公开(公告)号：US08878321B2

公开(公告)日：2014-11-04

申请号：US13618410

申请日：2012-09-14

申请人： Hisanori Aikawa ,  Hiroaki Yoda ,  Masahiko Nakayama ,  Tatsuya Kishi ,  Sumio Ikegawa

发明人： Hisanori Aikawa ,  Hiroaki Yoda ,  Masahiko Nakayama ,  Tatsuya Kishi ,  Sumio Ikegawa

IPC分类号： H01L29/82 ,  H01L21/8246 ,  H01L43/08 ,  H01L43/12 ,  H01L27/22

CPC分类号： H01L43/12 ,  H01L27/228 ,  H01L43/08

摘要： According to one embodiment, a magnetoresistive element comprises a first magnetic layer, in which a magnetization direction is variable and is perpendicular to a film surface, a tunnel barrier layer that is formed on the first magnetic layer, and a second magnetic layer that is formed on the tunnel barrier layer, a magnetization direction of the second magnetic layer being variable and being perpendicular to the film surface. The second magnetic layer comprises a body layer that constitutes an origin of perpendicular magnetic anisotropy, and an interface layer that is formed between the body layer and the tunnel barrier layer. The interface layer has a permeability higher than that of the body layer and a planar size larger than that of the body layer.

摘要翻译： 根据一个实施例，磁阻元件包括其中磁化方向可变并且垂直于膜表面的第一磁性层，形成在第一磁性层上的隧道势垒层和形成的第二磁性层 在隧道势垒层上，第二磁性层的磁化方向是可变的并垂直于膜表面。 第二磁性层包括构成垂直磁各向异性的原点的主体层以及形成在主体层与隧道势垒层之间的界面层。 界面层的透过率比体层高，平面尺寸比体层大。

公开(公告)号：US08530987B2

公开(公告)日：2013-09-10

申请号：US13432486

申请日：2012-03-28

申请人： Hisanori Aikawa ,  Tadashi Kai ,  Masahiko Nakayama ,  Sumio Ikegawa ,  Naoharu Shimomura ,  Eiji Kitagawa ,  Tatsuya Kishi ,  Jyunichi Ozeki ,  Hiroaki Yoda ,  Satoshi Yanagi

发明人： Hisanori Aikawa ,  Tadashi Kai ,  Masahiko Nakayama ,  Sumio Ikegawa ,  Naoharu Shimomura ,  Eiji Kitagawa ,  Tatsuya Kishi ,  Jyunichi Ozeki ,  Hiroaki Yoda ,  Satoshi Yanagi

IPC分类号： H01L29/82 ,  G11C11/02

CPC分类号： H01L43/08 ,  G11C11/161 ,  H01L27/228

摘要： A magnetic memory includes a magnetoresistive element. The magnetoresistive element includes a reference layer having an invariable magnetization direction, a storage layer having a variable magnetization direction, and a spacer layer provided between the reference layer and the storage layer. The storage layer has a multilayered structure including first and second magnetic layers, the second magnetic layer is provided between the first magnetic layer and the spacer layer and has a magnetic anisotropy energy lower than that of the first magnetic layer, and an exchange coupling constant Jex between the first magnetic layer and the second magnetic layer is not more than 5 erg/cm2.

摘要翻译： 磁存储器包括磁阻元件。 磁阻元件包括具有不变磁化方向的参考层，具有可变磁化方向的存储层和设置在参考层和存储层之间的间隔层。 存储层具有包括第一和第二磁性层的多层结构，第二磁性层设置在第一磁性层和间隔层之间，其磁各向异性能量低于第一磁性层的磁各向异性能，交换耦合常数Jex 第一磁性层和第二磁性层之间的距离不大于5erg / cm2。

公开(公告)号：US20130069184A1

公开(公告)日：2013-03-21

申请号：US13618410

申请日：2012-09-14

申请人： Hisanori AIKAWA ,  Hiroaki YODA ,  Masahiko NAKAYAMA ,  Tatsuya KISHI ,  Sumio IKEGAWA

发明人： Hisanori AIKAWA ,  Hiroaki YODA ,  Masahiko NAKAYAMA ,  Tatsuya KISHI ,  Sumio IKEGAWA

IPC分类号： H01L29/82 ,  H01L21/8246

CPC分类号： H01L43/12 ,  H01L27/228 ,  H01L43/08

摘要： According to one embodiment, a magnetoresistive element comprises a first magnetic layer, in which a magnetization direction is variable and is perpendicular to a film surface, a tunnel barrier layer that is formed on the first magnetic layer, and a second magnetic layer that is formed on the tunnel barrier layer, a magnetization direction of the second magnetic layer being variable and being perpendicular to the film surface. The second magnetic layer comprises a body layer that constitutes an origin of perpendicular magnetic anisotropy, and an interface layer that is formed between the body layer and the tunnel barrier layer. The interface layer has a permeability higher than that of the body layer and a planar size larger than that of the body layer.

摘要翻译： 根据一个实施例，磁阻元件包括其中磁化方向可变并且垂直于膜表面的第一磁性层，形成在第一磁性层上的隧道势垒层和形成的第二磁性层 在隧道势垒层上，第二磁性层的磁化方向是可变的并垂直于膜表面。 第二磁性层包括构成垂直磁各向异性的原点的主体层以及形成在主体层与隧道势垒层之间的界面层。 界面层的透过率比体层高，平面尺寸比体层大。

公开(公告)号：US08378437B2

公开(公告)日：2013-02-19

申请号：US12248484

申请日：2008-10-09

申请人： Masahiko Nakayama ,  Kay Yakushiji ,  Sumio Ikegawa ,  Shinji Yuasa ,  Tadashi Kai ,  Toshihiko Nagase ,  Minoru Amano ,  Hisanori Aikawa ,  Tatsuya Kishi ,  Hiroaki Yoda

发明人： Masahiko Nakayama ,  Kay Yakushiji ,  Sumio Ikegawa ,  Shinji Yuasa ,  Tadashi Kai ,  Toshihiko Nagase ,  Minoru Amano ,  Hisanori Aikawa ,  Tatsuya Kishi ,  Hiroaki Yoda

IPC分类号： H01L29/82

CPC分类号： H01L27/228 ,  B82Y25/00 ,  G11C11/15 ,  G11C11/1659 ,  G11C11/1675 ,  H01F10/123 ,  H01F10/325 ,  H01F10/3254 ,  H01F10/3286 ,  H01L43/08

摘要： A magnetoresistive effect element includes a reference layer, a recording layer, and a nonmagnetic layer. The reference layer is made of a magnetic material, has an invariable magnetization which is perpendicular to a film surface. The recording layer is made of a magnetic material, has a variable magnetization which is perpendicular to the film surface. The nonmagnetic layer is arranged between the reference layer and the recording layer. A critical diameter which is determined by magnetic anisotropy, saturation magnetization, and switched connection of the recording layer and has a single-domain state as a unique stable state or a critical diameter which has a single-domain state as a unique stable state and is inverted while keeping the single-domain state in an inverting process is larger than an element diameter of the magnetoresistive effect element.

摘要翻译： 磁阻效应元件包括参考层，记录层和非磁性层。 参考层由磁性材料制成，具有垂直于膜表面的不变磁化。 记录层由磁性材料制成，具有垂直于膜表面的可变磁化强度。 非磁性层布置在参考层和记录层之间。 临界直径由磁各向异性，饱和磁化强度和记录层的开关连接确定，并且具有作为独特稳定状态的单畴状态或具有单域状态作为唯一稳定状态的临界直径，并且是 在反转过程中保持单畴状态的反转大于磁阻效应元件的元件直径。

公开(公告)号：US08143684B2

公开(公告)日：2012-03-27

申请号：US13013141

申请日：2011-01-25

申请人： Makoto Nagamine ,  Toshihiko Nagase ,  Sumio Ikegawa ,  Katsuya Nishiyama ,  Masatoshi Yoshikawa

发明人： Makoto Nagamine ,  Toshihiko Nagase ,  Sumio Ikegawa ,  Katsuya Nishiyama ,  Masatoshi Yoshikawa

IPC分类号： G11C11/00 ,  H01L29/82

CPC分类号： H01L43/08 ,  G11C11/161 ,  G11C11/1659 ,  H01L27/224 ,  H01L27/228

摘要： A magnetoresistive element includes a first magnetic layer which includes a first surface and a second surface and has a first standard electrode potential, a second magnetic layer, a barrier layer which is provided between the second magnetic layer and the first surface of the first magnetic layer, and a nonmagnetic cap layer which contacts the second surface of the first magnetic layer and is formed from an alloy of a first metal material and a second metal material, the first metal material having a second standard electrode potential lower than the first standard electrode potential, the second metal material having a third standard electrode potential higher than the first standard electrode potential.

摘要翻译： 磁阻元件包括第一磁性层，其包括第一表面和第二表面，并且具有第一标准电极电位，第二磁性层，设置在第二磁性层和第一磁性层的第一表面之间的阻挡层 以及非磁性覆盖层，其与所述第一磁性层的第二表面接触并且由第一金属材料和第二金属材料的合金形成，所述第一金属材料具有低于所述第一标准电极电位的第二标准电极电位 所述第二金属材料具有比所述第一标准电极电位高的第三标准电极电位。

公开(公告)号：US08120948B2

公开(公告)日：2012-02-21

申请号：US12561495

申请日：2009-09-17

申请人： Masahiko Nakayama ,  Hisanori Aikawa ,  Tsuneo Inaba ,  Kenji Tsuchida ,  Sumio Ikegawa ,  Hiroaki Yoda ,  Naoharu Shimomura

发明人： Masahiko Nakayama ,  Hisanori Aikawa ,  Tsuneo Inaba ,  Kenji Tsuchida ,  Sumio Ikegawa ,  Hiroaki Yoda ,  Naoharu Shimomura

IPC分类号： G11C11/00

CPC分类号： H01L27/228 ,  G11C11/161 ,  G11C11/1675

摘要： A data writing method for a magnetoresistive effect element of an aspect of the present invention including generating a write current in which a falling period from the start of a falling edge to the end of the falling edge is longer than a rising period from the start of a rising edge to the end of the rising edge, and flowing the write current through the magnetoresistive effect element which comprises a first magnetic layer having an invariable magnetizing direction, a second magnetic layer having a variable magnetizing direction, and a tunnel barrier layer provided between the first magnetic layer and the second magnetic layer, to change the magnetizing direction of the second magnetic layer.

摘要翻译： 一种用于本发明一个方面的磁阻效应元件的数据写入方法，包括产生写入电流，其中从下降沿开始到下降沿结束的下降周期长于从开始 上升沿到上升沿结束，并且使写入电流流过磁阻效应元件，该磁阻效应元件包括具有不变磁化方向的第一磁性层，具有可变磁化方向的第二磁性层和设置在可变磁化方向之间的隧道势垒层， 第一磁性层和第二磁性层，以改变第二磁性层的磁化方向。

公开(公告)号：US07875903B2

公开(公告)日：2011-01-25

申请号：US12037726

申请日：2008-02-26

申请人： Masahiko Nakayama ,  Tadashi Kai ,  Sumio Ikegawa ,  Yoshiaki Fukuzumi ,  Tatsuya Kishi

发明人： Masahiko Nakayama ,  Tadashi Kai ,  Sumio Ikegawa ,  Yoshiaki Fukuzumi ,  Tatsuya Kishi

IPC分类号： H01L29/82

CPC分类号： H01L43/08 ,  B82Y10/00 ,  G11C11/16 ,  H01L27/222 ,  H01L27/224 ,  H01L27/228

摘要： A magnetic memory device includes a magnetoresistive element and a first wiring layer. The magnetoresistive element includes a fixed layer, a recording layer, and a non-magnetic layer interposed therebetween. The first wiring layer extends in a first direction and generates a magnetic field for recording data in the magnetoresistive element. The recording layer includes a base portion extending in a second direction rotated from the first direction by an angle falling within a range of more than 0° to not more than 20°, and first and second projections projecting from the first and second sides of the base portion in a third direction perpendicular to the second direction. The third and fourth sides of the base portion are inclined with respect to the third direction in the same rotational direction as a rotational direction in which the second direction is rotated.

摘要翻译： 磁存储器件包括磁阻元件和第一布线层。 磁阻元件包括固定层，记录层和介于其间的非磁性层。 第一布线层沿第一方向延伸并产生用于在磁阻元件中记录数据的磁场。 记录层包括从第一方向旋转了大于0°至不大于20°的角度的第二方向延伸的基部，以及从第一和第二侧的第一和第二侧突出的第一和第二突出部 在与第二方向垂直的第三方向上的基部。 基部的第三和第四侧相对于第三方向在与第二方向旋转的旋转方向相同的旋转方向上倾斜。

公开(公告)号：US20100073998A1

公开(公告)日：2010-03-25

申请号：US12561495

申请日：2009-09-17

申请人： Masahiko NAKAYAMA ,  Hisanori Aikawa ,  Tsuneo Inaba ,  Kenji Tsuchida ,  Sumio Ikegawa ,  Hiroaki Yoda ,  Naoharu Shimomura

发明人： Masahiko NAKAYAMA ,  Hisanori Aikawa ,  Tsuneo Inaba ,  Kenji Tsuchida ,  Sumio Ikegawa ,  Hiroaki Yoda ,  Naoharu Shimomura

IPC分类号： G11C11/00 ,  G11C7/00

CPC分类号： H01L27/228 ,  G11C11/161 ,  G11C11/1675

摘要： A data writing method for a magnetoresistive effect element of an aspect of the present invention including generating a write current in which a falling period from the start of a falling edge to the end of the falling edge is longer than a rising period from the start of a rising edge to the end of the rising edge, and flowing the write current through the magnetoresistive effect element which comprises a first magnetic layer having an invariable magnetizing direction, a second magnetic layer having a variable magnetizing direction, and a tunnel barrier layer provided between the first magnetic layer and the second magnetic layer, to change the magnetizing direction of the second magnetic layer.

摘要翻译： 一种用于本发明一个方面的磁阻效应元件的数据写入方法，包括产生写入电流，其中从下降沿开始到下降沿结束的下降周期长于从开始 上升沿到上升沿结束，并且使写入电流流过磁阻效应元件，该磁阻效应元件包括具有不变磁化方向的第一磁性层，具有可变磁化方向的第二磁性层和设置在可变磁化方向之间的隧道势垒层， 第一磁性层和第二磁性层，以改变第二磁性层的磁化方向。

公开(公告)号：US07518907B2

公开(公告)日：2009-04-14

申请号：US12019743

申请日：2008-01-25

申请人： Masahiko Nakayama ,  Tadashi Kai ,  Tatsuya Kishi ,  Yoshiaki Fukuzumi ,  Toshihiko Nagase ,  Sumio Ikegawa ,  Hiroaki Yoda

发明人： Masahiko Nakayama ,  Tadashi Kai ,  Tatsuya Kishi ,  Yoshiaki Fukuzumi ,  Toshihiko Nagase ,  Sumio Ikegawa ,  Hiroaki Yoda

IPC分类号： G11C11/00

CPC分类号： H01L43/08 ,  G11C11/161 ,  G11C11/1657 ,  G11C11/1659 ,  G11C11/1673 ,  G11C11/1675 ,  Y10T428/1121

摘要： A magnetoresistive element includes a first ferromagnetic layer having a first magnetization, the first magnetization having a first pattern when the magnetoresistive element is half-selected during a first data write, a second pattern when the magnetoresistive element is selected during a second data write, and a third pattern of residual magnetization, the first pattern being different from the second and third pattern, a second ferromagnetic layer having a second magnetization, and a nonmagnetic layer arranged between the first ferromagnetic layer and the second ferromagnetic layer and having a tunnel conductance changing dependent on a relative angle between the first magnetization and the second magnetization.

摘要翻译： 磁阻元件包括具有第一磁化的第一铁磁层，当在第一数据写入期间磁阻元件被半选择时，第一磁化具有第一图案，当在第二数据写入期间选择磁阻元件时的第二图案;以及 剩余磁化的第三图案，第一图案不同于第二和第三图案，具有第二磁化的第二铁磁层，以及布置在第一铁磁层和第二铁磁层之间并且具有隧道电导变化依赖性的非磁性层 在第一磁化和第二磁化之间的相对角度上。

公开(公告)号：US20080180859A1

公开(公告)日：2008-07-31

申请号：US12014522

申请日：2008-01-15

申请人： Tomomasa UEDA ,  Hisanori AIKAWA ,  Masatoshi YOSHIKAWA ,  Naoharu SHIMOMURA ,  Masahiko NAKAYAMA ,  Sumio IKEGAWA ,  Keiji HOSOTANI ,  Makoto NAGAMINE

发明人： Tomomasa UEDA ,  Hisanori AIKAWA ,  Masatoshi YOSHIKAWA ,  Naoharu SHIMOMURA ,  Masahiko NAKAYAMA ,  Sumio IKEGAWA ,  Keiji HOSOTANI ,  Makoto NAGAMINE

IPC分类号： G11B5/33

CPC分类号： G11C11/15 ,  H01L27/228 ,  H01L43/08

摘要： A magnetoresistive element includes: a magnetization free layer having a first plane and a second plane located on the opposite side from the first plane, and having a variable magnetization direction; a magnetization pinned layer provided on the first plane side of the magnetization free layer, and having a pinned magnetization direction; a first tunnel barrier layer provided between the magnetization free layer and the magnetization pinned layer; a second tunnel barrier layer provided on the second plane of the magnetization free layer; and a non-magnetic layer provided on a plane on the opposite side of the second tunnel barrier layer from the magnetization free layer. The magnetization direction of the magnetization free layer is variable by applying current between the magnetization pinned layer and the non-magnetic layer, and a resistance ratio between the first tunnel barrier layer and the second tunnel barrier layer is in a range of 1:0.25 to 1:4.

摘要翻译： 磁阻元件包括：无磁化层，其具有第一平面和位于与第一平面相反的一侧的第二平面，并且具有可变的磁化方向; 磁化固定层，设置在所述磁化自由层的所述第一平面侧上，并且具有钉扎磁化方向; 设置在所述磁化自由层和所述磁化固定层之间的第一隧道势垒层; 设置在无磁化层的第二平面上的第二隧道势垒层; 以及设置在与磁化自由层相反的第二隧道势垒层的相对侧上的平面上的非磁性层。 磁化自由层的磁化方向通过在磁化被钉扎层和非磁性层之间施加电流而变化，并且第一隧道势垒层和第二隧道势垒层之间的电阻比在1:0.25至 1：4。