摘要:
A vacuum pump includes a pump inlet, a pump outlet, a rotor rotatable about an axis of rotation, at least one process gas pump stage for conveying a process gas present at the pump inlet from the pump inlet to the pump outlet, a motor space, and a drive motor which is arranged in the motor space, is configured for rotationally driving the rotor and which has a motor stator, wherein at least one gas path is provided for the process gas from the pump inlet to the pump outlet which leads through the motor space and which leads at least sectionally along the motor stator or through the motor stator.
摘要:
A stator element for a Holweck pump stage has a base shape of substantially cylinder jacket shape or a kit of parts for a stator element for a Holweck pump stage which has a base shape of a substantially cylinder jacket shape, wherein the stator element or the kit of parts comprises a plurality of stator parts which are separate from one another, which are assembled to form the stator element or can be assembled to form the stator element. A vacuum pump having a Holweck pump stage as well as to a method of manufacturing a stator element for a Holweck pump stage or of manufacturing a kit of parts for a stator element for a Holweck pump stage are also disclosed.
摘要:
A vacuum pump has a rotor mounted on a rotor shaft and provided with pump active components cooperating with opposite stationary pump active components, fastening element for securing the rotor on the rotor shaft, and a safety element provided in addition to the fastening element for preventing rotation of the rotor and the rotor shaft relative to each other.
摘要:
A pump module (4, 5, 6; 4′, 4″) includes a housing (14) that limits at least one channel (17) connecting at least one inlet with at least one outlet, an elastic membrane (18; 21; 22) extending in the housing in a flow direction, and a plurality of actuators located in the housing opposite each other on both sides of the at least one flow channel and forming actuation stages (A1-A6) arranged one after another in the flow direction, with a respective section of the elastic membrane being deflected and abutting a respective circumferential section of the at least one flow channel upon activation of an actuator of a respective actuation stage for forming a delivery chamber.