公开(公告)号：US20200072215A1

公开(公告)日：2020-03-05

申请号：US16548075

申请日：2019-08-22

申请人： Pfeiffer Vacuum GmbH

发明人： Sebastian OBERBECK

IPC分类号： F04C2/344 ,  C08F214/26 ,  F01C21/08

摘要： The invention relates to a rotary vane vacuum pump comprising a housing member whose inner wall defines at least one pumping space, and a rotor that is arranged for rotation in the pumping space and has a rotor member and at least one vane, wherein the vane projects radially beyond the rotor member and together with the inner wall of the housing body a pumping volume that can be pumped by rotation of the rotor from an inlet to an outlet of the rotary vane vacuum pump, wherein the vane, at least in a region cooperating with the inner wall, comprises a polytetrafluoroethylene material containing polyimide particles and manufactured by hot pressing and sintering, and wherein the inner wall has a slide layer at least in a region cooperating with the vane, said slide layer comprising an oxide layer formed by anodic oxidation in an electrolyte including oxalic acid.

公开(公告)号：US09964121B2

公开(公告)日：2018-05-08

申请号：US14191658

申请日：2014-02-27

申请人： Pfeiffer Vacuum GmbH

发明人： Michael Schill

IPC分类号： F04D29/58 ,  F04D19/04

CPC分类号： F04D29/584 ,  F04D19/042

摘要： A vacuum pump, in particular to a turbomolecular pump, has a pump inlet, a pump outlet and a pump space for a gas to be pumped arranged between the pump inlet and the pump outlet, and at least one cooling gas inlet for a cooling gas for cooling the vacuum pump, the pump further having one or more hollow regions for the cooling gas connected in a gas conducting manner to the cooling gas inlet and arranged outside the pump space, wherein the or each hollow region is bounded by at least one component of the vacuum pump to be cooled.

公开(公告)号：US09887604B2

公开(公告)日：2018-02-06

申请号：US14067236

申请日：2013-10-30

申请人： Pfeiffer Vacuum GmbH

发明人： Wolfgang Bremer ,  Armin Conrad

IPC分类号： H02K7/02 ,  F03G3/08 ,  F04D19/04

CPC分类号： H02K7/025 ,  F03G3/08 ,  F04D19/044

摘要： An apparatus for kinetic energy storage includes an electrical machine operable at least in one of motor mode and generator mode, and at least one energy recovery system for an intermediate storage of a produced kinetic energy and which converts the kinetic energy into an electrical energy, with, the at least one energy recovery system having at least one flywheel body formed as a rotor, and a stator and with at least one of the rotor and the stator being formed as at least one vacuum pump stage.

公开(公告)号：US09745978B2

公开(公告)日：2017-08-29

申请号：US14538107

申请日：2014-11-11

申请人： Pfeiffer Vacuum GmbH

发明人： Christopher Kobus ,  Kevin Schneider

IPC分类号： F03C4/00 ,  F04C2/00 ,  F04C15/00 ,  F04C18/344 ,  F04C2/344 ,  F04C29/04 ,  F04C29/12 ,  F04C18/12 ,  F01C21/10

CPC分类号： F04C15/0096 ,  F01C21/10 ,  F04C2/344 ,  F04C18/126 ,  F04C18/344 ,  F04C29/04 ,  F04C29/12 ,  F04C2240/30 ,  F04C2250/101 ,  F04C2250/102

摘要： A housing for a rotary vane pump includes a suction flange and a discharge flange having a multi-angular cross-section with at least two sides extending parallel to each other, cooling ribs provided on an outer surface of the housing, with the number of cooling ribs in the region with a high internal pressure being greater than a number of cooling ribs in the region with a low internal pressure, inlet and outlet, with the inlet cross-section being greater than the outlet cross-section, and connection elements provided on the housing and each having two installation surfaces connected by a connection surface.

公开(公告)号：US20170058883A1

公开(公告)日：2017-03-02

申请号：US15245347

申请日：2016-08-24

申请人： Pfeiffer Vacuum GmbH

发明人： Armin CONRAD

IPC分类号： F04B45/047 ,  F04B49/22 ,  F04B45/04 ,  F04B41/06 ,  F04B53/10 ,  F04B49/06

CPC分类号： F04B45/047 ,  F04B35/045 ,  F04B37/14 ,  F04B37/16 ,  F04B41/06 ,  F04B43/0054 ,  F04B43/02 ,  F04B43/023 ,  F04B43/04 ,  F04B43/14 ,  F04B45/041 ,  F04B49/06 ,  F04B49/22 ,  F04B53/1075

摘要： A membrane vacuum pump has at least one working space which is bounded by a membrane deformable to change the size of the working space and by a wall in which at least one inlet and at least one outlet are formed for a medium which is sucked into the working space which increases in size in so doing in a suction phase and is expelled via the outlet from the working space which decreases in size in so doing in a compression phase. The membrane vacuum pump furthermore has a controllable actuator unit for deforming the membrane by a contactless action on the membrane by means of electrical and/or magnetic fields.

摘要翻译： 膜真空泵具有至少一个工作空间，该工作空间由可变形的膜限定，以改变工作空间的尺寸和壁，其中形成至少一个入口和至少一个出口用于介质被吸入 工作空间，其在抽吸阶段中的大小增加，并且经由出口从工作空间排出，其在压缩阶段中的尺寸减小。 膜真空泵还具有可控的致动器单元，用于通过电场和/或磁场通过膜上的非接触作用使膜变形。

公开(公告)号：US20150167679A1

公开(公告)日：2015-06-18

申请号：US14571355

申请日：2014-12-16

申请人： Pfeiffer Vacuum GmbH

发明人： Bernhard Koch

IPC分类号： F04D19/04 ,  F04D29/54

CPC分类号： F04D19/044 ,  F04D17/168 ,  F04D19/042 ,  F04D29/4213 ,  F04D29/522 ,  F04D29/541

摘要： A vacuum pump includes at least one vacuum pump stage having a housing with an inlet, and a rotor having a shaft, with the inlet being arranged radially to the shaft and widening in direction of the shaft.

摘要翻译： 真空泵包括至少一个真空泵级，其具有带入口的壳体和具有轴的转子，该入口径向地布置在轴上并且在轴的方向上变宽。

公开(公告)号：US20150064033A1

公开(公告)日：2015-03-05

申请号：US14474536

申请日：2014-09-02

申请人： Pfeiffer Vacuum GmbH

发明人： Tobias Stoll ,  Michael Schweighoefer ,  Robert Watz ,  Jan Hofmann

IPC分类号： F04D19/04

CPC分类号： F04D19/042 ,  F04D19/04 ,  F04D29/522 ,  F04D29/5853 ,  F04D29/601 ,  F04D29/668

摘要： A vacuum pump includes a housing having an axial inlet a pumping unit including a stator, a rotor rotatably supported in the stator, and a drive for driving the rotor. At least one housing part which has at least one outlet, is placed on the housing in an axial direction and is connected with the housing.

摘要翻译： 真空泵包括具有轴向入口的壳体，泵送单元包括定子，可旋转地支撑在定子中的转子和用于驱动转子的驱动器。 具有至少一个出口的至少一个壳体部件沿轴向方向被放置在壳体上并且与壳体连接。

公开(公告)号：US20150010409A1

公开(公告)日：2015-01-08

申请号：US14320750

申请日：2014-07-01

申请人： Pfeiffer Vacuum GmbH

发明人： Thorsten BURGGRAF ,  Juergen WISSNER

IPC分类号： F04B45/027 ,  F04B49/06

CPC分类号： F04B45/027 ,  F04B37/14 ,  F04B41/06 ,  F04B45/04 ,  F04B49/03 ,  F04B49/06 ,  F04B53/04 ,  F04C23/005 ,  F04C2220/50 ,  F04D19/042

摘要： A membrane vacuum pump includes at least one membrane pump stage, at least one inlet valve for a process gas to be conveyed associated with the membrane pump stage, and at least one gas ballast valve for the supply of a ballast gas. The flow path for the ballast gas, leading through the gas ballast valve, opens into the flow path for the process gas behind the inlet valve in the direction of flow of the process gas.

摘要翻译： 膜真空泵包括至少一个膜泵级，至少一个用于与膜泵泵级相关联输送的工艺气体的入口阀以及用于供应压载气体的至少一个气镇阀。 用于通过气镇阀的压载气体的流动通道在进气阀后面的处理气体的流动路径中朝向处理气体的流动方向开放。

公开(公告)号：US20140348634A1

公开(公告)日：2014-11-27

申请号：US14367131

申请日：2012-12-20

申请人： PFEIFFER VACUUM GMBH

发明人： Thibaut Bourrilhon ,  Rainer Mathes ,  Nicolas Varennes

IPC分类号： F04D19/04 ,  F04D29/60 ,  F04D25/16

CPC分类号： F04D19/042 ,  F04D19/046 ,  F04D25/16 ,  F04D29/60 ,  F04D29/601

摘要： The invention relates to an adapter for vacuum pumps, characterized in that it comprises an annular inlet flange (15) intended to be coupled to an outlet orifice of a chamber and an outlet coupling (16) comprising at least two cylindrical outlet through-housings (21) and forming an at least partial pump casing for the case (4) of a respective turbomolecular vacuum pump (3), said turbomolecular vacuum pumps (3) being intended to be received in a respective cylindrical outlet housing (21). The invention also relates to a pumping device, characterized in that it comprises an adapter for vacuum pumps (2) as described hereinabove and at least two turbomolecular vacuum pumps (3) housed at least partially in a respective cylindrical outlet housing (21).

摘要翻译： 本发明涉及一种用于真空泵的适配器，其特征在于，它包括一个环形进口凸缘（15），该环形入口凸缘（15）将被连接到腔室的出口孔口，以及一个出口连接件（16），该连接器包括至少两个圆柱形出口通过壳体 并且形成用于相应的涡轮分子真空泵（3）的壳体（4）的至少部分泵壳体，所述涡轮分子真空泵（3）旨在容纳在相应的圆柱形出口壳体（21）中。 本发明还涉及一种泵送装置，其特征在于，其包括如上所述的用于真空泵（2）的适配器和至少部分容纳在相应的圆柱形出口壳体（21）中的至少两个涡轮分子真空泵（3）。

公开(公告)号：US20140306407A1

公开(公告)日：2014-10-16

申请号：US14228427

申请日：2014-03-28

申请人： Pfeiffer Vacuum GmbH

发明人： Tobias Stoll ,  Robert Watz ,  Michael Schweighoefer

IPC分类号： F04D29/16

CPC分类号： F04D29/16 ,  F04D19/04 ,  F04D29/023 ,  F04D29/083 ,  F04D29/522 ,  F05D2300/171 ,  F05D2300/43 ,  F16L23/16

摘要： A vacuum pump includes at least one vacuum port for releasably connecting the vacuum pump with at least one recipient an elastomeric seal for sealing the vacuum port against atmosphere a diaphragm gland provided on a vacuum side of the vacuum port and at least one of at least one suction channel and at least one suction opening provided between the elastomeric seal and the diaphragm gland.

摘要翻译： 真空泵包括至少一个真空端口，用于将真空泵与至少一个接收器可释放地连接，用于将设置在真空端口的真空侧上的隔膜压盖密封到真空端口的气体的弹性密封件，以及至少一个 吸入通道和设置在弹性体密封件和隔膜压盖之间的至少一个吸入口。