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公开(公告)号：US11211222B2
公开(公告)日：2021-12-28
申请号：US16730998
申请日：2019-12-30
申请人： FEI Company
IPC分类号： H01J37/244 , H01J37/28 , G01N23/20058 , H01J37/22
摘要： Automatic alignment of the zone axis of a sample and a charged particle beam is achieved based on a diffraction pattern of the sample. An area corresponding to the Laue circle is segmented using a trained network. The sample is aligned with the charged particle beam by tilting the sample with a zone axis tilt determined based on the segmented area.
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公开(公告)号：US11175242B2
公开(公告)日：2021-11-16
申请号：US15926621
申请日：2018-03-20
申请人： FEI Company
发明人： Andrew Kingston , Olaf Delgado-Friedrichs , Glenn Myers , Shane Latham , Adrian Sheppard , Trond Varslot , Petr St{hacek over (r)}elec
IPC分类号： G06K9/00 , G01N23/046
摘要： Methods and apparatuses are disclosed herein to correct for inconsistencies in CT scans based on pi-lines. An example method at least includes acquiring a plurality of projections of a sample, each projection of the plurality of projections acquired at a different location around the sample based on a trajectory, determining pairs of opposing projections from the plurality of projections based on a respective pi-line, and determining an amount of inconsistency between respective pi-line data for each pair of opposing projections, where the pi-line data is based, at least in part, on attenuation data.
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公开(公告)号：US11171048B2
公开(公告)日：2021-11-09
申请号：US16816695
申请日：2020-03-12
申请人： FEI Company
IPC分类号： H01L21/768 , H01L21/02 , G03F1/84
摘要： Adaptive endpoint detection is applied to delayering of a multi-layer sample utilizing a combination of dynamic and predetermined parameters. Tuned predetermined parameters, varying between layers of the sample, allow automated operation across multiple sites of a device. A semiconductor logic device is described, having a zone of thick metal layers and a zone of thin metal layers. The described techniques can be integrated with analysis operations and can be applied across a wide range of device types and manufacturing processes.
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公开(公告)号：US11151356B2
公开(公告)日：2021-10-19
申请号：US16287982
申请日：2019-02-27
申请人： FEI Company
发明人： John Flanagan , Erik Franken , Maurice Peemen
摘要： Convolutional neural networks (CNNs) of a set of CNNs are evaluated using a test set of images (electron micrographs) associated with a selected particle type. A preferred CNN is selected based on the evaluation and used for processing electron micrographs of test samples. The test set of images can be obtained by manual selection or generated using a model of the selected particle type. Upon selection of images using the preferred CNN in processing additional electron micrographs, the selected images can be added to a training set or used as an additional training set to retrain the preferred CNN. In some examples, only selected layers of the preferred CNN are retrained. In other examples, two dimensional projections of based on particles of similar structure are used for CNN training or retraining.
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公开(公告)号：US20210316989A1
公开(公告)日：2021-10-14
申请号：US17356744
申请日：2021-06-24
申请人： FEI Company
发明人： Clive Chandler
摘要： Disclosed herein are embodiments of a method and system for producing a halogen gas. The method may comprise contacting a solid oxidizing agent with a vapor comprising a halide compound, to produce a gas stream comprising a halogen corresponding to the halide in the halide compound. The halide compound may be an acyl halide, such as an acetyl halide or an oxalyl halide. The oxidizing agent may be any suitable oxidizing agent, and in certain examples, potassium permanganate is used. The method may be performed under a reduced pressure. Also disclosed herein is a system suitable to perform the disclosed method. The system may comprise a reservoir, an oxidizing agent support and a gas stream outlet.
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公开(公告)号：US11072528B2
公开(公告)日：2021-07-27
申请号：US16390617
申请日：2019-04-22
申请人： FEI Company
发明人： Clive Chandler
摘要： Disclosed herein are embodiments of a method and system for producing a halogen gas. The method may comprise contacting a solid oxidizing agent with a vapor comprising a halide compound, to produce a gas stream comprising a halogen corresponding to the halide in the halide compound. The halide compound may be an acyl halide, such as an acetyl halide or an oxalyl halide. The oxidizing agent may be any suitable oxidizing agent, and in certain examples, potassium permanganate is used. The method may be performed under a reduced pressure. Also disclosed herein is a system suitable to perform the disclosed method. The system may comprise a reservoir, an oxidizing agent support and a gas stream outlet.
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公开(公告)号：US11069509B1
公开(公告)日：2021-07-20
申请号：US16819945
申请日：2020-03-16
申请人： FEI Company
发明人： James Clarke , Brian Routh, Jr. , Micah LeDoux , Cliff Bugge
IPC分类号： H01J37/304 , H01J37/305 , G01N1/32 , G01N23/2202 , H01J37/22 , H01J37/28 , G01N23/2251
摘要： The backside of a planar view lamella is prepared from a sample extracted from a workpiece. The sample includes multiple device layers and a substrate layer. After removing at least a part of the substrate layer covering a final device layer to obtain a sample surface, a region of interest (ROI) relative to the sample surface is alternately scanned with an electron beam and spontaneously etched until the final device layer within the ROI is exposed. One or more device layers may be removed from the sample backside after the final device layer is exposed to obtain the backside of the planar view lamella.
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公开(公告)号：US20210151281A1
公开(公告)日：2021-05-20
申请号：US16686004
申请日：2019-11-15
申请人： FEI Company
发明人： Albert Visscher
摘要： A positioning system for an electron microscope includes a first carriage comprising a holder for holding a workpiece and a second carriage. The first carriage being coupled to one or more first drive units configured to position the workpiece along first, second, and third axes, and along a first tilt axis. The second carriage housing the one or more first drive units and being coupled to one or more second drive units configured to position the workpiece along a second tilt axis.
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公开(公告)号：US11004655B2
公开(公告)日：2021-05-11
申请号：US16738992
申请日：2020-01-09
申请人： FEI Company
发明人： Bart Buijsse , Maarten Kuijper
IPC分类号： H01J37/26 , H01J37/22 , H01J37/147 , H01J37/244
摘要： Techniques of using a Transmission Charged Particle Microscope for diffraction pattern detection are disclosed. An example method including irradiating at least a portion of a specimen with a charged particle beam, using an imaging system to collect charged particles that traverse the specimen during said irradiation, and to direct them onto a detector configured to operate in a particle counting mode, using said detector to record a diffraction pattern of said irradiated portion of the specimen, recording said diffraction pattern iteratively in a series of successive detection frames, and during recording of each frame, using a scanning assembly for causing relative motion of said diffraction pattern and said detector, so as to cause each local intensity maximum in said pattern to trace out a locus on said detector.
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公开(公告)号：US10998166B2
公开(公告)日：2021-05-04
申请号：US16712553
申请日：2019-12-12
申请人： FEI Company
发明人： Branislav Straka , Radek Smolka , Lukas Kral , Jan Skalicky
IPC分类号： H01J37/28
摘要： A charged-particle beam (CPB) is aligned to a primary axis of a CPB microscope by determining a first beam deflection drive to a beam deflector for directing the CPB passing a reference location displaced from the primary axis. The beam deflector is provided with a second beam deflection drive during the working mode of the CPB microscope to propagate the beam along the primary axis. The second beam deflection drive is determined based on the first beam deflection drive.
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