公开(公告)号：US10858227B2

公开(公告)日：2020-12-08

申请号：US16026182

申请日：2018-07-03

申请人： HIRATA CORPORATION

发明人： Bungo Matsumoto

IPC分类号： B66F1/00 ,  B66F7/02 ,  B66F17/00 ,  B66F19/00

摘要： A vertical moving method of a vertical moving unit on which a conveyance target object is mounted includes steps of causing a non-electric biasing unit to generate a biasing force to raise the vertical moving unit, causing an electric motor unit to generate a thrust in a direction to raise the vertical moving unit or a thrust in a direction to lower the vertical moving unit, and causing an electromagnetic brake unit to generate a braking force to resist a movement of the vertical moving unit. Independently of presence/absence of the object and a weight of the object, the thrust and/or the braking force is controlled such that the vertical moving unit stops when an external force of overload more than a predetermined value acts on the vertical moving unit during a vertical movement.

公开(公告)号：US10799990B2

公开(公告)日：2020-10-13

申请号：US15801769

申请日：2017-11-02

申请人： HIRATA CORPORATION

发明人： Hisayuki Sueoka

IPC分类号： B23P21/00 ,  B23P19/04 ,  F01L3/10 ,  F01L3/24

摘要： An assembling apparatus assembles a retainer by engaging a pair of cotter pieces with a valve stem. The apparatus includes an assembling head configured to hold, in a separated state, the pair of cotter pieces in the separated state prepared by a preparation unit and engage the pair of cotter pieces with the upper end of the valve stem. The head includes a storage member including a storage chamber, and a holding unit capable of pressing the pair of cotter pieces stored in the storage chamber against the upper end of the valve stem. The storage member includes first and second abutting portions. The second abutting portion positions the valve stem in the axial direction, and the first abutting portion positions the pair of cotter pieces in the axial direction.

公开(公告)号：US20200312690A1

公开(公告)日：2020-10-01

申请号：US16827801

申请日：2020-03-24

申请人： HIRATA CORPORATION

发明人： Itsuo FUJIWARA ,  Yoichi MATSUSHITA

IPC分类号： H01L21/677

摘要： A load port includes: a port plate; and a placing table on which a container that stores the substrate is placed. The placing table includes: a base portion; a dock plate; a support unit configured to support the dock plate such that the dock plate can move between the first position and a second position; and a cam mechanism configured to move the dock plate between the first position and the second position. The support unit includes a slider configured to move together with the dock plate. The cam mechanism includes: a driving mechanism provided on the base portion; and a cam plate which is connected to the slider and in which a cam groove is formed.

公开(公告)号：US20180312379A1

公开(公告)日：2018-11-01

申请号：US16026182

申请日：2018-07-03

申请人： HIRATA CORPORATION

发明人： Bungo MATSUMOTO

IPC分类号： B66F7/02 ,  B66F17/00

CPC分类号： B66F7/02 ,  B66F17/00 ,  B66F19/00

摘要： A vertical moving method of a vertical moving unit on which a conveyance target object is mounted includes steps of causing a non-electric biasing unit to generate a biasing force to raise the vertical moving unit, causing an electric motor unit to generate a thrust in a direction to raise the vertical moving unit or a thrust in a direction to lower the vertical moving unit, and causing an electromagnetic brake unit to generate a braking force to resist a movement of the vertical moving unit. Independently of presence/absence of the object and a weight of the object, the thrust and/or the braking force is controlled such that the vertical moving unit stops when an external force of overload more than a predetermined value acts on the vertical moving unit during a vertical movement.

公开(公告)号：US20180275441A1

公开(公告)日：2018-09-27

申请号：US15912782

申请日：2018-03-06

申请人： HIRATA CORPORATION

发明人： Akinori TASHIMA ,  Itsuo FUJIWARA

IPC分类号： G02F1/1333 ,  G02F1/1335 ,  C09J7/29 ,  C09J7/38 ,  B32B7/02 ,  B32B7/14 ,  G02F1/1337 ,  B32B37/06 ,  G02B5/30 ,  B32B37/12 ,  G06F3/041

摘要： A manufacturing system for manufacturing a laminated body by coating a first panel with an adhesive in a first working region and bonding the first panel coated with the adhesive and a second panel in a second working region includes a first conveying device in the first working region for conveying the first panel and the second panel, a coating device in the first working region for coating, with the adhesive, the first panel, a bonding device in the second working region for bonding the first panel and the second panel, and a second conveying device in the second working region for conveying the first panel and the second panel to the bonding device. The first conveying device and the second conveying device convey the first panel and the second panel to be bonded to each other as a set.

公开(公告)号：US10043689B2

公开(公告)日：2018-08-07

申请号：US14732064

申请日：2015-06-05

申请人： HIRATA CORPORATION

发明人： Jyunichi Hirakida

IPC分类号： H01L21/67

摘要： A chamber apparatus according to the present invention including a chamber main body including an opening portion in an upper surface; a door that opens/closes the opening portion; and a guide mechanism that slides the door with respect to the chamber main body. The door includes a movable member slidably supported by the guide mechanism; a first support provided on the movable member in a fixed manner; a door main body that opens/closes the opening portion; a second support provided on the door main body in a fixed manner; and a floating mechanism that connects the first support and the second support immovably in a horizontal direction and support the second support displaceably in a vertical direction with respect to the first support.

公开(公告)号：US20180178335A1

公开(公告)日：2018-06-28

申请号：US15902558

申请日：2018-02-22

申请人： HIRATA CORPORATION

发明人： Takeru HIGUCHI ,  Yuichi IWATA ,  Bungo MATSUMOTO

IPC分类号： B23Q1/52 ,  A47B11/00

CPC分类号： B23Q1/522 ,  A47B11/00 ,  A47B13/081 ,  B25H1/14

摘要： A turntable includes a rotatably supported table, an electric cylinder, and a cam mechanism configured to convert the linear motion of the electric cylinder into the rotary motion of the table. The cam mechanism includes at least one cam groove provided on the table side, and at least one cam follower moved in parallel to the linear motion direction of the electric cylinder and configured to engage with the at least one cam groove.

公开(公告)号：US20180117722A1

公开(公告)日：2018-05-03

申请号：US15801769

申请日：2017-11-02

申请人： HIRATA CORPORATION

发明人： Hisayuki SUEOKA

IPC分类号： B23P19/04 ,  B23P21/00

摘要： An assembling apparatus assembles a retainer by engaging a pair of cotter pieces with a valve stem. The apparatus includes an assembling head configured to hold, in a separated state, the pair of cotter pieces in the separated state prepared by a preparation unit and engage the pair of cotter pieces with the upper end of the valve stem. The head includes a storage member including a storage chamber, and a holding unit capable of pressing the pair of cotter pieces stored in the storage chamber against the upper end of the valve stem. The storage member includes first and second abutting portions. The second abutting portion positions the valve stem in the axial direction, and the first abutting portion positions the pair of cotter pieces in the axial direction.

公开(公告)号：USD811457S1

公开(公告)日：2018-02-27

申请号：US29544295

申请日：2015-11-02

申请人： HIRATA CORPORATION

设计人： Tetsuya Sakai ,  Hideki Sakaue

公开(公告)号：US09776333B2

公开(公告)日：2017-10-03

申请号：US15337073

申请日：2016-10-28

申请人： Hirata Corporation

发明人： Tetsuya Sakai ,  Hideki Sakaue

IPC分类号： H01L21/687 ,  B25J15/00 ,  B25J11/00

CPC分类号： B25J15/0014 ,  B25J11/0095 ,  H01L21/68707

摘要： A hand member forms a hand of a robot arm for transferring a semiconductor wafer. The hand member is a U-shaped member on which the semiconductor wafer is placed. The hand member includes at least one fitting portion on which a frictional holding member for holding the semiconductor wafer is fitted sideways, on each of an inner edge and an outer edge.