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    High vacuum OLED deposition source and system
    41.
    发明授权
    High vacuum OLED deposition source and system 有权
    高真空OLED沉积源和系统

    公开(公告)号：US09142778B2

    公开(公告)日：2015-09-22

    申请号：US14081161

    申请日：2013-11-15

    Applicant: Universal Display Corporation

    Inventor： William E. Quinn ,  Siddharth Harikrishna Mohan ,  Gregory McGraw

    IPC: H01L51/40 ,  H01L51/00 ,  C23C14/04 ,  C23C14/12 ,  H01L51/56

    CPC classification number: H01L51/0011 ,  C23C14/042 ,  C23C14/12 ,  H01L51/56

    Abstract: Sources, devices, and techniques for deposition of organic layers, such as for use in an OLED, are provided. A vaporizer may vaporize a material between cooled side walls and toward a mask having an adjustable mask opening. The mask opening may be adjusted to control the pattern of deposition of the material on a substrate, such as to correct for material buildup that occurs during deposition. Material may be collected from the cooled side walls for reuse.

    Abstract translation: 提供了用于沉积有机层的源，器件和技术，例如用于OLED。 蒸发器可以将冷却的侧壁之间的材料蒸发并且朝向具有可调节的掩模开口的掩模蒸发。 可以调节掩模开口以控制材料在衬底上的沉积图案，以便校正在沉积期间发生的材料堆积。 可以从冷却的侧壁收集材料以供重新使用。

    Segmented OVJP print bar
    42.
    发明授权
    Segmented OVJP print bar 有权

    公开(公告)号：US12252774B2

    公开(公告)日：2025-03-18

    申请号：US17228745

    申请日：2021-04-13

    Applicant: Universal Display Corporation

    Inventor： William E. Quinn ,  Gregory McGraw

    IPC: C23C14/22 ,  B41J2/04 ,  B41J2/155 ,  B41J3/54 ,  B41J25/308 ,  B41J25/316 ,  C23C14/04 ,  C23C14/12 ,  C23C14/24 ,  H10K50/11 ,  H10K71/00 ,  H10K71/16 ,  H10K102/00

    Abstract: Implementations of the disclosed subject matter provide a print bar for organic vapor jet (OVJP) deposition is provided that includes a plurality of n print head segments, where each of the plurality of print head segments may have an OVJP print head. The print bar may include a plurality of distance sensors, where each of the plurality of distance sensors may be configured to measure a distance between a substrate disposed below the print bar and a portion of at least one of the print head segments. The print bar may include a plurality of not more than n+1 actuators configured to adjust at least one of a position and an orientation of one or more of the plurality of print head segments based upon one or more distances between the substrate and the print bar measured by one or more of the plurality of distance sensors.

    Organic vapor jet print head with redundant groups of depositors
    45.
    发明授权
    Organic vapor jet print head with redundant groups of depositors 有权

    公开(公告)号：US11600777B2

    公开(公告)日：2023-03-07

    申请号：US17407204

    申请日：2021-08-20

    Applicant: Universal Display Corporation

    Inventor： William E. Quinn ,  Gregory McGraw ,  Gregg Kottas ,  Xin Xu ,  Julia J. Brown

    IPC: H01L51/56 ,  H01L51/00 ,  B05B12/18 ,  H01L51/50

    Abstract: Embodiments of the disclosed subject matter provide a device including a micronozzle array having separate redundant groups of depositors that each include a delivery aperture disposed between two exhaust apertures. The device may include a first row of depositors of a first redundant group, each of which may be connected in parallel to first common delivery lines and first common exhaust lines. The device may include a second row of depositors of a second redundant group, each of which is connected in parallel to second common delivery and second common exhaust lines. The first row of depositors and the second row of depositors may operate independently from one another. The device may be disposed within a deposition chamber and in proximity of a substrate.

    Organic vapor jet print head with redundant groups of depositors
    50.
    发明授权
    Organic vapor jet print head with redundant groups of depositors 有权

    公开(公告)号：US11121320B2

    公开(公告)日：2021-09-14

    申请号：US16400218

    申请日：2019-05-01

    Applicant: Universal Display Corporation

    Inventor： William E. Quinn ,  Gregory McGraw ,  Gregg Kottas ,  Xin Xu ,  Julia J. Brown

    IPC: H01L51/56 ,  H01L51/00 ,  B05B12/18 ,  H01L51/50

    Abstract: Embodiments of the disclosed subject matter provide a device including a micronozzle array having separate redundant groups of depositors that each include a delivery aperture disposed between two exhaust apertures. The device may include a first row of depositors of a first redundant group, each of which may be connected in parallel to first common delivery lines and first common exhaust lines. The device may include a second row of depositors of a second redundant group, each of which is connected in parallel to second common delivery and second common exhaust lines. The first row of depositors and the second row of depositors may operate independently from one another. The device may be disposed within a deposition chamber and in proximity of a substrate.

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