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公开(公告)号:US20150155193A1
公开(公告)日:2015-06-04
申请号:US14094601
申请日:2013-12-02
申请人: Chih-Hsun Hsu , Tza-Jing Gung , Benjamin Schwarz , Shahid Rauf , Ankur Agarwal , Vijay D. Parkhe , Michael D. Willwerth , Zhiqiang Guo
发明人: Chih-Hsun Hsu , Tza-Jing Gung , Benjamin Schwarz , Shahid Rauf , Ankur Agarwal , Vijay D. Parkhe , Michael D. Willwerth , Zhiqiang Guo
IPC分类号: H01L21/683 , H01L21/67
CPC分类号: H01L21/6833 , H01J37/3266 , H01J37/32715
摘要: Electrostatic chucks with variable pixelated magnetic field are described. For example, an electrostatic chuck (ESC) includes a ceramic plate having a front surface and a back surface, the front surface for supporting a wafer or substrate. A base is coupled to the back surface of the ceramic plate. A plurality of electromagnets is disposed in the base, the plurality of electromagnets configured to provide pixelated magnetic field tuning capability for the ESC.
摘要翻译: 描述了具有可变像素化磁场的静电卡盘。 例如,静电卡盘(ESC)包括具有前表面和后表面的陶瓷板,前表面用于支撑晶片或基板。 基座耦合到陶瓷板的背面。 多个电磁铁设置在基座中,多个电磁铁构造成为ESC提供像素化的磁场调谐能力。
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公开(公告)号:US06723721B2
公开(公告)日:2004-04-20
申请号:US10027789
申请日:2001-12-20
IPC分类号: A61K31495
CPC分类号: C07D471/16 , C07D487/16
摘要: Compounds are disclosed which have utility in the treatment of a variety of disorders, including the treatment of disorders manifesting hypersecretion of CRF in a warm-blooded animals, including stroke. The compounds of this invention have the following structures: wherein n, m, R, R1, R2, X and Ar are as defined herein, including stereoisomes and pharmaceutically acceptable salts thereof.
摘要翻译: 公开了可用于治疗多种疾病的化合物,包括治疗在温血动物(包括中风)中表现出CRF过度分泌的病症。 本发明的化合物具有以下结构:其中n,m,R,R 1,R 2,X和Ar如本文所定义,包括立体异构体及其药学上可接受的盐。
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公开(公告)号:US06348466B1
公开(公告)日:2002-02-19
申请号:US09439841
申请日:1999-11-12
IPC分类号: A61K31495
CPC分类号: C07D471/16 , C07D487/16
摘要: Compounds are disclosed which have utility in the treatment of a variety of disorders, including the treatment of disorders manifesting hypersecretion of CRF in a warm-blooded animals, including stroke. The compounds of this invention have the following structures: wherein n, m, R, R1, R2, X and Ar are as defined herein, including stereoisomes and pharmaceutically acceptable salts thereof.
摘要翻译: 公开了可用于治疗多种疾病的化合物,包括治疗在温血动物(包括中风)中表现出CRF过度分泌的病症。 本发明的化合物具有以下结构:其中n,m,R,R 1,R 2,X和Ar如本文所定义,包括立体异构体及其药学上可接受的盐。
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