公开(公告)号：US08685313B2

公开(公告)日：2014-04-01

申请号：US13624119

申请日：2012-09-21

Applicant: NGK Insulators, Ltd.

Inventor： Morimichi Watanabe ,  Yuji Katsuda ,  Toru Hayase

IPC: C04B35/00

CPC classification number: C04B35/50 ,  C04B35/44 ,  C04B35/505 ,  C04B35/6262 ,  C04B35/62655 ,  C04B35/645 ,  C04B2235/3213 ,  C04B2235/3217 ,  C04B2235/3224 ,  C04B2235/3225 ,  C04B2235/5445 ,  C04B2235/658 ,  C04B2235/77 ,  C04B2235/80 ,  C04B2235/96 ,  C04B2235/9692 ,  H01J2237/334

Abstract: A mixed powder was prepared by weighing Yb2O3 and SrCO3 in such a way that the molar ratio became 1:1. The resulting mixed powder was subjected to uniaxial pressure forming, so as to produce a disc-shaped compact. The compact was heat-treated in an air atmosphere, so that a complex oxide was synthesized. The resulting complex oxide was pulverized. After the pulverization, a slurry was taken out and was dried in a nitrogen gas stream, so as to produce a synthesized powder material. The resulting synthesized powder material was subjected to uniaxial pressure forming, so as to produce a disc-shaped compact. The resulting compact was fired by a hot-press method, so as to obtain a corrosion-resistant member for semiconductor manufacturing apparatus. The resulting corrosion-resistant member was made from a SrYb2O4.

Abstract translation: 通过称量Yb2O3和SrCO3以使摩尔比为1:1的方式制备混合粉末。 将所得混合粉末进行单轴压力成形，以生成圆盘状压块。 在空气气氛中对压块进行热处理，合成复合氧化物。 将所得复合氧化物粉碎。 粉碎后，取出浆液，并在氮气流中干燥，得到合成粉末材料。 将所得合成的粉末材料进行单轴压力成形，以制造圆盘状压块。 通过热压法烧成所得的压坯，得到半导体制造装置的耐腐蚀构件。 得到的耐腐蚀构件由SrYb2O4制成。