公开(公告)号：US20210249473A1

公开(公告)日：2021-08-12

申请号：US17223822

申请日：2021-04-06

Applicant: Monolithic 3D Inc.

Inventor： Deepak C. Sekar ,  Zvi Or-Bach

IPC: H01L27/24 ,  H01L21/268 ,  H01L21/683 ,  H01L21/762 ,  H01L21/822 ,  H01L21/84 ,  H01L27/06 ,  H01L27/108 ,  H01L27/11 ,  H01L27/11529 ,  H01L27/11551 ,  H01L27/11578 ,  H01L27/12 ,  H01L29/78 ,  H01L29/423 ,  H01L27/22

Abstract: A 3D semiconductor device, the device including: a first level including a first single crystal layer and first transistors, where the first transistors each include a single crystal channel; first metal layers interconnecting at least the first transistors; and a second level including a second single crystal layer and second transistors, where the second level overlays the first level, where the second transistors are horizontally oriented and include a gate dielectric, where the gate dielectric includes hafnium oxide, where the second level is bonded to the first level, and where the bonded includes oxide to oxide bonds.

公开(公告)号：US20210249296A1

公开(公告)日：2021-08-12

申请号：US17232122

申请日：2021-04-15

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak C. Sekar

IPC: H01L21/683 ,  H01L21/74 ,  H01L21/762 ,  H01L21/768 ,  H01L21/822 ,  H01L21/8238 ,  H01L21/84 ,  H01L23/48 ,  H01L23/525 ,  H01L27/02 ,  H01L27/06 ,  H01L27/092 ,  H01L27/10 ,  H01L27/105 ,  H01L27/108 ,  H01L27/11 ,  H01L27/112 ,  H01L27/11526 ,  H01L27/11529 ,  H01L27/11551 ,  H01L27/11573 ,  H01L27/11578 ,  H01L27/118 ,  H01L27/12 ,  H01L29/423 ,  H01L29/66 ,  H01L29/78 ,  H01L29/788 ,  H01L29/792 ,  G11C8/16

Abstract: A 3D semiconductor device, the device including: a first level including a first single crystal layer, the first level including first transistors, where the first transistors each include a single crystal channel; first metal layers interconnecting at least the first transistors; and a second level including a second single crystal layer, the second level including second transistors, where the second level overlays the first level, where the second level is bonded to the first level, where the bonded includes oxide to oxide bonds, where the bonded includes metal to metal bonds, where the second level includes an array of memory cells, and where each of the memory cells includes at least one recessed-channel-array-transistor (RCAT).

公开(公告)号：US20210242368A1

公开(公告)日：2021-08-05

申请号：US17216597

申请日：2021-03-29

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar

IPC: H01L33/16 ,  H01L33/62 ,  H01L27/15 ,  H01L25/075

Abstract: A 3D micro display, the 3D micro display including: a first single crystal layer including a first plurality of light emitting diodes (LEDs), a second single crystal layer including a second plurality of light emitting diodes (LEDs), where the first single crystal layer includes at least ten individual first LED pixels, where the second single crystal layer includes at least ten individual second LED pixels, where the first plurality of light emitting diodes (LEDs) emits a first light with a first wavelength, where the second plurality of light emitting diodes (LEDs) emits a second light with a second wavelength, where the first wavelength and the second wavelength differ by greater than 10 nm, and where the 3D micro display includes an oxide to oxide bonding structure.

公开(公告)号：US20210242227A1

公开(公告)日：2021-08-05

申请号：US17235879

申请日：2021-04-20

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han ,  Eli Lusky

IPC: H01L27/11556 ,  H01L29/78 ,  H01L27/11582 ,  G11C5/06

Abstract: A 3D memory device, the device including: a plurality of memory cells, where each of the plurality of memory cells includes at least one memory transistor, where each of the at least one memory transistor includes a source, a drain and a channel; a plurality of bit-line pillars, where each of the plurality of bit-line pillars is directly connected to a plurality of the source or the drain, where the bit-line pillars are vertically oriented, where the channel is horizontally oriented, and where the channel includes a circular shape or an ellipsoidal shape.

公开(公告)号：US20210242068A1

公开(公告)日：2021-08-05

申请号：US17234207

申请日：2021-04-19

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak C. Sekar

IPC: H01L21/683 ,  H01L21/74 ,  H01L21/762 ,  H01L21/768 ,  H01L21/822 ,  H01L21/8238 ,  H01L21/84 ,  H01L23/48 ,  H01L23/525 ,  H01L27/02 ,  H01L27/06 ,  H01L27/092 ,  H01L27/10 ,  H01L27/105 ,  H01L27/108 ,  H01L27/11 ,  H01L27/112 ,  H01L27/11526 ,  H01L27/11529 ,  H01L27/11551 ,  H01L27/11573 ,  H01L27/11578 ,  H01L27/118 ,  H01L27/12 ,  H01L29/423 ,  H01L29/66 ,  H01L29/78 ,  H01L29/788 ,  H01L29/792 ,  G11C8/16

Abstract: A 3D semiconductor device, the device including: a first level including a first single crystal layer and first single crystal transistors; a first metal layer interconnecting the first single crystal transistors; second transistors disposed atop of the first single crystal transistors; third transistors disposed atop of the second transistors; fourth transistors disposed atop of the third transistors; where the fourth transistors include replacement gates, being processed to replace a non-metal gate material with a metal based gate, and where a distance from at least one of the fourth transistors to at least one of the second transistors is less than 1 micron.

公开(公告)号：US20210233901A1

公开(公告)日：2021-07-29

申请号：US17214883

申请日：2021-03-28

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han ,  Brian Cronquist

IPC: H01L25/18 ,  H01L21/78 ,  H01L21/66 ,  H01L23/00 ,  H01L25/065 ,  H01L25/00

Abstract: A method to construct a 3D system, the method including: providing a base wafer; and then transferring a memory control on top; and then thinning the memory control, transferring a first memory wafer on top; and then thinning the first memory wafer; and then transferring a second memory wafer on top; and then thinning the second memory wafer. A 3D device, the device including: a first stratum including first bit-cell memory arrays; a second stratum including second bit-cell memory arrays; and a third stratum, where the second stratum overlays the first stratum, where the first stratum overlays the third stratum, where the third stratum includes a plurality of word-line decoders to control the first bit-cell memory arrays and the second bit-cell memory arrays.

公开(公告)号：US11018133B2

公开(公告)日：2021-05-25

申请号：US16945796

申请日：2020-07-31

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L27/06 ,  G03F9/00 ,  H01L21/762 ,  H01L21/84 ,  H01L23/48 ,  H01L23/544 ,  H01L27/02 ,  H01L27/105 ,  H01L27/108 ,  H01L27/11 ,  H01L27/112 ,  H01L27/11551 ,  H01L27/11578 ,  H01L27/118 ,  H01L27/12 ,  H01L29/66 ,  H01L29/45 ,  H01L29/786 ,  H01L27/092 ,  H01L21/8238 ,  H01L29/812 ,  H01L29/423 ,  H01L29/732 ,  H01L29/808 ,  H01L21/768 ,  H01L21/822 ,  H01L23/367 ,  H01L23/522 ,  H01L23/528 ,  H01L23/532 ,  H01L23/00 ,  H01L21/268 ,  H01L27/088

Abstract: A 3D integrated circuit, the circuit including: a first wafer including a first crystalline substrate, a plurality of first transistors, and first copper interconnecting layers, where the first copper interconnecting layers at least interconnect the plurality of first transistors; and a second wafer including a second crystalline substrate, a plurality of second transistors, and second copper interconnecting layers, where the second copper interconnecting layers at least interconnect the plurality of second transistors; where the second wafer is bonded face-to-face on top of the first wafer, where the bonded includes copper to copper bonding; and where the second crystalline substrate has been thinned to a thickness of less than 5 micro-meters.

公开(公告)号：US11018042B1

公开(公告)日：2021-05-25

申请号：US17145296

申请日：2021-01-09

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak C. Sekar

IPC: H01L21/683 ,  H01L21/74 ,  H01L21/762 ,  H01L21/768 ,  H01L21/822 ,  H01L21/8238 ,  H01L21/84 ,  H01L23/48 ,  H01L23/525 ,  H01L27/02 ,  H01L27/06 ,  H01L27/092 ,  H01L27/10 ,  H01L27/105 ,  H01L27/108 ,  H01L27/11 ,  H01L27/112 ,  H01L27/11526 ,  H01L27/11529 ,  H01L27/11551 ,  H01L27/11573 ,  H01L27/11578 ,  H01L27/118 ,  H01L27/12 ,  H01L29/423 ,  H01L29/66 ,  H01L29/78 ,  H01L29/788 ,  H01L29/792 ,  G11C8/16 ,  H01L23/367 ,  H01L25/065 ,  H01L25/00 ,  H01L23/00

Abstract: A 3D semiconductor device, the device including: a first single crystal layer including a plurality of first transistors and at least one metal layer, where the at least one metal layer interconnecting the first transistors; a plurality of first logic gates including the at least one metal layer interconnecting the first transistors; a plurality of second transistors atop the at least one metal layer; a plurality of third transistors atop the second transistors; a top metal layer atop the third transistors; and a memory array including wordlines, where the memory array includes at least four rows by four columns of memory mini arrays, where each of the mini arrays includes at least four rows by four columns of memory cells, and where each of the memory cells includes at least one of the second transistors or at least one of the third transistors.

公开(公告)号：US11011507B1

公开(公告)日：2021-05-18

申请号：US17147989

申请日：2021-01-13

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach

IPC: H01L23/02 ,  H01L21/00 ,  H01L25/18 ,  H01L23/544 ,  H01L25/00 ,  H01L23/48

Abstract: A 3D semiconductor device, the device including: a first die comprising first transistors and a first interconnect; and a second die comprising second transistors and a second interconnect, wherein said first die is overlaid by said second die, wherein said first die has a first die area and said second die has a second die area, wherein said first die area is at least 10% larger than said second die area, wherein said second die is pretested, wherein said second die is bonded to said first die, wherein said bonded comprises metal to metal bonding, wherein said first die comprises at least two first alignment marks positioned close to a first die edge of said first die, and wherein said second die comprises at least two second alignment marks positioned close to a second die edge of said second die.

公开(公告)号：US20210134642A1

公开(公告)日：2021-05-06

申请号：US17145296

申请日：2021-01-09

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak C. Sekar

IPC: H01L21/683 ,  H01L21/74 ,  H01L21/762 ,  H01L21/768 ,  H01L21/822 ,  H01L21/8238 ,  H01L21/84 ,  H01L23/48 ,  H01L23/525 ,  H01L27/02 ,  H01L27/06 ,  H01L27/092 ,  H01L27/10 ,  H01L27/105 ,  H01L27/108 ,  H01L27/11 ,  H01L27/112 ,  H01L27/11526 ,  H01L27/11529 ,  H01L27/11551 ,  H01L27/11573 ,  H01L27/11578 ,  H01L27/118 ,  H01L27/12 ,  H01L29/423 ,  H01L29/66 ,  H01L29/78 ,  H01L29/788 ,  H01L29/792 ,  G11C8/16

Abstract: A 3D semiconductor device, the device including: a first single crystal layer including a plurality of first transistors and at least one metal layer, where the at least one metal layer interconnecting the first transistors; a plurality of first logic gates including the at least one metal layer interconnecting the first transistors; a plurality of second transistors atop the at least one metal layer; a plurality of third transistors atop the second transistors; a top metal layer atop the third transistors; and a memory array including wordlines, where the memory array includes at least four rows by four columns of memory mini arrays, where each of the mini arrays includes at least four rows by four columns of memory cells, and where each of the memory cells includes at least one of the second transistors or at least one of the third transistors.