公开(公告)号：US06985024B2

公开(公告)日：2006-01-10

申请号：US10645161

申请日：2003-08-21

申请人： John A. Geen

发明人： John A. Geen

IPC分类号： H02M3/18 ,  G05F3/08

CPC分类号： H02M3/07

摘要： A voltage multiplier has a first stage that multiplies an input voltage, and a second stage that multiplies the output of the first stage. To that end, the voltage multiplier has the noted first stage having an input to receive the input voltage, and the second stage in series with the first stage. As noted above, the first stage is capable of multiplying the input voltage by a first amount to produce a first stage output voltage. The second stage thus has an input to receive the first stage output voltage. After receipt, the second stage is capable of multiplying the first stage output voltage by a second amount to produce a second stage output voltage.

摘要翻译： 电压倍增器具有将输入电压相乘的第一级和将第一级的输出相乘的第二级。 为此，电压倍增器具有所述第一级具有用于接收输入电压的输入，第二级与第一级串联。 如上所述，第一级能够将输入电压乘以第一量，以产生第一级输出电压。 因此，第二级具有用于接收第一级输出电压的输入。 在接收之后，第二级能够将第一级输出电压乘以第二量，以产生第二级输出电压。

公开(公告)号：US06925877B2

公开(公告)日：2005-08-09

申请号：US10404868

申请日：2003-04-01

申请人： John A. Geen ,  Donald W. Carow

发明人： John A. Geen ,  Donald W. Carow

IPC分类号： B81B3/00 ,  G01C19/5719 ,  G01D9/04

CPC分类号： G01C19/5719

摘要： A micromachined device has a body suspended over a substrate and movable in a plane relative to the substrate. The body has a perimeter portion, a first cross-piece portion extending from one part of the perimeter portion to another part of the perimeter portion to define at least first and second apertures, a first plurality of fingers extending along parallel axes from the perimeter portion into the first aperture, and a second plurality of fingers extending along parallel axes from the perimeter portion into the second aperture.

摘要翻译： 微加工装置具有悬挂在基板上并可在相对于基板的平面中移动的主体。 主体具有周边部分，第一横截面部分，其从周边部分的一部分延伸到周边部分的另一部分以限定至少第一和第二孔;第一多个指状物，其沿着平行的轴线从周边部分延伸 并且沿着平行的轴线从周边部分延伸到第二孔中的第二多个指状物。

公开(公告)号：US06684698B2

公开(公告)日：2004-02-03

申请号：US10294107

申请日：2002-11-14

申请人： John A. Geen ,  Donald W. Carow

发明人： John A. Geen ,  Donald W. Carow

IPC分类号： G01D904

CPC分类号： G01C19/5719

摘要： A micromachined device has a body suspended over a substrate and movable in a plane relative to the substrate. The body has a perimeter portion, a first cross-piece portion extending from one part of the perimeter portion to another part of the perimeter portion to define at least first and second apertures, a first plurality of fingers extending along parallel axes from the perimeter portion into the first aperture, and a second plurality of fingers extending along parallel axes from the perimeter portion into the second aperture.

摘要翻译： 微加工装置具有悬挂在基板上并可在相对于基板的平面中移动的主体。 主体具有周边部分，第一横截面部分，其从周边部分的一部分延伸到周边部分的另一部分以限定至少第一和第二孔;第一多个指状物，其沿着平行的轴线从周边部分延伸 并且沿着平行的轴线从周边部分延伸到第二孔中的第二多个指状物。

公开(公告)号：US06505512B2

公开(公告)日：2003-01-14

申请号：US10022690

申请日：2001-12-17

申请人： John A. Geen ,  Donald W. Carow

发明人： John A. Geen ,  Donald W. Carow

IPC分类号： G01P904

CPC分类号： G01C19/5719

摘要： A micromachined gyroscope has first and second coplanar bodies suspended over a substrate and movable in their plane relative to the substrate. The first body is dithered along a dither axis and is movable relative to the second body on the dither axis, but is rigidly connected for movement along an axis transverse to the dither axis. The second body is anchored so that it is substantially inhibited from moving along the dither axis, but can move with the first body along the transverse axis. The gyro has stop members and an anti-levitation system for preventing failure.

公开(公告)号：US06487908B2

公开(公告)日：2002-12-03

申请号：US10022681

申请日：2001-12-17

申请人： John A. Geen ,  Donald W. Carow

发明人： John A. Geen ,  Donald W. Carow

IPC分类号： G01P904

CPC分类号： G01C19/5719

摘要： A micromachined device has a first body suspended over a substrate in a plane parallel to the substrate and movable in the plane in a first direction relative to the substrate. A driver moves the first body in the first direction. A stop member, anchored to the substrate, limits motion of the body in the plane in a direction perpendicular to the first direction, and in a direction orthogonal to the plane and away from the substrate.

摘要翻译： 微加工装置具有在与基板平行的平面中的基板上悬挂的第一主体，并且可在相对于基板的第一方向的平面内移动。 驾驶员沿第一方向移动第一体。 锚定到基板上的止动构件限制了主体在与第一方向垂直的方向上的平面中的运动，并且在垂直于平面并远离基板的方向上。

公开(公告)号：US06481284B2

公开(公告)日：2002-11-19

申请号：US10022688

申请日：2001-12-17

申请人： John A. Geen ,  Donald W. Carow

发明人： John A. Geen ,  Donald W. Carow

IPC分类号： G01P904

CPC分类号： G01C19/5719

摘要： A micromachined device has first and second sets of interdigitating fingers movable on a plane parallel to a substrate. A first group of conductive members is formed on the substrate and is at the same DC voltage as a first group of fingers. A second group of conductive members is formed on the substrate and is electrically coupled to the second group of fingers. The conductive members help to prevent one group of fingers from levitating with respect to others.

摘要翻译： 微加工装置具有可在平行于基底的平面上移动的第一组和第二组交叉指状物。 第一组导电构件形成在衬底上并且处于与第一组手指相同的DC电压。 第二组导电构件形成在衬底上并且电耦合到第二组指状物。 导电构件有助于防止一组手指相对于其他手指悬浮。

公开(公告)号：US06470748B1

公开(公告)日：2002-10-29

申请号：US09679462

申请日：2000-10-04

申请人： John A. Geen

发明人： John A. Geen

IPC分类号： G01P904

CPC分类号： G01C19/5719

摘要： A mechanical rate gyroscope including a micro-fabricated mechanical sensor. The mechanical sensor includes a first segmented drive system used to impart vibration to a mass and a transverse segmented drive system used to cancel a Coriolis force applied to the mass when the mechanical sensor undergoes rotation. The mechanical rate gyroscope further includes a force-feedback control mechanism used to provide at least one cycle of drive signals employed by the first drive system to the transverse drive system. The force-feedback control mechanism generates a feedback signal used to control the polarity of the drive signals provided to the transverse drive system. The feedback signal has a pulse repetition frequency proportional to the applied angular rate. The proportionality constant relating the applied angular rate to the pulse repetition frequency includes transduction coefficients that are less sensitive to the mechanical and electrical properties of the gyroscope.

摘要翻译： 包括微机械传感器的机械速率陀螺仪。 机械传感器包括用于向质量传递振动的第一分段驱动系统和用于在机械传感器经受旋转时抵消施加到质量块上的科里奥利力的横向分段驱动系统。 机械速率陀螺仪还包括力反馈控制机构，其用于向第一驱动系统提供由第一驱动系统采用的驱动信号的至少一个循环。 力反馈控制机构产生用于控制提供给横向驱动系统的驱动信号的极性的反馈信号。 反馈信号具有与施加的角速率成比例的脉冲重复频率。 将应用角速率与脉冲重复频率相关的比例常数包括对陀螺仪的机械和电气特性较不敏感的转导系数。

公开(公告)号：US5394241A

公开(公告)日：1995-02-28

申请号：US283434

申请日：1988-12-12

申请人： John A. Geen

发明人： John A. Geen

IPC分类号： G01C19/64 ,  G01C19/66 ,  H01S3/083 ,  H01S3/0975 ,  G01B9/02

CPC分类号： H01S3/0975 ,  G01C19/661 ,  H01S3/09702

摘要： A ring laser gyroscope in which RF excitation is used to cause gas discharge as opposed to DC excitation which is used in conventional ring laser gyroscopes. External surfaces of the body of the ring laser gyroscope are metallized to form electrodes and an RF signal is capacitively coupled to gas reservoirs forming part of the lasing cavities.

摘要翻译： 与常规环形激光陀螺仪中使用的DC激励相反，使用RF激发来引起气体放电的环形激光陀螺仪。 环形激光陀螺仪的主体的外表面被金属化以形成电极，并且RF信号电容耦合到形成激光腔的一部分的气体储存器。

公开(公告)号：US5392650A

公开(公告)日：1995-02-28

申请号：US52017

申请日：1993-04-22

申请人： Benedict B. O'Brien ,  Brent E. Burns ,  John A. Geen

发明人： Benedict B. O'Brien ,  Brent E. Burns ,  John A. Geen

IPC分类号： G01P15/125 ,  B81B3/00 ,  G01C19/5719 ,  G01P15/13 ,  G01C19/56

CPC分类号： G01C19/5719 ,  G01P15/131 ,  G01P2015/0828

摘要： An integrated rate and acceleration sensor includes at least one accelerometer formed from a substantially planar silicon body. The at least one micro-silicon accelerometer (MSA) includes a first frame and a proof mass suspended from the first frame by first flexures. The at least one accelerometer has an associated sensitive axis and an associated rate axis that is orthogonally disposed to the sensitive axis. The integrated sensor further includes structure for dithering or vibrating the proof mass along a dither axis that is disposed perpendicularly to both the rate and the sensitive axes. The dithering structure includes at least first and second interdigitated electrodes. Finger portions of the electrodes are disposed for exerting an electrostatic force upon a portion of the planar body in response to an oscillatory drive signal. The portion of the planar body has a plurality of linear grooves formed therein, the plurality of linear grooves being disposed in a parallel orientation with the finger portions. A vibrating accelerometer gyro (VAG) structure is constructed by micromachining techniques such that the linear momenta of two vibrating MSAs balance one another. A symmetrical disposition of the vibrating proof masses tends to balance the linear momenta of the MSAs, and increases the resonance amplification factor (Q).

摘要翻译： 集成速率和加速度传感器包括由基本平坦的硅体形成的至少一个加速度计。 所述至少一个微硅加速度计（MSA）包括第一框架和通过第一挠曲从所述第一框架悬挂的证明块。 所述至少一个加速度计具有相关联的灵敏轴和相关联的速率轴，其正交地设置在所述敏感轴上。 集成传感器还包括用于沿着垂直于速率和敏感轴设置的抖动轴抖动或振动证明物质的结构。 抖动结构至少包括第一和第二叉指电极。 电极的手指部分被布置成响应于振荡驱动信号而对平面体的一部分施加静电力。 平面体的​​部分具有形成在其中的多个直线槽，多个直线槽与手指部分平行地设置。 通过微加工技术构建振动加速度计陀螺（VAG）结构，使得两个振动MSA的线性力矩彼此平衡。 振动质量块的对称布置倾向于平衡MSA的线性力矩，并增加了共振放大系数（Q）。

公开(公告)号：US5205171A

公开(公告)日：1993-04-27

申请号：US640449

申请日：1991-01-11

申请人： Benedict B. O'Brien ,  Brent E. Burns ,  John A. Geen

发明人： Benedict B. O'Brien ,  Brent E. Burns ,  John A. Geen

IPC分类号： G01P15/125 ,  B81B3/00 ,  G01C19/5719 ,  G01P15/13

CPC分类号： G01C19/5719 ,  G01P15/131 ,  G01P2015/0828

摘要： A miniature accelerometer is fabricated using integrated circuit manufacturing and silicon micromachining techniques to form a closed loop, force balance sensor utilizing a silicon proofmass formed from and connected to a layer of silicon by a split flexure etched therein. The sensor circuitry detects AC signals coupled from the proofmass to a pair of electrodes formed on glass surfaces anodically bonded to the silicon layer. A DC restorative force is applied to the electrodes in response to the detected AC signals to balance acceleration forces applied to the proofmass. The sensor design is highly symmetrical.

摘要翻译： 使用集成电路制造和硅微加工技术制造微型加速度计，以通过其中蚀刻的分裂挠曲形成利用由硅层形成并连接到硅层的硅隔离膜的闭环力平衡传感器。 传感器电路检测从校样件耦合到在阳极结合到硅层的玻璃表面上形成的一对电极的AC信号。 响应于检测到的AC信号，直流恢复力被施加到电极以平衡施加到校样的加速力。 传感器设计高度对称。