公开(公告)号：US20140367811A1

公开(公告)日：2014-12-18

申请号：US14373547

申请日：2012-11-14

Applicant: OMRON Corporation

Inventor： Yusuke Nakagawa ,  Takashi Kasai ,  Yoshitaka Tatara

IPC: B81B3/00 ,  G01L9/12 ,  B81C1/00 ,  G01H11/06

CPC classification number: B81B3/0021 ,  B81B3/0056 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81C1/00158 ,  G01H11/06 ,  G01L9/12 ,  H04R19/005 ,  H04R19/04 ,  H04R31/00

Abstract: A capacitance type sensor has a semiconductor substrate having a vertically opened penetration hole, a movable electrode film arranged above the penetration hole such that a periphery portion opposes to a top surface of the semiconductor substrate with a gap provided, and a fixed electrode film arranged above the movable electrode film with a gap with respect to the movable electrode film. A concave portion having at least a part thereof formed by an inclined surface is provided in the top surface of the semiconductor substrate in a region of the top surface of the semiconductor substrate which overlaps the periphery portion of the movable electrode film.

Abstract translation: 电容式传感器具有具有垂直开口的通孔的半导体基板，布置在贯通孔的上方的可动电极膜，使得周边部分与设置有间隙的半导体基板的上表面相对，并且设置在上方的固定电极膜 相对于可动电极膜具有间隙的可动电极膜。 在半导体衬底的顶表面与可动电极膜的周边部分重叠的区域中，在半导体衬底的顶表面中设置至少部分由倾斜表面形成的凹部。

公开(公告)号：US20130294622A1

公开(公告)日：2013-11-07

申请号：US13936104

申请日：2013-07-05

Applicant: STMicroelectronics S.r.I. ,  Omron Corporation

Inventor： Takashi Kasai ,  Shobu Sato ,  Yuki Uchida ,  Igino Padovani ,  Filippo David ,  Sebastiano Conti

IPC: H04R3/00

CPC classification number: H04R19/04 ,  B81B3/0021 ,  H04R1/023 ,  H04R1/086 ,  H04R3/00 ,  H04R3/005 ,  H04R19/005 ,  H04R19/016 ,  H04R31/00 ,  H04R2201/003 ,  H04R2499/11

Abstract: Provided is an acoustic transducer including: a semiconductor substrate; a vibrating membrane provided above the semiconductor substrate, including a vibrating electrode; and a fixed membrane provided above the semiconductor substrate, including a fixed electrode, the acoustic transducer detecting a sound wave according to changes in capacitances between the vibrating electrode and the fixed electrode, converting the sound wave into electrical signals, and outputting the electrical signals. At least one of the vibrating electrode and the fixed electrode is divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting the electrical signals.

Abstract translation: 提供一种声换能器，包括：半导体基板; 设置在所述半导体基板上方的包括振动电极的振动膜; 以及设置在所述半导体衬底上方的固定膜，包括固定电极，所述声换能器根据所述振动电极和所述固定电极之间的电容的变化来检测声波，将所述声波转换为电信号，并输出所述电信号。 振动电极和固定电极中的至少一个分为多个分割电极，多个分割电极输出电信号。