA measurement can be reduced and the whole blood vessel can be imaged with high contrast. In addition, an artery can be selectively imaged.

摘要翻译： 在对比MRA测量中，考虑到与原点的距离来控制k空间的采样顺序，使得当对比度浓度达到峰值时执行低频数据的采样。 首先，将k空间的采样点分为两组。 然后，当感兴趣的血管的对比度浓度变高并且从高频分量控制到低频分量时，开始测量第一组，使得采样点与原点的距离 逐渐减少 连续执行的另一组的测量从低频分量控制到高频分量，使得采样点与原点的距离逐渐增加。 根据该顺序，可以减少对比度MRA测量中的测量时间误差的影响，并且可以以高对比度对整个血管进行成像。 此外，可以选择性地成像动脉。

公开(公告)号：US6119902A

公开(公告)日：2000-09-19

申请号：US227137

申请日：1999-01-08

申请人： Shinji Shimada ,  Katsuhito Kuwahara ,  Takao Kishi ,  Takayuki Abe ,  Shuzo Endo ,  Yuji Kohara ,  Takamitsu Nozawa

发明人： Shinji Shimada ,  Katsuhito Kuwahara ,  Takao Kishi ,  Takayuki Abe ,  Shuzo Endo ,  Yuji Kohara ,  Takamitsu Nozawa

IPC分类号： B05B11/00 ,  B65D47/34 ,  B65D83/00 ,  B65D83/76 ,  B65D88/54 ,  B67D1/08 ,  B67D7/58 ,  B67D7/60 ,  G01F11/06 ,  B67D5/40

CPC分类号： B05B11/306 ,  B05B11/0062 ,  B05B11/0064 ,  B05B11/3001 ,  B05B11/3023 ,  B05B11/3039 ,  B05B11/3067 ,  B05B11/3077 ,  B05B11/3097

摘要： A liquid jet pump constructed to suck a liquid within a container on which the pump is mounted and jet the liquid out of a nozzle by pushing down the head of the pump. The nozzle is so formed so as to ascend forward obliquely, and is provided with a discharge valve housing a ball-like valve for closing a valve seat provided at an proximal edge within the nozzle. The valve member is movable both back and forth within the nozzle to keep the liquid from dripping of the nozzle.

摘要翻译： 一种液体喷射泵，其被构造成吸取容器内的液体，在其中安装有泵，并且通过向下推动泵的头部将液体喷射出喷嘴。 喷嘴形成为倾斜向前倾斜，并且设置有排出阀，该排放阀容纳用于关闭设置在喷嘴内的近侧边缘处的阀座的球形阀。 阀构件可在喷嘴内前后移动，以保持液体免于喷嘴滴落。

公开(公告)号：US5008553A

公开(公告)日：1991-04-16

申请号：US341977

申请日：1989-04-24

申请人： Takayuki Abe

发明人： Takayuki Abe

IPC分类号： H01J37/302

CPC分类号： H01J37/3023 ,  H01J2237/31769

摘要： A charged beam lithography writes a pattern with charged beams on a sample. The pattern involves various shapes. For every position in the shapes in the pattern, degree of exposure due to a proximity effect caused by backward scattering charged from the shapes surrounding the position is calculated. A charged beam emission quantity corresponding to the calculated degree of exposure is subtracted from a set emission quantity to compensate the proximity effect and obtain an optimum charged beam emission quantity for the position. With charged beams of the optimum emission quantities thus obtained, the pattern is written with high dimensional accuracy.

摘要翻译： 带电光束光刻将带有带电束的图案写在样品上。 该图案涉及各种形状。 对于图案中的形状中的每个位置，计算由于从位置周围的形状进行的向后散射引起的邻近效应引起的曝光程度。 从设定的排放量中减去与计算出的曝光量相对应的带电束光发射量，以补偿邻近效应，并获得该位置的最佳带电束发射量。 利用如此获得的最佳发射量的带电束，以高尺寸精度写入图案。

公开(公告)号：US11008155B2

公开(公告)日：2021-05-18

申请号：US14780883

申请日：2014-03-28

申请人： Takayuki Abe ,  Mitsuo Furusawa

发明人： Takayuki Abe ,  Mitsuo Furusawa

IPC分类号： B65D83/00 ,  A45D40/00 ,  B65D21/08 ,  B65D47/08 ,  B65D49/02

摘要： A double container includes an outer layer body constituting an outer shell; an inner layer body including an upper opening communicating with a containing space, accommodated in the outer layer body, and deformable to undergo volume reduction; an inside plug including a tubular wall extending toward the containing space, a spherical body serving as a valve body being disposed inside the tubular wall; and a dispensing plug fitted to a mouth portion of the outer layer body and including a dispensing tube connected to the tubular wall. The tubular wall includes an inclined wall having a diameter decreasing toward the containing space and configured to abut against the spherical body over an entire circumference and including a protruding wall protruding from the inclined wall to the containing space. The protruding wall includes a liquid holding member holding a pool of liquid medium of the content formed below the spherical body.

公开(公告)号：US10125421B2

公开(公告)日：2018-11-13

申请号：US12865788

申请日：2008-02-06

申请人： Yuuji Honda ,  Takayuki Abe

发明人： Yuuji Honda ,  Takayuki Abe

IPC分类号： C23C16/50 ,  C23C16/44 ,  B01J2/00 ,  B01J2/12 ,  C23C16/26 ,  C23C16/442 ,  H01J37/32

摘要： A plasma CVD apparatus efficiently coats the surfaces of fine particles with a thin film or super-fine particles by concentrating a plasma near the fine particles. The plasma CVD apparatus includes a chamber, a container disposed in the chamber for housing the fine particles, the container having a polygonal inner shape in a cross section substantially perpendicular to a longitudinal axis of the container, a ground shielding member for shielding a surface of the container other than a housing face, a rotation mechanism for causing the container to rotate or act as a pendulum on an axis of rotation substantially perpendicular to the cross section, an opposed electrode disposed in the container so as to face the housing face, a plasma power source electrically connected to the container, a gas introducing mechanism for introducing a raw gas into the container, and an evacuation mechanism for evacuating the chamber.