公开(公告)号：US20120303142A1

公开(公告)日：2012-11-29

申请号：US13568881

申请日：2012-08-07

Applicant: Lawrence Hendler ,  Stela Diamant Lazarovich ,  Ron Hadar ,  Nouna Kettaneh ,  Uzi Levami ,  Dmitry Perlroizen

Inventor： Lawrence Hendler ,  Stela Diamant Lazarovich ,  Ron Hadar ,  Nouna Kettaneh ,  Uzi Levami ,  Dmitry Perlroizen

IPC: G05B13/04

CPC classification number: G05B19/41875 ,  G05B2219/32201 ,  G05B2219/42001 ,  G05B2219/45031

Abstract: A system and computer-implemented method for creating a new model or updating a previously-created model based on a template are described. A template is generated from a previously-created model. The previously-created model specifies a set of parameters associated with a manufacturing process, a process tool or chamber. Variables associated with the manufacturing process are acquired, monitored, and analyzed. A statistical analysis (or multivariate statistical analysis) is employed to analyze the monitored variables and the set of parameters. When any of the monitored variables satisfy a threshold condition, a new model is created or the parameters of the previously-created model are updated, adjusted, or modified based on the template and the monitored variables. A user interface facilitating communication between a user and the systems and display of information is also described.

Abstract translation: 描述了用于创建新模型或基于模板更新先前创建的模型的系统和计算机实现的方法。 从先前创建的模型生成模板。 先前创建的模型指定与制造过程，过程工具或室相关联的一组参数。 获取，监测和分析与制造过程相关的变量。 采用统计分析（或多变量统计分析）来分析监测变量和参数集。 当任何受监视的变量满足阈值条件时，将根据模板和监视变量创建新模型或先前创建的模型的参数进行更新，调整或修改。 还描述了便于用户和系统之间的通信以及信息显示的用户界面。

公开(公告)号：US20050010317A1

公开(公告)日：2005-01-13

申请号：US10617138

申请日：2003-07-11

Applicant: Ron Hadar ,  John Smith ,  Gerhard Rupp ,  Bernhard Schimunek ,  Mark Attwood ,  Lior Landesmann ,  Brent Elliott ,  Tim Robinson ,  Uzi Lev-Ami

Inventor： Ron Hadar ,  John Smith ,  Gerhard Rupp ,  Bernhard Schimunek ,  Mark Attwood ,  Lior Landesmann ,  Brent Elliott ,  Tim Robinson ,  Uzi Lev-Ami

IPC: G05B19/418 ,  G06F20060101 ,  G06F19/00

CPC classification number: G05B19/4185 ,  G05B2219/32126 ,  G05B2219/34038 ,  G05B2219/45031 ,  Y02P90/18 ,  Y02P90/185

Abstract: A method and apparatus for automated bidirectional integration of peripheral data sources for a production tool couples the system components together in a web-based arrangement. The process tools and the peripheral data sources are configured as websites to provide information to the system. Certain components of the system are also configured as browsers to obtain available information and use this information to make decisions and perform actions.

Abstract translation: 用于生产工具的外围数据源的自动双向集成的方法和装置将系统组件以基于网络的布置耦合在一起。 流程工具和外围数据源被配置为向系统提供信息的网站。 系统的某些组件也被配置为浏览器以获取可用的信息并使用该信息作出决定和执行动作。

公开(公告)号：US20090037013A1

公开(公告)日：2009-02-05

申请号：US12113613

申请日：2008-05-01

Applicant: Lawrence Hendler ,  Stela Diamant Lazarovich ,  Ron Hadar ,  Nouna Kettaneh ,  Uzi Levami ,  Dmitry Perlroizen

Inventor： Lawrence Hendler ,  Stela Diamant Lazarovich ,  Ron Hadar ,  Nouna Kettaneh ,  Uzi Levami ,  Dmitry Perlroizen

IPC: G06F19/00

CPC classification number: G05B19/41875 ,  G05B2219/32201 ,  G05B2219/42001 ,  G05B2219/45031

Abstract: A system and computer-implemented method for creating a new model or updating a previously-created model based on a template are described. A template is generated from a previously-created model. The previously-created model specifies a set of parameters associated with a manufacturing process, a process tool or chamber. Variables associated with the manufacturing process are acquired, monitored, and analyzed. A statistical analysis (or multivariate statistical analysis) is employed to analyze the monitored variables and the set of parameters. When any of the monitored variables satisfy a threshold condition, a new model is created or the parameters of the previously-created model are updated, adjusted, or modified based on the template and the monitored variables. A user interface facilitating communication between a user and the systems and display of information is also described.

Abstract translation: 描述了用于创建新模型或基于模板更新先前创建的模型的系统和计算机实现的方法。 从先前创建的模型生成模板。 先前创建的模型指定与制造过程，过程工具或室相关联的一组参数。 获取，监测和分析与制造过程相关的变量。 采用统计分析（或多变量统计分析）来分析监测变量和参数集。 当任何受监视的变量满足阈值条件时，将根据模板和监视变量创建新模型或先前创建的模型的参数进行更新，调整或修改。 还描述了便于用户和系统之间的通信以及信息显示的用户界面。

公开(公告)号：US20060025871A1

公开(公告)日：2006-02-02

申请号：US10948085

申请日：2004-09-23

Applicant: Nidal Khalil ,  Guenter Sifnatsch ,  Uzi Lev-Ami ,  Ron Hadar

Inventor： Nidal Khalil ,  Guenter Sifnatsch ,  Uzi Lev-Ami ,  Ron Hadar

IPC: G05B11/01 ,  G05B9/02

CPC classification number: G05B9/03

Abstract: The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.

Abstract translation: 本发明涉及与工具相关的传感器的控制和数据收集。 特别地，它涉及使用控制器来调解工具之间的通信，与工具相关联的传感器和诸如主机系统或分布式处理器的数据用户之间的通信。 在权利要求书，说明书和附图中描述了本发明的特定方面。