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公开(公告)号：US20140010374A1
公开(公告)日：2014-01-09
申请号：US13936110
申请日：2013-07-05
Applicant: STMicroelectronics S.r.I. , Omron Corporation
Inventor： Takashi Kasai , Shobu Sato , Yuki Uchida , Igino Padovani , Filippo David , Sebastiano Conti , Martino Zerbini , Luca Molinari
IPC: H04R3/00
CPC classification number: H04R3/00 , H01L2224/48137 , H01L2924/16152 , H04R1/086 , H04R19/005 , H04R19/016 , H04R31/00
Abstract: The present disclosure is directed to an acoustic transducer configured to detect a sound wave according to changes in capacitances between a vibrating electrode and a fixed electrode. At least one of the vibrating electrode and the fixed electrode being divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting electrical signals. The disclosure includes a digital interface circuit coupled to the divided electrodes. The circuit includes a recombination stage, which supplies a mixed signal by combining the first digital processed signal and the second digital processed signal with a respective weight that is a function of a first level value of the first processed signal. An output stage is included, which supplies, selectively and alternatively, a first processed signal, a second processed signal, or a mixed signal.
Abstract translation: 本公开涉及一种被配置为根据振动电极和固定电极之间的电容的变化来检测声波的声学换能器。 振动电极和固定电极中的至少一个分为多个分割电极，多个分割电极输出电信号。 本公开包括耦合到分割电极的数字接口电路。 电路包括复合级，其通过将第一数字处理信号和第二数字处理信号组合为具有作为第一处理信号的第一电平值的函数的相应权重来提供混合信号。 包括输出级，其选择性地或替代地提供第一处理信号，第二处理信号或混合信号。
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公开(公告)号：US20130294622A1
公开(公告)日：2013-11-07
申请号：US13936104
申请日：2013-07-05
Applicant: STMicroelectronics S.r.I. , Omron Corporation
Inventor： Takashi Kasai , Shobu Sato , Yuki Uchida , Igino Padovani , Filippo David , Sebastiano Conti
IPC: H04R3/00
CPC classification number: H04R19/04 , B81B3/0021 , H04R1/023 , H04R1/086 , H04R3/00 , H04R3/005 , H04R19/005 , H04R19/016 , H04R31/00 , H04R2201/003 , H04R2499/11
Abstract: Provided is an acoustic transducer including: a semiconductor substrate; a vibrating membrane provided above the semiconductor substrate, including a vibrating electrode; and a fixed membrane provided above the semiconductor substrate, including a fixed electrode, the acoustic transducer detecting a sound wave according to changes in capacitances between the vibrating electrode and the fixed electrode, converting the sound wave into electrical signals, and outputting the electrical signals. At least one of the vibrating electrode and the fixed electrode is divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting the electrical signals.
Abstract translation: 提供一种声换能器，包括：半导体基板; 设置在所述半导体基板上方的包括振动电极的振动膜; 以及设置在所述半导体衬底上方的固定膜，包括固定电极，所述声换能器根据所述振动电极和所述固定电极之间的电容的变化来检测声波，将所述声波转换为电信号，并输出所述电信号。 振动电极和固定电极中的至少一个分为多个分割电极，多个分割电极输出电信号。
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公开(公告)号：US10469957B2
公开(公告)日：2019-11-05
申请号：US15901830
申请日：2018-02-21
Applicant: OMRON Corporation
Inventor： Takashi Kasai , Yuki Uchida
Abstract: A capacitive transducer includes a substrate having an opening in a surface thereof, a back plate facing the opening in the substrate, a vibration electrode film facing the back plate across a space, the vibration electrode film being displaceable to have a displacement converted into a change in capacitance between the vibration electrode film and the back plate, an airflow channel defined by a gap between a protrusion integral with the back plate and a part of the vibration electrode film, the airflow channel being configured to increase an area of air flow when the vibration electrode film deforms under pressure to move relative to the protrusion integral with the back plate and relieve the pressure applied to the vibration electrode film to serve as a pressure relief channel, and an extension formed at a periphery of a hole in the vibration electrode film defining the pressure relief channel.
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公开(公告)号：US20180295454A1
公开(公告)日：2018-10-11
申请号：US15904209
申请日：2018-02-23
Applicant: Omron Corporation , STMicroelectronics S.r.l.
Inventor： Takashi Kasai , Shobu Sato , Yuki Uchida , Sebastiano Conti , Igino Padovani , Filippo David
Abstract: Provided is an acoustic transducer including: a semiconductor substrate; a vibrating membrane, provided above the semiconductor substrate, including a vibrating electrode; and a fixed membrane, provided above the semiconductor substrate, including a fixed electrode, the acoustic transducer detecting a sound wave according to changes in capacitances between the vibrating electrode and the fixed electrode, converting the sound wave into electrical signals, and outputting the electrical signals. At least one of the vibrating electrode and the fixed electrode is divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting the electrical signals.
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公开(公告)号：US09521491B2
公开(公告)日：2016-12-13
申请号：US14773451
申请日：2013-09-09
Applicant: OMRON Corporation
Inventor： Tadashi Inoue , Takashi Kasai , Yuki Uchida
CPC classification number: H04R7/18 , B81B7/0006 , B81B2201/0257 , B81B2203/0127 , B81B2203/0307 , B81B2207/07 , H01L2224/48091 , H01L2224/48137 , H01L2924/15151 , H01L2924/16152 , H04R19/005 , H04R19/04 , H04R2410/03 , H01L2924/00014
Abstract: A diaphragm is arranged on the upper surface of a silicon substrate so as to cover a chamber in the silicon substrate. Multiple anchors are provided on the upper surface of the silicon substrate, and the lower surfaces of corner portions of the diaphragm are supported by the anchors. Also, a fixed electrode plate is provided above the diaphragm with an air gap therebetween. In a view from a direction perpendicular to the upper surface of the silicon substrate, the entire length of the outer edge of the diaphragm located between adjacent anchors is located outward of a line segment that circumscribes the edges of the adjacent anchors on the side distant from the center of the diaphragm. Also, one or two or more through-holes are formed in the diaphragm in the vicinity of the anchors.
Abstract translation: 在硅衬底的上表面上设置隔膜以覆盖硅衬底中的室。 在硅基板的上表面上设置有多个锚，并且隔膜的角部的下表面被锚固件支撑。 此外，固定电极板设置在隔膜的上方，其间具有气隙。 在从垂直于硅衬底的上表面的方向看来，位于相邻锚固件之间的隔膜的外边缘的整个长度位于一个线段的外侧，该线段在相邻的锚的边缘远离 隔膜的中心。 此外，在隔膜附近形成有一个或两个以上的通孔。
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Patent Agency Ranking
公开(公告)号：US09420380B2
公开(公告)日：2016-08-16
申请号：US14426895
申请日：2013-08-12
Applicant: OMRON Corporation
Inventor： Tadashi Inoue , Takashi Kasai
CPC classification number: H04R19/00 , B81B3/001 , B81B2201/0257 , B81B2203/0127 , H04R7/26 , H04R19/005 , H04R31/003 , H04R2207/021
Abstract: An acoustic transducer has a substrate having an opening in an upper surface thereof, a vibration electrode plate disposed above the substrate, and having an outer edge thereof facing the upper surface of the substrate with a gap therebetween, a fixed electrode plate facing the vibration electrode plate, and a plurality of projections protruding on a lower surface of the outer edge of the vibration electrode plate. The vibration electrode plate covers an upper side of the opening. The plurality of projections are disposed so as to not be positioned along a straight line or a curved line parallel to an edge of the opening in at least a part of one or at least two arrays formed on the lower surface of the outer edge.
Abstract translation: 声换能器具有在其上表面具有开口的基板，设置在基板上方的振动电极板，并且其外边缘面向基板的上表面，其间具有间隙，面向振动电极的固定电极板 板，以及在振动电极板的外缘的下表面上突出的多个突起。 振动电极板覆盖开口的上侧。 多个突起被设置成不沿着形成在外边缘的下表面上的一个或至少两个阵列的至少一部分中的平行于开口的边缘的直线或曲线定位。
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公开(公告)号：US09414139B2
公开(公告)日：2016-08-09
申请号：US14425641
申请日：2013-08-12
Applicant: OMRON Corporation
Inventor： Tadashi Inoue , Takashi Kasai
CPC classification number: H04R1/00 , H04R19/005 , H04R2201/003
Abstract: An acoustic transducer has a substrate having a cavity that is open at a top of the substrate, a vibration electrode film provided above the substrate so as to cover the cavity, and a fixed electrode film provided a distance above the vibration electrode film. A gap is formed between an upper surface of the substrate and a lower surface of the vibration electrode film around the cavity. In the gap across which the upper surface of the substrate and the lower surface of the vibration electrode film face each other, a narrow portion of the gap that is narrower than another portion of the gap is disposed. The narrow portion of the gap extends linearly.
Abstract translation: 声换能器具有基板，该基板在基板的顶部开口，在该基板上设置以覆盖该空腔的振动电极膜，以及设置在振动电极膜上方的距离的固定电极膜。 在基板的上表面和周围的振动电极膜的下表面之间形成间隙。 在基板的上表面和振动电极膜的下表面彼此面对的间隙中，设置比间隙的另一部分窄的间隙的狭窄部分。 间隙的狭窄部分线性延伸。
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公开(公告)号：US09363608B2
公开(公告)日：2016-06-07
申请号：US13936104
申请日：2013-07-05
Applicant: Omron Corporation , STMicroelectronics S.r.l.
Inventor： Takashi Kasai , Shobu Sato , Yuki Uchida , Igino Padovani , Filippo David , Sebastiano Conti
CPC classification number: H04R19/04 , B81B3/0021 , H04R1/023 , H04R1/086 , H04R3/00 , H04R3/005 , H04R19/005 , H04R19/016 , H04R31/00 , H04R2201/003 , H04R2499/11
Abstract: Provided is an acoustic transducer including: a semiconductor substrate; a vibrating membrane provided above the semiconductor substrate, including a vibrating electrode; and a fixed membrane provided above the semiconductor substrate, including a fixed electrode, the acoustic transducer detecting a sound wave according to changes in capacitances between the vibrating electrode and the fixed electrode, converting the sound wave into electrical signals, and outputting the electrical signals. At least one of the vibrating electrode and the fixed electrode is divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting the electrical signals.
Abstract translation: 提供一种声换能器，包括：半导体基板; 设置在所述半导体基板上方的包括振动电极的振动膜; 以及设置在所述半导体衬底上方的固定膜，包括固定电极，所述声换能器根据所述振动电极和所述固定电极之间的电容的变化来检测声波，将所述声波转换为电信号，并输出所述电信号。 振动电极和固定电极中的至少一个分为多个分割电极，多个分割电极输出电信号。
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9.发明授权公开(公告)号：US09326081B2
公开(公告)日：2016-04-26
申请号：US14340949
申请日：2014-07-25
Applicant: OMRON Corporation
Inventor： Koji Momotani , Takashi Kasai
CPC classification number: H04R31/006 , H04R19/005 , H04R19/04 , Y10T29/49005
Abstract: A microphone has a package, and an acoustic sensor, an under surface of which is fixed to an inner face of the package. The acoustic sensor has a substrate having a plurality of hollows penetrating the substrate from a top surface to an under surface, and a capacitor structure made by a movable electrode plate and a fixed electrode plate disposed above each of the hollows. A package sound hole is opened in the package in a position opposed to the under surface of the acoustic sensor. A dent which is communicated with each of the hollows and open below the under surface side of the substrate is formed below the under surface of the substrate. A height of the dent measured from the under surface of the substrate is equal to or less than half of a height of the hollow.
Abstract translation: 麦克风具有封装，声传感器的下表面固定在封装的内表面上。 声学传感器具有基板，其具有从上表面到下表面贯穿基板的多个中空部，以及由可动电极板和设置在每个中空部上方的固定电极板构成的电容器结构。 包装声孔在声音传感器的下表面相对的位置在包装件中打开。 在基板的下表面的下方形成有与各个中空部连通并在基板的下表面侧开口的凹部。 从基板的下表面测量的凹陷的高度等于或小于中空部的高度的一半。
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公开(公告)号：US20150245123A1
公开(公告)日：2015-08-27
申请号：US14426536
申请日：2013-08-12
Applicant: OMRON CORPORATION
Inventor： Yuki Uchida , Takashi Kasai
IPC: H04R1/08
Abstract: A capacitance type sensor has a substrate, a vibration electrode plate formed over the substrate, a back plate formed over the substrate so as to cover the vibration electrode plate, and a fixed electrode plate provided on the back plate so as to be opposite to the vibration electrode plate. At least one of the vibration electrode plate and the fixed electrode plate is separated into a plurality of regions, each of the plurality of regions being formed with a sensing section including the vibration electrode plate and the fixed electrode plate. A barrier electrode is provided between respective sensing sections of at least one adjacent pair of regions of the plurality of regions to prevent signal interference between the respective sensing sections.
Abstract translation: 电容式传感器具有基板，形成在基板上的振动电极板，形成在基板上的覆盖振动电极板的背板和设置在背板上的固定电极板，以与 振动电极板。 振动电极板和固定电极板中的至少一个被分离成多个区域，所述多个区域中的每个区域形成有包括振动电极板和固定电极板的感测部分。 阻挡电极设置在多个区域中的至少一个相邻的一对区域的相应感测部分之间，以防止各个感测部分之间的信号干扰。
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