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公开(公告)号:US07098455B2
公开(公告)日:2006-08-29
申请号:US10404451
申请日:2003-04-02
申请人: Hiroyuki Shinada , Atsuko Takafuji , Takanori Ninomiya , Yuko Sasaki , Mari Nozoe , Hisaya Murakoshi , Taku Ninomiya , Yuji Kasai , Hiroshi Makino , Yutaka Kaneko , Kenji Tanimoto
发明人: Hiroyuki Shinada , Atsuko Takafuji , Takanori Ninomiya , Yuko Sasaki , Mari Nozoe , Hisaya Murakoshi , Taku Ninomiya , Yuji Kasai , Hiroshi Makino , Yutaka Kaneko , Kenji Tanimoto
IPC分类号: H01J37/28
CPC分类号: G01N23/225 , G01R31/307 , H01J37/28 , H01J2237/2817
摘要: A circuit pattern inspecting instrument includes an electron-optical system for irradiating an electron beam on a sample, an electron beam deflector, a detector for detecting secondary charged particles from the sample, and a mode setting unit for switching between a first mode and a second mode. An electron beam current is larger in the first mode than in the second mode, and an electron beam scanning speed is higher in the first mode than in the second mode. The circuit pattern inspecting instrument is configured so that first the sample is observed in the first mode, then a particular position on the sample is selected based on image data produced by an output of the detector in the first mode, and then the particular position on the sample is observed in the second mode.
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公开(公告)号:US6088302A
公开(公告)日:2000-07-11
申请号:US65987
申请日:1998-04-24
申请人: Kenichi Nakajima , Takayuki Satodate , Akihiro Matouge , Akihiko Inada , Mitsuru Ishii , Yoshio Koyama , Shigeo Suzuki , Masayuki Kawata , Yuko Sasaki , Eriko Takakuwa
发明人: Kenichi Nakajima , Takayuki Satodate , Akihiro Matouge , Akihiko Inada , Mitsuru Ishii , Yoshio Koyama , Shigeo Suzuki , Masayuki Kawata , Yuko Sasaki , Eriko Takakuwa
CPC分类号: G04C17/0066 , G04C3/12
摘要: To provide an electronic timepiece enabling reliable detection of a state of rotation of an indication wheel such as a date dial.An ultrasonic motor 1130 has an ultrasonic rotor pinion 1134b. A date dial 1120 is disposed on a main plate 1102 in such a way as to rotate relative thereto. The ultrasonic rotor pinion 1134b is meshed with an intermediate date driving gear wheel 1142a. A date driving wheel 1150 is rotatably disposed on the main plate 1102. A date driving gear wheel 1150b is meshed with an intermediate date driving pinion 1142b. A date driving gear portion 1150b is meshed with a dial gear portion 1120a. A contact point spring 1160 is disposed on a spring guiding portion 1150d. The contact point spring 1160 rotates integrally with the date driving wheel 1150 through the rotation of the date driving wheel 1150. The state of rotation of the date driving wheel 1150 can be detected by contact of the contact point spring 1160 with the contact point pattern 1174.
摘要翻译: 提供能够可靠地检测诸如日期拨盘的指示轮的旋转状态的电子钟表。 超声波马达1130具有超声波转子小齿轮1134b。 日历指示盘1120以相对于其旋转的方式设置在主板1102上。 超声波转子小齿轮1134b与中间日期驱动齿轮1142a啮合。 日期驱动轮1150可旋转地设置在主板1102上。日期驱动齿轮1150b与中间日期驱动小齿轮1142b啮合。 日期驱动齿轮部分1150b与表盘齿轮部分1120a啮合。 接触点弹簧1160设置在弹簧引导部分1150d上。 接触点弹簧1160通过日期驱动轮1150的旋转与日期驱动轮1150一体地旋转。日期驱动轮1150的旋转状态可以通过接触点弹簧1160与接触点图案1174的接触来检测 。
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