公开(公告)号：US11920234B2

公开(公告)日：2024-03-05

申请号：US18089807

申请日：2022-12-28

申请人： APPLIED MATERIALS, INC.

发明人： Vahid Firouzdor ,  Christopher Laurent Beaudry ,  Hyun-Ho Doh ,  Joseph Frederick Behnke ,  Joseph Frederick Sommers

IPC分类号： H01L21/67 ,  C04B35/111 ,  C04B35/486 ,  C04B35/505 ,  C04B35/622 ,  C23C4/134 ,  C23C14/00 ,  C23C14/08 ,  C23C14/22 ,  H01J37/32

CPC分类号： C23C14/083 ,  C04B35/111 ,  C04B35/486 ,  C04B35/505 ,  C04B35/62222 ,  C23C4/134 ,  C23C14/0052 ,  C23C14/081 ,  C23C14/221 ,  H01J37/32495 ,  H01L21/67213

摘要： Described herein is a protective coating composition that provides erosion and corrosion resistance to a coated article (such as a chamber component) upon the article's exposure to harsh chemical environment (such as hydrogen based and/or halogen based environment) and/or upon the article's exposure to high energy plasma. Also described herein is a method of coating an article with the protective coating using electronic beam ion assisted deposition, physical vapor deposition, or plasma spray. Also described herein is a method of processing wafer, which method exhibits, on average, less than about 5 yttrium based particle defects per wafer.

公开(公告)号：US20240043342A1

公开(公告)日：2024-02-08

申请号：US18380797

申请日：2023-10-17

申请人： The Government of the United States of America, as represented by the Secretary of the Navy

发明人： Michael Hunt ,  Guillermo R. Villalobos ,  Benjamin Rock ,  Shyam S. Bayya ,  Woohong Kim ,  Ishwar D. Aggarwal ,  Bryan Sadowski ,  Jasbinder S. Sanghera

IPC分类号： C04B35/505 ,  C04B35/443 ,  C04B35/50 ,  C04B35/468 ,  C04B35/64 ,  C04B35/638

CPC分类号： C04B35/505 ,  C04B35/443 ,  C04B35/50 ,  C04B35/4682 ,  C04B35/64 ,  C04B35/638 ,  C04B2235/3222 ,  C04B2235/3224 ,  C04B2235/3215 ,  C04B2235/3236 ,  C04B2235/3225 ,  C04B2235/3208 ,  C04B2235/5445 ,  C04B2235/604 ,  C04B2235/608 ,  C04B2235/6027 ,  C04B2235/6025 ,  C04B2235/6562 ,  C04B2235/6567 ,  C04B2235/667 ,  C04B2235/5409 ,  C04B2235/786 ,  C04B2235/77

摘要： The present invention provides a method for making a high strength, small grain size ceramic having a transgranular fracture mode by rapid densification of a green body and subsequent cooling of the densified ceramic. The ceramic may include dislocations, defects, dopants, and/or secondary phases that are formed as a result of the process and resulting in stress fields capable of redirecting or arresting cracks within the material. This ceramic can maintain transparency from ultraviolet to mid-wave infrared.

公开(公告)号：US20230391676A1

公开(公告)日：2023-12-07

申请号：US18266216

申请日：2021-12-08

申请人： NIPPON YTTRIUM CO., LTD.

发明人： Kento MATSUKURA ,  Yoshiaki TAZAKI ,  Minami DAN

IPC分类号： C04B35/505 ,  C04B35/645 ,  H01J37/32

CPC分类号： C04B35/505 ,  C04B35/645 ,  H01J37/32495 ,  C04B2235/3222 ,  C04B2235/5436 ,  C04B2235/5409 ,  C04B2235/656 ,  C04B2235/604 ,  C04B2235/666 ,  C04B2235/77 ,  C04B2235/786 ,  H01J2237/0203

摘要： A sintered body contains perovskite YAlO3 (YAP) as a main phase exhibited in X-ray diffractometry, and has a Vickers hardness of 11 GPa or more. In the case where the sintered body contains a composition other than YAlO3, the composition preferably substantially consists of Y3Al5O12 and Y4Al2O9. The sintered body preferably has an absolute density of 5.1 g/cm3 or more. The sintered body preferably has an open porosity of 1% or less, and also preferably has an average crystal grain size of 10 μm or less.

公开(公告)号：US20230286867A1

公开(公告)日：2023-09-14

申请号：US18139570

申请日：2023-04-26

申请人： Applied Materials, Inc.

发明人： Xiaowei Wu ,  Jennifer Y. Sun ,  Michael R. Rice

IPC分类号： C04B35/48 ,  C04B35/50 ,  C04B35/505 ,  C09D1/00 ,  C23C16/455

CPC分类号： C04B35/48 ,  C04B35/50 ,  C04B35/505 ,  C09D1/00 ,  C23C16/45525 ,  C07F7/00

摘要： Embodiments of the present disclosure relate to articles, coated articles and methods of coating such articles with a rare earth metal containing oxide coating. A method of co-depositing a rare earth metal containing oxide coating on a surface of an article is disclosed. The method includes contacting the article surface with a first or second metal containing precursor to form a partial metal adsorption layer of a first metal or a second metal. The method further includes contacting the partial metal adsorption layer with the first or second metal containing precursor to form a co-adsorption layer of the first metal and the second metal. The method further includes contacting the co-adsorption layer with a reactant to form the rare earth metal containing oxide coating.

公开(公告)号：US11667575B2

公开(公告)日：2023-06-06

申请号：US16039005

申请日：2018-07-18

申请人： Applied Materials, Inc.

发明人： Xiaowei Wu ,  Jennifer Y. Sun ,  Michael R. Rice

IPC分类号： C04B35/48 ,  C04B35/505 ,  C09D1/00 ,  C23C16/455 ,  C04B35/50 ,  C07F7/00 ,  C07F5/00

CPC分类号： C04B35/48 ,  C04B35/50 ,  C04B35/505 ,  C09D1/00 ,  C23C16/45525 ,  C04B2235/3225 ,  C04B2235/3248 ,  C07F5/00 ,  C07F7/00

摘要： Embodiments of the present disclosure relate to articles, coated articles and methods of coating such articles with a rare earth metal containing oxide coating. The coating can contain at least a first metal (e.g., a rare earth metal, tantalum, zirconium, etc.) and a second metal that have been co-deposited onto a surface of the article. The coating can include a homogenous mixture of the first metal and the second metal and does not contain mechanical segregation between layers in the coating.

公开(公告)号：US20230167540A1

公开(公告)日：2023-06-01

申请号：US18101273

申请日：2023-01-25

申请人： Applied Materials, Inc.

发明人： Jennifer Y. Sun ,  Vahid Firouzdor ,  Biraja Prasad Kanungo ,  Tom K. Cho ,  Vedapuram S. Achutharaman ,  Ying Zhang

IPC分类号： C23C14/08 ,  C04B41/50 ,  C23C14/46 ,  C23C14/58 ,  H01J37/32 ,  C04B41/87 ,  C04B41/89 ,  C04B41/00 ,  C04B41/52 ,  C04B35/505 ,  C04B35/622 ,  C04B41/45 ,  C04B35/00

CPC分类号： C23C14/088 ,  C04B35/00 ,  C04B35/505 ,  C04B35/62222 ,  C04B41/009 ,  C04B41/52 ,  C04B41/87 ,  C04B41/89 ,  C04B41/4529 ,  C04B41/5045 ,  C23C14/08 ,  C23C14/46 ,  C23C14/083 ,  C23C14/5806 ,  H01J37/32477 ,  C04B2235/428 ,  C04B2235/445 ,  C04B2235/3217 ,  C04B2235/3222 ,  C04B2235/3225 ,  C04B2235/3246 ,  C04B2235/3418 ,  C04B2235/3826 ,  C04B2235/3873 ,  Y10T428/26 ,  Y10T428/265

摘要： A method includes performing ion beam sputtering with ion assisted deposition to deposit a protective layer on a surface of a body. The protective layer is a plasma resistant rare earth-containing film of a thickness less than 1000 µm. The porosity of the protective layer is below 1%. The plasma resistant rare earth-containing film consists of 40 mol% to less than 100 mol% of Y2O3, over 0 mol% to 60 mol% of ZrO2, and 0 mol% to 9 mol% of Al2O3.

公开(公告)号：US20190233334A1

公开(公告)日：2019-08-01

申请号：US16306266

申请日：2017-05-23

申请人： BASF SE

发明人： Bjoern STUHRMANN ,  Wolfgang SCHROF ,  Kris SCHMIDT

IPC分类号： C04B35/14 ,  C04B35/626 ,  C04B35/634 ,  B29C64/124 ,  B33Y10/00 ,  B33Y70/00

CPC分类号： C04B35/14 ,  B29C64/124 ,  B29K2509/02 ,  B33Y10/00 ,  B33Y70/00 ,  C04B35/111 ,  C04B35/26 ,  C04B35/453 ,  C04B35/46 ,  C04B35/486 ,  C04B35/505 ,  C04B35/565 ,  C04B35/58071 ,  C04B35/581 ,  C04B35/584 ,  C04B35/622 ,  C04B35/62625 ,  C04B35/62685 ,  C04B35/632 ,  C04B35/63424 ,  C04B2235/3418 ,  C04B2235/5436 ,  C04B2235/5463 ,  C04B2235/6026 ,  C04B2235/61 ,  G03F7/0037 ,  G03F7/0047 ,  G03F7/029 ,  G03F7/031 ,  G03F7/38

摘要： The present invention relates to a method for the production of a photocurable formulation (F) for the use in an additive manufacturing process. In this method a ceramic dispersion (CD) comprising at least one ceramic material, at least one first acrylate and at least one dispersant is mixed with a solution (S) which comprises at least one second acrylate and at least one photoinitiator to obtain the photocurable formulation (F). The present invention furthermore relates to the photocurable formulation (F) obtainable by the inventive method and to a method for the production of a molding in an additive manufacturing process by curing the photocurable formulation (F). Moreover, the present invention relates to the use of the photocurable formulation (F) in an additive manufacturing process.

公开(公告)号：US20180322921A1

公开(公告)日：2018-11-08

申请号：US16036297

申请日：2018-07-16

申请人： Corning Incorporated

发明人： Jason Allen Brown ,  Thomas Dale Ketcham ,  Daniel Aloysius Nolan ,  Wageesha Senaratne ,  Jun Yang ,  Haitao Zhang

IPC分类号： G11C13/04 ,  H04B10/70 ,  H04B10/29 ,  G06N99/00 ,  C04B35/505 ,  C04B35/486

CPC分类号： G11C13/048 ,  B82Y10/00 ,  B82Y20/00 ,  C04B35/486 ,  C04B35/488 ,  C04B35/505 ,  C04B2235/3224 ,  C04B2235/3225 ,  C04B2235/3244 ,  C04B2235/95 ,  C04B2235/9646 ,  C04B2235/9653 ,  G06N99/002 ,  G11C13/04 ,  H04B10/29 ,  H04B10/291 ,  H04B10/70

摘要： A quantum memory system includes a doped polycrystalline ceramic, a magnetic field generation unit, and one or more pump lasers. The doped polycrystalline ceramic is positioned within a magnetic field of the magnetic field generation unit when the magnetic field generation unit generates the magnetic field, the one or more pump lasers are optically coupled to the doped polycrystalline ceramic, and the doped polycrystalline ceramic is doped with a rare-earth element dopant that is uniformly distributed within a crystal lattice of the doped polycrystalline ceramic.

公开(公告)号：US20180251406A1

公开(公告)日：2018-09-06

申请号：US15907154

申请日：2018-02-27

申请人： Applied Materials, Inc.

发明人： Jennifer Y. Sun ,  Guodong Zhan ,  David Fenwick ,  Michael R. Rice

IPC分类号： C04B35/622 ,  C04B41/00 ,  C04B41/50 ,  C04B35/645

CPC分类号： C04B35/62222 ,  B32B15/00 ,  B32B18/00 ,  C04B35/119 ,  C04B35/44 ,  C04B35/486 ,  C04B35/4885 ,  C04B35/50 ,  C04B35/505 ,  C04B35/553 ,  C04B35/645 ,  C04B41/009 ,  C04B41/5032 ,  C04B41/5042 ,  C04B41/5045 ,  C04B41/5055 ,  C04B41/87 ,  C04B2235/3217 ,  C04B2235/3224 ,  C04B2235/3225 ,  C04B2235/3244 ,  C04B2235/3418 ,  C04B2235/6025 ,  C04B2235/612 ,  C04B2235/80 ,  C04B2237/34 ,  C04B2237/343 ,  C04B2237/346 ,  C04B2237/348 ,  C04B2237/36 ,  C04B2237/365 ,  C04B2237/366 ,  C04B2237/368 ,  C04B35/00 ,  C04B41/0072 ,  C04B41/4521 ,  C04B41/52

摘要： Disclosed herein are methods for fabricating layered ceramic materials via hot pressing. A method includes disposing a powder compact or a ceramic slurry onto a surface of an article, wherein the article is a chamber component of a processing chamber. The powder compact or ceramic slurry is hot pressed against the surface of the article by heating the article and the powder compact or ceramic slurry and applying a pressure of 15-100 Megapascals. The hot pressing sinters the powder compact or ceramic slurry into a sintered ceramic protective layer and bonds the sintered ceramic protective layer to the surface of the article.

公开(公告)号：US09944561B2

公开(公告)日：2018-04-17

申请号：US15120150

申请日：2015-03-09

申请人： Sumitomo Osaka Cement Co., Ltd

发明人： Masayuki Ishizuka ,  Hiroaki Nagatomo

IPC分类号： C04B35/117 ,  C04B35/626 ,  C04B35/645 ,  H01L21/683 ,  H02N13/00 ,  H01B3/00 ,  C04B35/01 ,  C04B35/14 ,  C04B35/185 ,  C04B35/44 ,  C04B35/488 ,  C04B35/495 ,  C04B35/50 ,  C04B35/505 ,  C04B35/581 ,  C04B35/583 ,  C04B35/584 ,  C04B35/78

CPC分类号： C04B35/117 ,  C04B35/01 ,  C04B35/14 ,  C04B35/185 ,  C04B35/44 ,  C04B35/488 ,  C04B35/495 ,  C04B35/50 ,  C04B35/505 ,  C04B35/581 ,  C04B35/583 ,  C04B35/584 ,  C04B35/6261 ,  C04B35/62625 ,  C04B35/6264 ,  C04B35/62655 ,  C04B35/645 ,  C04B35/6455 ,  C04B35/78 ,  C04B2235/3217 ,  C04B2235/3225 ,  C04B2235/3826 ,  C04B2235/404 ,  C04B2235/422 ,  C04B2235/5445 ,  C04B2235/5472 ,  C04B2235/606 ,  C04B2235/6567 ,  C04B2235/658 ,  C04B2235/66 ,  C04B2235/764 ,  C04B2235/80 ,  H01B3/004 ,  H01L21/6833 ,  H02N13/00

摘要： A dielectric material includes a composite sintered body in which conductive particles are dispersed in an insulating material, in which a dielectric constant at a frequency of 40 Hz is 10 or higher, and a difference between a maximum dielectric loss value and a minimum dielectric loss value at a frequency of 1 MHz in a surface of the composite sintered body is 0.002 or less.