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1.
公开(公告)号:US20250040141A1
公开(公告)日:2025-01-30
申请号:US18739083
申请日:2024-06-10
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han , Brian Cronquist , Eli Lusky
Abstract: A 3D semiconductor device including dicing including an etch process; and including: a first level including a single crystal layer, and a memory control circuit which includes first transistors; a first metal layer overlaying the first single crystal layer; a second metal layer overlaying the first metal layer; a third metal layer overlaying the second metal layer; second transistors—which may include a metal gate—disposed atop the third metal layer; third transistors disposed atop the second transistors; a fourth metal layer disposed atop the third transistors; a memory array including word-lines and at least four memory mini arrays (each mini array includes at least four rows by four columns of memory cells), each memory cell includes at least one second transistor or at least one third transistor; and a connection path from fourth metal to third metal, the path includes a via disposed through the memory array.
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公开(公告)号:US12183699B2
公开(公告)日:2024-12-31
申请号:US18106484
申请日:2023-02-07
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han , Brian Cronquist
IPC: H01L23/00 , H01L23/473 , H01L23/66 , H01L25/16 , H10B80/00
Abstract: A 3D semiconductor device comprising: a first level; and a second level, wherein said first level comprises single crystal silicon and a plurality of logic circuits, wherein said plurality of logic circuits each comprise first transistors, wherein said second level is disposed above said first level and comprises a plurality of arrays of memory cells, said second level comprises a plurality of second transistors, wherein each of said memory cells comprises at least one of said second transistors, wherein said first level is bonded to said second level, wherein said bonded comprises regions of oxide to oxide bonds, wherein said bonded comprises regions of metal to metal bonds; and a thermal isolation layer disposed between said first level and said second level, wherein said thermal isolation layer provides a greater than 20° C. differential temperature between said first level and said second level during nominal operation of said device.
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3.
公开(公告)号:US20240389366A1
公开(公告)日:2024-11-21
申请号:US18786372
申请日:2024-07-26
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han , Brian Cronquist
IPC: H10B80/00 , H01L23/00 , H01L25/065 , H01L25/18
Abstract: An integrated semiconductor device including: a first level; a second level, where the first level includes single crystal silicon and a plurality of logic circuits, where the plurality of logic circuits each include first transistors, where the second level is disposed above the first level and includes a plurality of arrays of first memory cells, where the second level includes second transistors, where each of the first memory cells includes at least one of the second transistors, where the first level is bonded to the second level; an array of processors; and a third level, where the third level includes third transistors, where the third level is disposed above the second level and includes a plurality of arrays of second memory cells, where each of the second memory cells includes at least one of the third transistors, where the device includes a substrate area greater than 1,000 mm2.
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公开(公告)号:US12114494B2
公开(公告)日:2024-10-08
申请号:US17461075
申请日:2021-08-30
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han , Eli Lusky
Abstract: A 3D memory device, the device including: a first vertical pillar, the first vertical pillar includes a transistor source; a second vertical pillar, the second vertical pillar includes the transistor drain, where the first vertical pillar and the second vertical pillar each functions as a source or functions as a drain for a plurality of overlaying horizontally-oriented memory transistors, where at least of one of the plurality of overlaying horizontally-oriented memory transistors is disposed between the first vertical pillar and the second vertical pillar, where the plurality of overlaying horizontally-oriented memory transistors are self-aligned being formed following a same lithography step, and where the first vertical pillar includes metal.
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公开(公告)号:US20240260282A1
公开(公告)日:2024-08-01
申请号:US18593884
申请日:2024-03-02
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han
IPC: H10B80/00 , H01L23/00 , H01L25/00 , H01L25/065 , H01L25/18
CPC classification number: H10B80/00 , H01L24/08 , H01L24/80 , H01L25/0657 , H01L25/18 , H01L25/50 , H01L2224/08145 , H01L2224/80895 , H01L2224/80896 , H01L2924/1431 , H01L2924/14511
Abstract: A 3D semiconductor device, the device including: a first level including a first single crystal layer and a memory control circuit, the memory control circuit including a plurality of first transistors; a first metal layer overlaying the first single crystal layer; a second metal layer overlaying the first metal layer; a plurality of second transistors disposed atop the second metal layer; a third metal layer disposed above the plurality of second transistors; and a memory array including word-lines and memory cells, where the memory array includes at least four memory mini arrays, where at least one of the plurality of second transistors includes a metal gate, where each of the memory cells includes at least one of the plurality of second transistors, and where the memory control circuit includes at least one power down control circuit.
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公开(公告)号:US20240215274A1
公开(公告)日:2024-06-27
申请号:US18593727
申请日:2024-03-01
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han
IPC: H10B80/00 , H01L23/00 , H01L25/00 , H01L25/065 , H01L25/18
CPC classification number: H10B80/00 , H01L24/08 , H01L24/80 , H01L25/0657 , H01L25/18 , H01L25/50 , H01L2224/08145 , H01L2224/80006 , H01L2224/80895 , H01L2224/80896 , H01L2924/1431 , H01L2924/14511
Abstract: A 3D semiconductor device, the device including: a first level including a first single crystal layer and a memory control circuit, the memory control circuit including a plurality of first transistors; a first metal layer overlaying the first single crystal layer; a second metal layer overlaying the first metal layer; a plurality of second transistors disposed atop the second metal layer; a third metal layer disposed atop the plurality of second transistors; and a memory array including word-lines and memory cells, where the memory array includes at least four memory mini arrays, where at least one of the plurality of second transistors includes a metal gate, where each of the memory cells includes at least one of the plurality of second transistors, and where the memory control circuit includes at least one Look Up Table circuit (“LUT”).
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公开(公告)号:US20240147740A1
公开(公告)日:2024-05-02
申请号:US18407096
申请日:2024-01-08
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han , Eli Lusky
IPC: H10B80/00 , H01L23/00 , H01L25/065 , H01L25/18
CPC classification number: H10B80/00 , H01L24/08 , H01L25/0657 , H01L25/18 , H01L2224/08145 , H01L2924/1431 , H01L2924/14511
Abstract: A 3D memory device, the device including: a first structure including a plurality of memory cells, where each memory cell of the plurality of memory cells includes at least one memory transistor, where each of the at least one memory transistor includes a source, a drain, and a channel; a plurality of memory-line pillars, where each memory-line pillar of the plurality of memory-line pillars is directly connected to a plurality of the source or the drain, where the plurality of memory-line pillars are vertically oriented, and where the at least one memory transistor is self-aligned to an overlaying another the at least one memory transistor, both being processed following a same lithography step; and a control level including a memory controller circuit, where the memory controller circuit includes a row buffer, where the control level is bonded to the first structure, and where the bonded includes hybrid bonding.
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公开(公告)号:US11963373B1
公开(公告)日:2024-04-16
申请号:US18407096
申请日:2024-01-08
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han , Eli Lusky
IPC: H10B80/00 , H01L23/00 , H01L25/065 , H01L25/18
CPC classification number: H10B80/00 , H01L24/08 , H01L25/0657 , H01L25/18 , H01L2224/08145 , H01L2924/1431 , H01L2924/14511
Abstract: A 3D memory device, the device including: a first structure including a plurality of memory cells, where each memory cell of the plurality of memory cells includes at least one memory transistor, where each of the at least one memory transistor includes a source, a drain, and a channel; a plurality of memory-line pillars, where each memory-line pillar of the plurality of memory-line pillars is directly connected to a plurality of the source or the drain, where the plurality of memory-line pillars are vertically oriented, and where the at least one memory transistor is self-aligned to an overlaying another the at least one memory transistor, both being processed following a same lithography step; and a control level including a memory controller circuit, where the memory controller circuit includes a row buffer, where the control level is bonded to the first structure, and where the bonded includes hybrid bonding.
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公开(公告)号:US20240090242A1
公开(公告)日:2024-03-14
申请号:US18388840
申请日:2023-11-12
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han , Brian Cronquist
IPC: H10B80/00 , H01L23/00 , H01L25/00 , H01L25/065 , H01L25/18
CPC classification number: H10B80/00 , H01L24/08 , H01L24/80 , H01L25/0657 , H01L25/18 , H01L25/50 , H01L2224/08145 , H01L2224/80895 , H01L2224/80896 , H01L2924/1431 , H01L2924/1436 , H01L2924/14511
Abstract: A semiconductor device including: a first level including first memory arrays, a plurality of first transistors, and a plurality of first metal layers; a second level disposed on top of the first level, where the second level includes second memory arrays; a third level disposed on top of the second level, where the third level includes a plurality of third transistors and a plurality of third metal layers, where the third level is bonded to the second level, where the bonded includes oxide to oxide bonding regions and a plurality of metal to metal bonding regions, where the first level includes first filled holes, where the second level includes second filled holes, where the second filled holes are aligned to the first filled holes with a more than 1 nm but less than 40 nm alignment error, and where the third level includes decoder circuits.
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公开(公告)号:US20240090241A1
公开(公告)日:2024-03-14
申请号:US18385383
申请日:2023-10-31
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han
IPC: H10B80/00 , H01L23/00 , H01L25/00 , H01L25/065 , H01L25/18
CPC classification number: H10B80/00 , H01L24/08 , H01L24/80 , H01L25/0657 , H01L25/18 , H01L25/50 , H01L2224/08145 , H01L2224/80006 , H01L2224/80895 , H01L2224/80896 , H01L2924/1431 , H01L2924/14511
Abstract: A 3D semiconductor device, the device including: a first level including first single crystal transistors; and a second level including second single crystal transistors, where the first level is overlaid by the second level, where the first level includes a transferred layer and a bonded layer, where the second level is bonded to the first level, where the bonded second level includes oxide to oxide bonds, where the bonded second level includes metal to metal bonds, where the first level includes memory periphery circuits, where the second level includes a plurality of memory cells, and where the first level includes at least one Look up Table (“LUT”) circuit.
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